JPS5940107A - 距離測定装置 - Google Patents

距離測定装置

Info

Publication number
JPS5940107A
JPS5940107A JP14998182A JP14998182A JPS5940107A JP S5940107 A JPS5940107 A JP S5940107A JP 14998182 A JP14998182 A JP 14998182A JP 14998182 A JP14998182 A JP 14998182A JP S5940107 A JPS5940107 A JP S5940107A
Authority
JP
Japan
Prior art keywords
light
grating
detector
angle
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14998182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6341486B2 (enrdf_load_stackoverflow
Inventor
Hidekazu Sekizawa
秀和 関沢
Akito Iwamoto
岩本　明人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14998182A priority Critical patent/JPS5940107A/ja
Priority to US06/523,768 priority patent/US4560280A/en
Priority to EP83304868A priority patent/EP0104762B1/en
Priority to DE8383304868T priority patent/DE3378785D1/de
Priority to DD83254396A priority patent/DD212581A5/de
Publication of JPS5940107A publication Critical patent/JPS5940107A/ja
Publication of JPS6341486B2 publication Critical patent/JPS6341486B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP14998182A 1982-08-31 1982-08-31 距離測定装置 Granted JPS5940107A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP14998182A JPS5940107A (ja) 1982-08-31 1982-08-31 距離測定装置
US06/523,768 US4560280A (en) 1982-08-31 1983-08-17 Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures
EP83304868A EP0104762B1 (en) 1982-08-31 1983-08-23 Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures
DE8383304868T DE3378785D1 (en) 1982-08-31 1983-08-23 Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures
DD83254396A DD212581A5 (de) 1982-08-31 1983-08-31 Vorrichtung zum messen des abstandes zwischen zwei gitterartigen strukturen sowie der groesse in zyklischer folge auftretender strukturelemente

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14998182A JPS5940107A (ja) 1982-08-31 1982-08-31 距離測定装置

Publications (2)

Publication Number Publication Date
JPS5940107A true JPS5940107A (ja) 1984-03-05
JPS6341486B2 JPS6341486B2 (enrdf_load_stackoverflow) 1988-08-17

Family

ID=15486852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14998182A Granted JPS5940107A (ja) 1982-08-31 1982-08-31 距離測定装置

Country Status (1)

Country Link
JP (1) JPS5940107A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63233306A (ja) * 1987-03-20 1988-09-29 Nikon Corp 光走査型位置検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63233306A (ja) * 1987-03-20 1988-09-29 Nikon Corp 光走査型位置検出装置

Also Published As

Publication number Publication date
JPS6341486B2 (enrdf_load_stackoverflow) 1988-08-17

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