JPS5943519A - プラズマｃｖｄ装置における排気系装置 - Google Patents

プラズマｃｖｄ装置における排気系装置

Info

Publication number
JPS5943519A
JPS5943519A JP15254882A JP15254882A JPS5943519A JP S5943519 A JPS5943519 A JP S5943519A JP 15254882 A JP15254882 A JP 15254882A JP 15254882 A JP15254882 A JP 15254882A JP S5943519 A JPS5943519 A JP S5943519A
Authority
JP
Japan
Prior art keywords
exhaust system
gas
reaction chamber
air
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15254882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0415612B2 (https=
Inventor
Toshiaki Fujioka
藤岡　俊昭
Kiyoshi Oshii
押井　清志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP15254882A priority Critical patent/JPS5943519A/ja
Publication of JPS5943519A publication Critical patent/JPS5943519A/ja
Publication of JPH0415612B2 publication Critical patent/JPH0415612B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrodes Of Semiconductors (AREA)
JP15254882A 1982-09-03 1982-09-03 プラズマｃｖｄ装置における排気系装置 Granted JPS5943519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15254882A JPS5943519A (ja) 1982-09-03 1982-09-03 プラズマｃｖｄ装置における排気系装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15254882A JPS5943519A (ja) 1982-09-03 1982-09-03 プラズマｃｖｄ装置における排気系装置

Publications (2)

Publication Number Publication Date
JPS5943519A true JPS5943519A (ja) 1984-03-10
JPH0415612B2 JPH0415612B2 (https=) 1992-03-18

Family

ID=15542864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15254882A Granted JPS5943519A (ja) 1982-09-03 1982-09-03 プラズマｃｖｄ装置における排気系装置

Country Status (1)

Country Link
JP (1) JPS5943519A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100926A (ja) * 1984-10-23 1986-05-19 Tokuda Seisakusho Ltd プラズマｃｖｄ装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534158A (en) * 1978-09-01 1980-03-10 Sony Corp Vacuum reaction apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534158A (en) * 1978-09-01 1980-03-10 Sony Corp Vacuum reaction apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100926A (ja) * 1984-10-23 1986-05-19 Tokuda Seisakusho Ltd プラズマｃｖｄ装置

Also Published As

Publication number Publication date
JPH0415612B2 (https=) 1992-03-18

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