JPS5941861U - マイクロ波放電光源装置 - Google Patents

マイクロ波放電光源装置

Info

Publication number
JPS5941861U
JPS5941861U JP13439282U JP13439282U JPS5941861U JP S5941861 U JPS5941861 U JP S5941861U JP 13439282 U JP13439282 U JP 13439282U JP 13439282 U JP13439282 U JP 13439282U JP S5941861 U JPS5941861 U JP S5941861U
Authority
JP
Japan
Prior art keywords
microwave
switch
light source
source device
discharge light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13439282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638010Y2 (enrdf_load_stackoverflow
Inventor
憲治 吉沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13439282U priority Critical patent/JPS5941861U/ja
Publication of JPS5941861U publication Critical patent/JPS5941861U/ja
Application granted granted Critical
Publication of JPS638010Y2 publication Critical patent/JPS638010Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP13439282U 1982-09-03 1982-09-03 マイクロ波放電光源装置 Granted JPS5941861U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13439282U JPS5941861U (ja) 1982-09-03 1982-09-03 マイクロ波放電光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13439282U JPS5941861U (ja) 1982-09-03 1982-09-03 マイクロ波放電光源装置

Publications (2)

Publication Number Publication Date
JPS5941861U true JPS5941861U (ja) 1984-03-17
JPS638010Y2 JPS638010Y2 (enrdf_load_stackoverflow) 1988-03-09

Family

ID=30302834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13439282U Granted JPS5941861U (ja) 1982-09-03 1982-09-03 マイクロ波放電光源装置

Country Status (1)

Country Link
JP (1) JPS5941861U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS638010Y2 (enrdf_load_stackoverflow) 1988-03-09

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