JPS6253049B2 - - Google Patents

Info

Publication number
JPS6253049B2
JPS6253049B2 JP20828782A JP20828782A JPS6253049B2 JP S6253049 B2 JPS6253049 B2 JP S6253049B2 JP 20828782 A JP20828782 A JP 20828782A JP 20828782 A JP20828782 A JP 20828782A JP S6253049 B2 JPS6253049 B2 JP S6253049B2
Authority
JP
Japan
Prior art keywords
bright
light
image
dark images
dark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20828782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5999215A (ja
Inventor
Toyoki Kitayama
Shigeru Morya
Kazuhiko Komatsu
Teruaki Okino
Shunichi Ide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP20828782A priority Critical patent/JPS5999215A/ja
Publication of JPS5999215A publication Critical patent/JPS5999215A/ja
Publication of JPS6253049B2 publication Critical patent/JPS6253049B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP20828782A 1982-11-27 1982-11-27 物体の表面高さ測定装置 Granted JPS5999215A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20828782A JPS5999215A (ja) 1982-11-27 1982-11-27 物体の表面高さ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20828782A JPS5999215A (ja) 1982-11-27 1982-11-27 物体の表面高さ測定装置

Publications (2)

Publication Number Publication Date
JPS5999215A JPS5999215A (ja) 1984-06-07
JPS6253049B2 true JPS6253049B2 (enrdf_load_stackoverflow) 1987-11-09

Family

ID=16553745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20828782A Granted JPS5999215A (ja) 1982-11-27 1982-11-27 物体の表面高さ測定装置

Country Status (1)

Country Link
JP (1) JPS5999215A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174338A (ja) * 1984-09-20 1986-04-16 Hitachi Ltd 縮小投影露光装置およびその方法
JPH0756444B2 (ja) * 1985-09-19 1995-06-14 株式会社トプコン 位置検出装置

Also Published As

Publication number Publication date
JPS5999215A (ja) 1984-06-07

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