JPS5937722A - 縦振動型圧電振動子 - Google Patents

縦振動型圧電振動子

Info

Publication number
JPS5937722A
JPS5937722A JP14838882A JP14838882A JPS5937722A JP S5937722 A JPS5937722 A JP S5937722A JP 14838882 A JP14838882 A JP 14838882A JP 14838882 A JP14838882 A JP 14838882A JP S5937722 A JPS5937722 A JP S5937722A
Authority
JP
Japan
Prior art keywords
main
vibration
piezoelectric vibrator
vibrating
type piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14838882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352249B2 (OSRAM
Inventor
Mutsumi Negita
祢宜田　六己
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Matsushima Kogyo KK
Original Assignee
Matsushima Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushima Kogyo KK filed Critical Matsushima Kogyo KK
Priority to JP14838882A priority Critical patent/JPS5937722A/ja
Publication of JPS5937722A publication Critical patent/JPS5937722A/ja
Publication of JPH0352249B2 publication Critical patent/JPH0352249B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP14838882A 1982-08-26 1982-08-26 縦振動型圧電振動子 Granted JPS5937722A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14838882A JPS5937722A (ja) 1982-08-26 1982-08-26 縦振動型圧電振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14838882A JPS5937722A (ja) 1982-08-26 1982-08-26 縦振動型圧電振動子

Publications (2)

Publication Number Publication Date
JPS5937722A true JPS5937722A (ja) 1984-03-01
JPH0352249B2 JPH0352249B2 (OSRAM) 1991-08-09

Family

ID=15451651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14838882A Granted JPS5937722A (ja) 1982-08-26 1982-08-26 縦振動型圧電振動子

Country Status (1)

Country Link
JP (1) JPS5937722A (OSRAM)

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220508A (ja) * 1985-03-26 1986-09-30 Kinseki Kk 水晶片の製造方法
JPS6328853A (ja) * 1986-07-22 1988-02-06 Daido Steel Co Ltd バツチ式浸炭方法
JPS6422105A (en) * 1987-07-17 1989-01-25 Seiko Electronic Components Longitudinal crystal vibrator
JPS6465913A (en) * 1987-09-04 1989-03-13 Seiko Electronic Components Longitudinal crystal resonator
JPS6465912A (en) * 1987-09-04 1989-03-13 Seiko Electronic Components Longitudinal crystal resonator
JPH01212011A (ja) * 1988-02-18 1989-08-25 Seiko Electronic Components Ltd 縦水晶振動子
JPH02124616A (ja) * 1988-06-17 1990-05-11 Matsushima Kogyo Co Ltd 縦振動子
JPH02132909A (ja) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd 縦水晶振動子の電極構造
JPH02132913A (ja) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd 縦水晶振動子
JPH02132911A (ja) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd 縦水晶振動子
JPH02132910A (ja) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd 縦水晶振動子
JPH02135907A (ja) * 1988-11-17 1990-05-24 Seiko Electronic Components Ltd 縦水晶振動子
JPH02260710A (ja) * 1989-03-30 1990-10-23 Seiko Electronic Components Ltd 縦水晶振動子
JPH03192810A (ja) * 1989-12-21 1991-08-22 Seiko Electronic Components Ltd Ｈ型屈曲水晶振動子
US5059853A (en) * 1987-06-02 1991-10-22 Seiko Electric Components Ltd. Longitudinal quartz crystal resonator
JPH0454010A (ja) * 1990-06-21 1992-02-21 Seiko Electronic Components Ltd 縦水晶振動子
US5107164A (en) * 1988-05-20 1992-04-21 Seiko Electronic Components Ltd. Length-extentional quartz resonator
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5144184A (en) * 1990-01-26 1992-09-01 The Charles Stark Draper Laboratory, Inc. Micromechanical device with a trimmable resonant frequency structure and method of trimming same
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
WO2004059836A3 (en) * 2002-08-06 2004-11-25 Draper Lab Charles S Piezoelectric mems resonator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236954A (en) * 1975-09-18 1977-03-22 Ebauches Sa Piezooelectric microwave resonator
JPS5391688A (en) * 1977-01-24 1978-08-11 Seiko Epson Corp Crystal oscillator
JPS54132186A (en) * 1978-04-06 1979-10-13 Seiko Epson Corp Support structure of vertical oscillator
JPS55140313A (en) * 1979-04-18 1980-11-01 Seiko Instr & Electronics Ltd Small-size piezoelectric vibrator of outline vibration mode

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236954A (en) * 1975-09-18 1977-03-22 Ebauches Sa Piezooelectric microwave resonator
JPS5391688A (en) * 1977-01-24 1978-08-11 Seiko Epson Corp Crystal oscillator
JPS54132186A (en) * 1978-04-06 1979-10-13 Seiko Epson Corp Support structure of vertical oscillator
JPS55140313A (en) * 1979-04-18 1980-11-01 Seiko Instr & Electronics Ltd Small-size piezoelectric vibrator of outline vibration mode

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220508A (ja) * 1985-03-26 1986-09-30 Kinseki Kk 水晶片の製造方法
JPS6328853A (ja) * 1986-07-22 1988-02-06 Daido Steel Co Ltd バツチ式浸炭方法
US5059853A (en) * 1987-06-02 1991-10-22 Seiko Electric Components Ltd. Longitudinal quartz crystal resonator
JPS6422105A (en) * 1987-07-17 1989-01-25 Seiko Electronic Components Longitudinal crystal vibrator
JPS6465913A (en) * 1987-09-04 1989-03-13 Seiko Electronic Components Longitudinal crystal resonator
JPS6465912A (en) * 1987-09-04 1989-03-13 Seiko Electronic Components Longitudinal crystal resonator
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
JPH01212011A (ja) * 1988-02-18 1989-08-25 Seiko Electronic Components Ltd 縦水晶振動子
US5107164A (en) * 1988-05-20 1992-04-21 Seiko Electronic Components Ltd. Length-extentional quartz resonator
JPH02124616A (ja) * 1988-06-17 1990-05-11 Matsushima Kogyo Co Ltd 縦振動子
JPH02132910A (ja) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd 縦水晶振動子
JPH02132911A (ja) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd 縦水晶振動子
JPH02132913A (ja) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd 縦水晶振動子
JPH02132909A (ja) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd 縦水晶振動子の電極構造
JPH02135907A (ja) * 1988-11-17 1990-05-24 Seiko Electronic Components Ltd 縦水晶振動子
JPH02260710A (ja) * 1989-03-30 1990-10-23 Seiko Electronic Components Ltd 縦水晶振動子
JPH03192810A (ja) * 1989-12-21 1991-08-22 Seiko Electronic Components Ltd Ｈ型屈曲水晶振動子
US5144184A (en) * 1990-01-26 1992-09-01 The Charles Stark Draper Laboratory, Inc. Micromechanical device with a trimmable resonant frequency structure and method of trimming same
JPH0454010A (ja) * 1990-06-21 1992-02-21 Seiko Electronic Components Ltd 縦水晶振動子
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
WO2004059836A3 (en) * 2002-08-06 2004-11-25 Draper Lab Charles S Piezoelectric mems resonator
US7005946B2 (en) 2002-08-06 2006-02-28 The Charles Stark Draper Laboratory, Inc. MEMS piezoelectric longitudinal mode resonator

Also Published As

Publication number Publication date
JPH0352249B2 (OSRAM) 1991-08-09

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