JPS5943823Y2 - リニアパルスモ−タ− - Google Patents

リニアパルスモ−タ−

Info

Publication number
JPS5943823Y2
JPS5943823Y2 JP12260680U JP12260680U JPS5943823Y2 JP S5943823 Y2 JPS5943823 Y2 JP S5943823Y2 JP 12260680 U JP12260680 U JP 12260680U JP 12260680 U JP12260680 U JP 12260680U JP S5943823 Y2 JPS5943823 Y2 JP S5943823Y2
Authority
JP
Japan
Prior art keywords
stator
pulse motor
salient pole
linear pulse
salient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12260680U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5745290U (enrdf_load_stackoverflow
Inventor
光飛虎 飯田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP12260680U priority Critical patent/JPS5943823Y2/ja
Publication of JPS5745290U publication Critical patent/JPS5745290U/ja
Application granted granted Critical
Publication of JPS5943823Y2 publication Critical patent/JPS5943823Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP12260680U 1980-08-28 1980-08-28 リニアパルスモ−タ− Expired JPS5943823Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12260680U JPS5943823Y2 (ja) 1980-08-28 1980-08-28 リニアパルスモ−タ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12260680U JPS5943823Y2 (ja) 1980-08-28 1980-08-28 リニアパルスモ−タ−

Publications (2)

Publication Number Publication Date
JPS5745290U JPS5745290U (enrdf_load_stackoverflow) 1982-03-12
JPS5943823Y2 true JPS5943823Y2 (ja) 1984-12-27

Family

ID=29483212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12260680U Expired JPS5943823Y2 (ja) 1980-08-28 1980-08-28 リニアパルスモ−タ−

Country Status (1)

Country Link
JP (1) JPS5943823Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237851A (ja) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd リニアパルスモータ
JPS60237850A (ja) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd リニアパルスモータ
JPS60237853A (ja) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd リニアパルスモ−タ

Also Published As

Publication number Publication date
JPS5745290U (enrdf_load_stackoverflow) 1982-03-12

Similar Documents

Publication Publication Date Title
JPH09167792A (ja) ステージ装置およびリニアモータ、ならびに前記ステージ装置を用いた露光装置およびデバイス生産方法
KR20030051770A (ko) Ｘｙｚ-축 테이블
JPS5943823Y2 (ja) リニアパルスモ−タ−
US3904897A (en) Pulse operated surface motor stator
JPH0140596B2 (enrdf_load_stackoverflow)
JPH0635659Y2 (ja) 可動磁石形リニア直流モータ
JPH11196561A (ja) 制動特性が調節可能なリニアモータ
JPH01318538A (ja) 両側式リニアパルスモータ
JP2006197773A (ja) リニアモータ
JPS5668265A (en) Linear pulse motor
JPS6311899Y2 (enrdf_load_stackoverflow)
JPH0747987Y2 (ja) パルスモータ
JPS6395849A (ja) リニアパルスモ−タ
JPS591415Y2 (ja) 直線運動電動機
JPS5814701Y2 (ja) リニアパルスモ−タの磁束発生装置
JPS5843428Y2 (ja) 直線運動電動機
JPS63228954A (ja) リニアパルスモ−タの２次側固定子
JP2576286B2 (ja) アウタロータ型パルスモータ
JPS62254682A (ja) コイル可動形リニア直流モ−タ
JPS6110471Y2 (enrdf_load_stackoverflow)
JP2003304695A (ja) リニアモータ、その制御装置及びその制御方法
JPS59160767A (ja) 速度検出装置
JPS626864Y2 (enrdf_load_stackoverflow)
JPS6142270A (ja) リニアパルスモ−タ
JPS62262648A (ja) 永久磁石形サ−フエイスパルスモ−タ