JPH0474644B2 - - Google Patents

Info

Publication number
JPH0474644B2
JPH0474644B2 JP57051624A JP5162482A JPH0474644B2 JP H0474644 B2 JPH0474644 B2 JP H0474644B2 JP 57051624 A JP57051624 A JP 57051624A JP 5162482 A JP5162482 A JP 5162482A JP H0474644 B2 JPH0474644 B2 JP H0474644B2
Authority
JP
Japan
Prior art keywords
light
image
height
exposed
spot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57051624A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58168906A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5162482A priority Critical patent/JPS58168906A/ja
Publication of JPS58168906A publication Critical patent/JPS58168906A/ja
Publication of JPH0474644B2 publication Critical patent/JPH0474644B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP5162482A 1982-03-30 1982-03-30 物体の表面高さ測定装置 Granted JPS58168906A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5162482A JPS58168906A (ja) 1982-03-30 1982-03-30 物体の表面高さ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5162482A JPS58168906A (ja) 1982-03-30 1982-03-30 物体の表面高さ測定装置

Publications (2)

Publication Number Publication Date
JPS58168906A JPS58168906A (ja) 1983-10-05
JPH0474644B2 true JPH0474644B2 (enrdf_load_stackoverflow) 1992-11-26

Family

ID=12892014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5162482A Granted JPS58168906A (ja) 1982-03-30 1982-03-30 物体の表面高さ測定装置

Country Status (1)

Country Link
JP (1) JPS58168906A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6107637A (en) 1997-08-11 2000-08-22 Hitachi, Ltd. Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59762B2 (ja) * 1979-03-09 1984-01-09 安立電気株式会社 変位測定装置
JPS56141505A (en) * 1980-04-04 1981-11-05 Yokogawa Hokushin Electric Corp Position detector

Also Published As

Publication number Publication date
JPS58168906A (ja) 1983-10-05

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