JPS5937722A - Longitudinal oscillation type piezoelectric oscillator - Google Patents

Longitudinal oscillation type piezoelectric oscillator

Info

Publication number
JPS5937722A
JPS5937722A JP14838882A JP14838882A JPS5937722A JP S5937722 A JPS5937722 A JP S5937722A JP 14838882 A JP14838882 A JP 14838882A JP 14838882 A JP14838882 A JP 14838882A JP S5937722 A JPS5937722 A JP S5937722A
Authority
JP
Japan
Prior art keywords
main
vibration
piezoelectric vibrator
vibrating
type piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14838882A
Other languages
Japanese (ja)
Other versions
JPH0352249B2 (en
Inventor
Mutsumi Negita
祢宜田　六己
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Matsushima Kogyo KK
Original Assignee
Matsushima Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushima Kogyo KK filed Critical Matsushima Kogyo KK
Priority to JP14838882A priority Critical patent/JPS5937722A/en
Publication of JPS5937722A publication Critical patent/JPS5937722A/en
Publication of JPH0352249B2 publication Critical patent/JPH0352249B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To suppress the leakage of main oscillation energy, by setting the length of a base part to more than a specific multiple of the width of supporting parts corresponding to tuning fork arms. CONSTITUTION:The logitudinal oscillation type piezoelectric oscillator formed of a main oscillation part 12 for longitudinal oscillation, coupling parts 13 and 13', supporting parts 14 and 14' and the base part 15 in the one body by photoetching work has the coupling parts 13 and 13' in the breadthwise direction of the oscillation part 12 where the oscillation displacement of the main oscillation part 12 is minimized; the supporting parts 14 and 14' are extended from both ends of the coupling parts 13 and 13' in parallel to one main oscillation part 12, and the base part 15 is provided so that the supporting parts 14 and 14' form a tuning fork shape. Then, the length L of the base part 15 is set more than twice as long as the width W of the supporting parts 14 and 14' corresponding to the tuning fork arms.

Description

【発明の詳細な説明】 本発明はフォトゴッチング加工によって形成される縦振
動型圧電振動子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a longitudinal vibration type piezoelectric vibrator formed by photogotching processing.

本発明の目的は、振動エネルギーの漏洩が少なく、性症
の安定した小型の縦振動型圧電振動子を安価に提供する
ことである。SUMMARY OF THE INVENTION An object of the present invention is to provide a small, longitudinally vibrating piezoelectric vibrator with low leakage of vibration energy and stable venereal disease at a low cost.

従来より、数１００　Ｋ　Ｈ２〜ＩＭＨ２付近の周波数
帯の圧電振動子として第１図に示すような縦振動型圧電
振動子が用いられている。第１図は斜視図であり、発振
片１か細い吊り線２．２′に半田付けにより固定支持さ
れている構成を示す。該縦振動型圧１１Ｌ振動子は、 １、）吊り線に発振片を固定支持する位置精度や半田畢
のバラツキによね、ＣＩ値、振動漏れ等のバラツキが大
きい。Conventionally, a longitudinal vibration type piezoelectric vibrator as shown in FIG. 1 has been used as a piezoelectric vibrator for a frequency band around several 100 KH2 to IMH2. FIG. 1 is a perspective view showing a configuration in which the oscillating piece 1 is fixedly supported by a thin hanging wire 2.2' by soldering. The vertical vibration type pressure 11L vibrator has the following characteristics: 1.) Due to the positional accuracy of fixing and supporting the oscillating piece to the hanging wire and the variation in the solder depth, there are large variations in CI value, vibration leakage, etc.

２）吊り線と発振片の接糾゛強度が弱いため耐衝撃性が
低い。2) Impact resistance is low because the bonding strength between the hanging wire and the oscillating piece is weak.

３）吊り線と発振片との固定支持作業は熟練を要し、製
造コストが高くなる。3) The work of fixing and supporting the hanging wire and the oscillating piece requires skill and increases manufacturing costs.

４）吊り線の形状から容器が大きくなる、などの欠点を
有してい石。4) Stone has drawbacks such as the container becoming large due to the shape of the hanging wire.

その他の縦振動型圧電振動子の従来例を第２図に斜視図
で示す。同図において、本例の縦振動型圧電振動子は、
縦振動する主振動部３と連結部４と支持部５とがフォト
エッチンングカｌ工により　一体で形成きれており、ζ
らに音叉形状の別部材の固定部６で支持されている。該
縦振動型圧電振動子は、主振動部３と連結部４と支持部
５とが一体で形成されているため固定支持位置およ【ｆ
寸法のバラツキは少ない。しかし、支持の方向が主振動
部３の１」方向であるたＷ）ｉ％　ｆｐ　！４１＋に付
随して発生する短辺振動により、支持部５および固定部
６は主振動部乙の巾方向に変位する。こわを音叉形状の
固定部６で支持することにより主振動エネルギーの漏洩
を抑制している。以上の構成から成る本例は、 １）固定部と主振動部とが別部材で形成されているため
、その接合部において振動ロスが生じＱ値が低くなる。Another conventional example of a longitudinal vibration type piezoelectric vibrator is shown in a perspective view in FIG. In the figure, the longitudinal vibration type piezoelectric vibrator of this example is
The main vibrating part 3, which vibrates vertically, the connecting part 4, and the supporting part 5 are integrally formed by photo-etching.
Furthermore, it is supported by a fixing part 6, which is a separate tuning fork-shaped member. The longitudinal vibration type piezoelectric vibrator has the main vibrating part 3, the connecting part 4, and the supporting part 5 integrally formed, so that the fixed supporting position and [f
There is little variation in dimensions. However, since the supporting direction is the 1'' direction of the main vibrating section 3, W) i% fp! Due to the short-side vibration generated in conjunction with 41+, the support portion 5 and the fixed portion 6 are displaced in the width direction of the main vibrating portion B. By supporting the stiffness with a tuning fork-shaped fixing part 6, leakage of main vibration energy is suppressed. This example having the above configuration has the following features: 1) Since the fixed part and the main vibrating part are formed of separate members, vibration loss occurs at the joint between them, resulting in a low Q value.

２）部品点数が多いため製造コストが高くなるという欠
点を有している、 ζらに、その他のフォトエヴチング加工による縦振動型
圧電、振動子の従来例を第３図に斜視図で示す。同図に
おいて、本例の縦振動型圧電、振動子は、主振動部７と
、該主振動部７を取囲む二重の枠８．９およびそれらを
連結する連結部１ｏ、１ｏ’。2) The disadvantage is that the manufacturing cost is high due to the large number of parts. Figure 3 shows a perspective view of a conventional example of a longitudinally vibrating piezoelectric vibrator made by photo-etching. . In the figure, the longitudinal vibration type piezoelectric vibrator of this example includes a main vibrating part 7, a double frame 8.9 surrounding the main vibrating part 7, and connecting parts 1o and 1o' connecting them.

１１．１１’７’＋＋フオトエツチング加工によね一体
に形成−れている。本例のＷ−振動型圧雷撮動子は主振
動部７の植聾動に付随する炉辺Ｗ＝動に対応して内側の
枠８が屈曲振動することＫより主振動エネルギーが外側
の枠９に漏洩しないようにすることをねらったものであ
る。本例においては、１）内側の枠８の、限られた範囲
のみにより主振動エネルギーの漏洩を十分に抑制するこ
とは困難である、結果、連結部１１．１１’を紅て振動
エネルギーが漏洩し、外側の枠９も振動する。したがっ
て、外側の枠９を剛体に固定する際には外側の枠９の振
動の節を固定に使う必要があるが、フォトエッヂング加
工の寸法バラツキ等により振動の節が移動するため、加
工ｎ度の厳しい管理が必要となり製造コストが高くなる
。11.11'7'++ It is integrally formed by photo etching process. In the W-vibration type compaction sensor of this example, the inner frame 8 bends and vibrates in response to the hearth W = motion accompanying the implantation of the main vibrating section 7. From K, the main vibration energy is transferred to the outer frame. The aim is to prevent information from being leaked to 9. In this example, 1) It is difficult to sufficiently suppress the leakage of main vibration energy only in a limited range of the inner frame 8. As a result, vibration energy leaks through the connecting portions 11 and 11'. However, the outer frame 9 also vibrates. Therefore, when fixing the outer frame 9 to a rigid body, it is necessary to use the vibration nodes of the outer frame 9 for fixation. However, because the vibration nodes move due to dimensional variations in the photo-etching process, strict control is required, which increases manufacturing costs.

２）内側の枠８で主振動エネルギーの漏洩を十分抑制す
るためには、内側の枠８の巾または長さを大きくする必
要があり小型化が田離となる、などの欠点を有している
。2) In order to sufficiently suppress the leakage of the main vibration energy in the inner frame 8, it is necessary to increase the width or length of the inner frame 8, which has the disadvantage that miniaturization becomes difficult. There is.

以上説明した従来の三個は、いずれにおいても主振動エ
ネルギーの漏洩を抑制するため種々の工夫をしているが
その効果は十分でなく、また、製造コスト、寸法の面で
も欠点を有している。All of the three conventional devices described above have been devised in various ways to suppress the leakage of main vibration energy, but the effects are not sufficient, and they also have drawbacks in terms of manufacturing cost and dimensions. There is.

本発明は以上に述べた従来の欠点を解消し、主振動エネ
ルギーの漏洩を抑制し、小型、低コスト化に適した構造
の縦振動型圧電振動子を提供するものである。本発明の
第１実施例を第４図に斜視図で示す。同図において、本
発明はｌ＃振動をする主振動部１２と該主振動部１２の
振動変位の最も小さくなる位置に該主振動部１２の中方
向に設けられた連結部１３．１３’と該連結部１３．１
３’の両端から前配主振動部１２の一方と平行に支持部
１４゜１４′は前Ｐ主振動部１２を除く支持部分が音叉
形状を構成するように基部１５を設け、該基部１５の長
ζＬを音叉腕に相当する支持部１４．１４’の巾Ｗの２
倍ν十とした、以上の構成から成る縦振動型圧電振動子
である。本例において、主振動部の縦振動によって生ｔ
゛る短辺方向の振動に対しても音ヲ腕に相当する支持部
および連結部とが屈曲振動を行なう。その振動姿態を第
５図に示す。第５図において、破線で示す１１Ｓ、１／
ｌ’が前記屈曲振動によって変化する支持部１４．１４
’および連結部１３．１３’の振動姿態である。このと
きの屈曲振動け、その共振周波数と、主振動部１２の共
振周波数とをｔｌぼ一致することで主振動へのｌ？　智
を防ぐことができる。また、第４図に示す基部１５け左
・右の音叉腕に第１４当する支持部１４．１４’の屈曲
振動のつり合いにより振動変位が小ζくなるため、該基
部１５を岡１１体に同定することが可能となる。The present invention solves the above-mentioned conventional drawbacks, suppresses leakage of main vibration energy, and provides a longitudinal vibration type piezoelectric vibrator having a structure suitable for downsizing and cost reduction. A first embodiment of the invention is shown in a perspective view in FIG. In the same figure, the present invention includes a main vibrating part 12 that vibrates with l#, and a connecting part 13.13' provided in the middle of the main vibrating part 12 at a position where the vibration displacement of the main vibrating part 12 is the smallest. The connecting part 13.1
The support part 14° 14' is provided with a base part 15 parallel to one of the front main vibrating parts 12 from both ends of 3' so that the supporting part excluding the front P main vibrating part 12 forms a tuning fork shape. The length ζL is 2 of the width W of the support part 14 and 14' corresponding to the tuning fork arm.
This is a longitudinally vibrating piezoelectric vibrator having the above configuration, in which the value is multiplied by ν0. In this example, the longitudinal vibration of the main vibration section generates t
Even in response to the vibration in the short side direction, the support portion and the connecting portion corresponding to the sound arm perform bending vibration. The vibration state is shown in Fig. 5. In FIG. 5, 11S, 1/
a support 14.14 in which l' changes due to the bending vibration;
' and the vibration state of the connecting portion 13.13'. By matching the resonance frequency of the bending vibration at this time with the resonance frequency of the main vibration section 12 by about tl, the l? Wisdom can be prevented. In addition, the vibration displacement becomes small due to the balance of the bending vibrations of the support parts 14 and 14' which correspond to the left and right tuning fork arms of the base 15 as shown in FIG. It becomes possible to identify.

このとき、剛＃（（固定する部分の振動変位を十分小さ
くして振動エネルギーの漏洩を抑制するためＫは、基部
１５の長さＬは支持部１４．１４’のｉＪＷの２倍以上
あることが必要である。濾らにまた、縦振動圧電、振動
子の周波数は一般的に数１００１）１ｚ〜ＩＭＨｆｆｉ
であるため、前述の主振動部の共振周波数と音叉腕に相
当する支持部の屈曲振動とを一致きせるためＫは、支持
部の巾寸法、長官寸法上から二次高調波を使用する。第
６図はその二次高調波の変位を示す胛切回であわ、同図
において１７は第４図の基部１５を示し、１８．１８’
は第５図の音叉腕に相当する支持部１４．１４’の二次
高調波の変位を示している。１８と１８′は位相が１８
００ずれている。二次高調波ｃ７１周波数は基本波の周
波数の約１５倍となるため、容易に数１００　Ｋ）１２
〜Ｉ　ＭＴ（２の周波数を得ることができる。At this time, the rigidity # ((In order to sufficiently reduce the vibration displacement of the part to be fixed and suppress the leakage of vibration energy, the length L of the base 15 must be at least twice the iJW of the support part 14.14'. In addition, for vertical vibration piezoelectricity, the frequency of the vibrator is generally several 1001) 1z ~ IMHffi
Therefore, in order to match the resonant frequency of the above-mentioned main vibration part with the bending vibration of the support part corresponding to the tuning fork arm, K uses a second harmonic based on the width and length dimensions of the support part. FIG. 6 shows the displacement of the second harmonic. In the same figure, 17 indicates the base 15 of FIG.
shows the displacement of the second harmonic of the support portion 14, 14' corresponding to the tuning fork arm of FIG. 18 and 18' have a phase of 18
It is off by 00. The second harmonic C71 frequency is approximately 15 times the frequency of the fundamental wave, so it is easily several hundred K)12
~I MT (2 frequencies can be obtained.

さらにまた、製造上のバラツキ勾により主振動部の重心
と連結位置とがずれた場合、縦ｗＰ動による重心移動が
生じるために振動エネルギーが漏洩する。第７図にその
状態を示す。同図において、Ａ、Ａ’は重心点であり、
波線で示す振動変位にょ妙重心がＡ点からＡ′点に移動
していることを示している。このときの振動姿態け１２
と２０で、位相において１８０°ずれている。この重心
移動による振動エネルギーの漏洩に対しては、主振動部
１２の共振周波数と連結部１３．１３’との共振周波数
とを＃１ｔ！一致させることで解決できる。Furthermore, if the center of gravity of the main vibrating part and the connection position deviate due to manufacturing variations, the center of gravity shifts due to vertical wP motion, resulting in leakage of vibration energy. FIG. 7 shows the state. In the same figure, A and A' are the center of gravity points,
The vibration displacement indicated by the wavy line indicates that the center of gravity is moving from point A to point A'. Vibration posture 12 at this time
and 20, which are 180° out of phase. To prevent leakage of vibration energy due to this movement of the center of gravity, the resonance frequency of the main vibrating section 12 and the resonance frequency of the connecting section 13.13' should be set to #1t! This can be solved by matching.

以上、本発明の縦振動型圧電振動子は、１）主振動エネ
ルギーの漏洩が確実に抑制できるため性態；メ安定して
いる。As described above, the longitudinal vibration type piezoelectric vibrator of the present invention has stable properties because 1) leakage of main vibration energy can be reliably suppressed;

２）部品点数が、一体加工であるため製造コストが低く
安価にできる。などの利点を崩している。2) Since the number of parts is integrally processed, the manufacturing cost is low and can be made inexpensive. This destroys the advantages of

以上のように、本発明は外形形状における構成において
新規な特徴を有しているが、以下にＨシ明するカット方
位、および電極構造についても新規な特徴を有している
。第８図により本発明に関するカット方位、およびＮ輛
構造について説明する。As described above, the present invention has novel features in the configuration of the external shape, but also has novel features in the cutting direction and electrode structure, which will be explained below. The cutting direction and the N-shaped structure related to the present invention will be explained with reference to FIG.

同図において、同図は前記第４図における主振動部１２
のｐ−ｐ’断面とそのカット方位、電極構造を示し、Ｘ
、Ｙおよび２はそれぞれ水晶の電気軸、機械軸および光
軸であり、２１．２２は前記主振動部１２の表、裏面そ
れぞれに形成した電極膜である。In the figure, the main vibration section 12 in FIG.
The pp' cross section, its cutting direction, and electrode structure are shown,
, Y, and 2 are the electrical axis, mechanical axis, and optical axis of the crystal, respectively, and 21 and 22 are electrode films formed on the front and back surfaces of the main vibration section 12, respectively.

本例における本発明の縦振動型圧Ｗ振動子は、水晶の２
板（ｚ軸に垂直な板）をＹ軸回りに角度αで回転し、嘘
らにＸ′軸回りに角度β（図示せず）で回転した、いわ
ゆるＮＴ力〜トの水晶ウェハーよｈフォトエツチング加
工により形成されるものである。このときのαけ、温度
特性、エツチング性、ならびにａＸ値等の条件から２０
〜４５°の範囲で、βはｇＡ変時特性条件から一５°〜
５°の範囲で　−１選ぶ。また、本発明の縦振動型圧電
振動子の主振動部１２の長ζけ所望の周波数により決市
り、たとえば、周波数が１ＭＨ４の場合は２７００７１
　ｍ　、　６ｏＯＫＨｚの場合け４５００　ｔｉｒｎと
なる。また、主振動部１２の巾は長さの１５〜３０％の
範囲で、厚味は５０〜２００　μ祭の範囲で選べばよい
。また、同図は前述の主振動部の表裏面、即ち２′面に
形成された電、俸膜２１，２２により電界ＥＯＸ軸方向
の成分数　が励振に有効な成分であり、Ｙ軸方向（主振
動部の長さ方向）に縦振動を励起するものである。In this example, the longitudinal oscillation type pressure W oscillator of the present invention is made of two crystals.
A so-called NT force crystal wafer is produced by rotating a plate (a plate perpendicular to the z-axis) at an angle α around the Y-axis and at an angle β (not shown) around the X' axis. It is formed by etching. Based on the conditions such as α angle, temperature characteristics, etching property, and aX value,
In the range of ~45°, β is −5° from the gA chronotropic characteristic condition.
Select -1 within a range of 5 degrees. Further, the length ζ of the main vibrating part 12 of the longitudinal vibration type piezoelectric vibrator of the present invention is determined by the desired frequency. For example, if the frequency is 1MH4, 270071
In the case of m, 6oOKHz, it is 4500 turns. Further, the width of the main vibrating section 12 may be selected in the range of 15 to 30% of the length, and the thickness may be selected in the range of 50 to 200 μm. The figure also shows that the number of components of the electric field in the EOX axis direction is the effective component for excitation due to the electric fields 21 and 22 formed on the front and back surfaces of the main vibrating section, that is, the 2' plane, and the number of components in the Y axis direction ( This excites longitudinal vibration in the length direction of the main vibrating section.

本発明の第２実施例を第９図、第１ｏ図に示す、第９図
は本例の斜視図であり、主振動部２３、連結部２４．２
４’、支持部２５．２５’、基部２６とから構成これて
おり、フォトエッチングカ１工により−体で形成されｔ
ものである。本例のｌＩ１ｗｖ動型圧雷。A second embodiment of the present invention is shown in FIG. 9 and FIG.
4', a support part 25, 25', and a base part 26, and is formed by a photo-etching process.
It is something. This example is lI1wv dynamic pressure lightning.

振動子は、水晶の２板をＸ軸回り１ｌｊ−５°〜５°の
範囲で回転情せた水晶ウェハーよｈ形成され、＃縦振動
型圧Ｎ押動子の厚味方向７’ｌ’　Ｘ軸、長さ方向がＹ
軸、中方向がＸ軸に対応したカプト方もνとなｈている
。この構成から、第９ＭのＱ　−Ｑ、’にお叶る断面図
、第１０図に示すように主振動部２３の側面（Ｘ面）に
市、極膜２７，２８を形成することによりＸ軸方向の雷
界が生じ、Ｙ軸方向のｗ振動が励起されるものである。The vibrator is formed of a crystal wafer in which two crystal plates are rotated in the range of 1lj-5° to 5° around the X axis, length direction is Y
The Caputo direction whose axis and middle direction correspond to the X axis is also ν. From this configuration, as shown in FIG. 10, which is a cross-sectional view corresponding to Q-Q,' of the 9th M, by forming polar films 27 and 28 on the side surface (X plane) of the main vibrating section 23, A lightning field in the axial direction is generated, and w vibrations in the Y-axis direction are excited.

本例によれば、主電極膜２７．２８が主撮動部２３の側
面に形成されているため、主振動部２３の「１］方向（
Ｘ方向）の寸法を十分小ζくすることが可能となる。た
とえば、周波数がＩＭＨ２の場合、主撮動部２３の厚味
ｌ″ｔ１５０〜３００μＶ、巾は６０〜１５０μ慴の範
囲で選べばよい。したがって、佇振動に付随して生じる
短辺振動の変位が相対的に小濾〈なり、支持部の屈曲振
動も小−〈なり、前述の第４図に示し、た実施例に比較
し、づらに振動エネルギーの漏洩の少ない特性の安定し
た小型の縦振動型圧電振動子を安価で提供することがで
きる。According to this example, since the main electrode films 27 and 28 are formed on the side surface of the main imaging section 23, the "1" direction (
The dimension in the X direction) can be made sufficiently small. For example, when the frequency is IMH2, the thickness of the main imaging section 23 should be selected in the range of 150 to 300 μV and the width of 60 to 150 μV. The vibration is relatively small, and the bending vibration of the support part is also small.Compared to the embodiment shown in FIG. type piezoelectric vibrator can be provided at low cost.

【図面の簡単な説明】[Brief explanation of drawings]

第１図〜第３図は縦振動型圧電振動子の従来例を示す斜
視図。 第４図は本発明の第一実施例を示す斜視図。 第５図は本発明の第一実施例の振動姿態を示す説明図。 第６図は本発明の舘−実施例の二次高調波の変位を示す
説１ｊ）１図。 第７図れｔ本発明の第一実施例の重心移動による振動エ
ネルギーの漏洩状態を示す説明Ｍ。 第８図は本発明の犯−実施例に関するカット方位、およ
び電棒構造の散切回。 第９図は本発明の第二実施例を示す余１視図。 第１０図は本発明の第二ヂ施例に関するカット方位、お
よび電接構造の説明図。 １２け主振動部　　１３．１３’は連結部１４．１４’
は支持部　１５ｆ′ｉ基部１６．１６’は振動（変位）
姿態 １７は基部 １８．１８’は支持部１４．１４’の変位１９．２０は
振動姿＠　　２１，２２ｔｉ［極膜２３は主撮動部　　
　２４．２４’は連結部２５．２５’は支持部　　２６
Ｖｉ基部２７．２８は電極膜 鰺１　　　−ト 出願人　松島工業株式会社 代理人　弁理士　最上　務 ｆ９圓 才１０図1 to 3 are perspective views showing conventional examples of longitudinal vibration type piezoelectric vibrators. FIG. 4 is a perspective view showing a first embodiment of the present invention. FIG. 5 is an explanatory diagram showing the vibration mode of the first embodiment of the present invention. FIG. 6 is a theory 1j) 1 diagram showing the displacement of the second harmonic in the embodiment of the present invention. FIG. 7 is an explanation M showing the leakage state of vibration energy due to the movement of the center of gravity in the first embodiment of the present invention. FIG. 8 shows the cutting direction and cutting times of the electric rod structure in accordance with the embodiment of the present invention. FIG. 9 is a perspective view showing a second embodiment of the present invention. FIG. 10 is an explanatory diagram of the cutting direction and the electrical connection structure regarding the second embodiment of the present invention. 12-digit main vibration part 13.13' is the connecting part 14.14'
is the support part 15f'i base 16.16' is the vibration (displacement)
The figure 17 is the base 18. 18' is the support part 14. The displacement 19, 20 is the vibration figure @ 21, 22ti [The polar film 23 is the main imaging part
24.24' is the connecting part 25.25' is the supporting part 26
Vi base 27.28 is an electrode film 1 - Applicant Matsushima Kogyo Co., Ltd. Agent Patent attorney Tsutomu Mogami

Claims (5)

【特許請求の範囲】[Claims] （１）　　Ｍｔ主振動する主振動部と、該主振動部の支
持部分とをフォトエツチング加工により一体で形成する
縦振動型圧電振動子において、縦振動をする主振動部と
核主振動部の振動変位の最も小さくなる位置に該主振動
部の巾方向に設けられた連結部と、該連結部の両端から
前ｌｅ主主動動部一方と平行に支持部を延長し、該支持
部は前記主振動部を除く支持部分が音叉形状を構成する
ように基部を設け、該基部の長濾を音叉腕に相当する支
持部の巾の２倍・以上とした、以上の構成から放る縦振
動型圧電振動子。(1) In a longitudinal vibration type piezoelectric vibrator in which a main vibration part that performs Mt main vibration and a supporting part of the main vibration part are integrally formed by photoetching, the main vibration part that performs longitudinal vibration and the core main vibration part are A connecting portion is provided in the width direction of the main vibrating portion at a position where the vibration displacement is smallest, and a supporting portion is extended from both ends of the connecting portion in parallel with one of the front main driving portions, and the supporting portion is connected to the The base is provided so that the support part excluding the main vibration part forms a tuning fork shape, and the long filter of the base is made more than twice the width of the support part corresponding to the tuning fork arm.The longitudinal vibration emitted from the above structure type piezoelectric vibrator. （２）　　主振動部の共振周波数と、音叉腕に相当する
支持部の２次高調波の共振周波数とをほぼ一致させたこ
とを特徴とする特許請求の範囲第１項記載のｌ＃振動型
圧電振動子。(2) The l# vibration type according to claim 1, characterized in that the resonant frequency of the main vibrating part and the resonant frequency of the second harmonic of the support part corresponding to the tuning fork arm are made substantially equal to each other. Piezoelectric vibrator. （３）主振動部の中方向に設けられた連結部の共振周波
数と、主振動部の共振周波数とを＃１は一致させたこと
を特徴とする特許請求の範囲第２項記載の縦振動型圧電
振動子。(3) Longitudinal vibration according to claim 2, characterized in that the resonance frequency of the connecting part provided in the middle direction of the main vibration part and the resonance frequency of the main vibration part #1 are made to match. type piezoelectric vibrator. （４）　　縦振動をする主振動部と、該主振動部の支持
部分とをフォトエツチング加工により一体で形成する縦
振動型圧電振動子は、水晶の２板をＹ軸回りに２０°〜
４５°、Ｘ′軸回りに一５°〜５°回転させた板より形
成され、主層ｗＬは２′面に形成したことを特徴とする
特許請求の範囲第１項、第２項、第３項記載の縦振動型
圧電振動子。(4) A longitudinally vibrating piezoelectric vibrator, in which a main vibrating part that vibrates longitudinally and a supporting part of the main vibrating part are integrally formed by photo-etching, is made by rotating two crystal plates by 20° to 20 degrees around the Y axis.
Claims 1, 2, and 2 are characterized in that the main layer wL is formed on the 2' plane. The vertical vibration type piezoelectric vibrator according to item 3. （５）縦振動をする主振動部と、に亥主振動部の支持部
分とをフォトエツチング加工により一体で形成する縦振
動形圧電振動子は、水晶の２板をＸ＠回りに一５°〜５
°回転させた板より形成され、主層ｗＦｉｘ面にあるこ
とを特徴とする特許請求の範囲第１謂、第２項、第３頌
記載の縦振動型圧電振動子。(5) A longitudinally vibrating piezoelectric vibrator, in which a main vibrating part that vibrates longitudinally and a supporting part of the main vibrating part are integrally formed by photo-etching, is made by rotating two crystal plates at an angle of 15 degrees around X@. ~5
A vertically vibrating piezoelectric vibrator as set forth in claims 1, 2, and 3, characterized in that it is formed from a plate rotated by a degree, and that the main layer is in the wFix plane.
JP14838882A 1982-08-26 1982-08-26 Longitudinal oscillation type piezoelectric oscillator Granted JPS5937722A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14838882A JPS5937722A (en) 1982-08-26 1982-08-26 Longitudinal oscillation type piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14838882A JPS5937722A (en) 1982-08-26 1982-08-26 Longitudinal oscillation type piezoelectric oscillator

Publications (2)

Publication Number Publication Date
JPS5937722A true JPS5937722A (en) 1984-03-01
JPH0352249B2 JPH0352249B2 (en) 1991-08-09

Family

ID=15451651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14838882A Granted JPS5937722A (en) 1982-08-26 1982-08-26 Longitudinal oscillation type piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS5937722A (en)

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220508A (en) * 1985-03-26 1986-09-30 Kinseki Kk Manufacture of crystal chip
JPS6328853A (en) * 1986-07-22 1988-02-06 Daido Steel Co Ltd Batch type carburizing process
JPS6422105A (en) * 1987-07-17 1989-01-25 Seiko Electronic Components Longitudinal crystal vibrator
JPS6465913A (en) * 1987-09-04 1989-03-13 Seiko Electronic Components Longitudinal crystal resonator
JPS6465912A (en) * 1987-09-04 1989-03-13 Seiko Electronic Components Longitudinal crystal resonator
JPH01212011A (en) * 1988-02-18 1989-08-25 Seiko Electronic Components Ltd Longitudinal crystal vibrator
JPH02124616A (en) * 1988-06-17 1990-05-11 Matsushima Kogyo Co Ltd Longitudinal vibrator
JPH02132909A (en) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd Electrode structure of vertical crystal resonator
JPH02132913A (en) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd Vertical crystal resonator
JPH02132910A (en) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd Vertical crystal resonator
JPH02132911A (en) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd Vertical crystal resonator
JPH02135907A (en) * 1988-11-17 1990-05-24 Seiko Electronic Components Ltd Vertical crystal resonator
JPH02260710A (en) * 1989-03-30 1990-10-23 Seiko Electronic Components Ltd Longitudinal crystal resonator
JPH03192810A (en) * 1989-12-21 1991-08-22 Seiko Electronic Components Ltd H type bending crystal resonator
US5059853A (en) * 1987-06-02 1991-10-22 Seiko Electric Components Ltd. Longitudinal quartz crystal resonator
JPH0454010A (en) * 1990-06-21 1992-02-21 Seiko Electronic Components Ltd Longitudinal crystal resonator
US5107164A (en) * 1988-05-20 1992-04-21 Seiko Electronic Components Ltd. Length-extentional quartz resonator
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5144184A (en) * 1990-01-26 1992-09-01 The Charles Stark Draper Laboratory, Inc. Micromechanical device with a trimmable resonant frequency structure and method of trimming same
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
WO2004059836A2 (en) * 2002-08-06 2004-07-15 Charles Stark Draper Laboratory Inc. Piezoelectric mems resonator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236954A (en) * 1975-09-18 1977-03-22 Ebauches Sa Piezooelectric microwave resonator
JPS5391688A (en) * 1977-01-24 1978-08-11 Seiko Epson Corp Crystal oscillator
JPS54132186A (en) * 1978-04-06 1979-10-13 Seiko Epson Corp Support structure of vertical oscillator
JPS55140313A (en) * 1979-04-18 1980-11-01 Seiko Instr & Electronics Ltd Small-size piezoelectric vibrator of outline vibration mode

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236954A (en) * 1975-09-18 1977-03-22 Ebauches Sa Piezooelectric microwave resonator
JPS5391688A (en) * 1977-01-24 1978-08-11 Seiko Epson Corp Crystal oscillator
JPS54132186A (en) * 1978-04-06 1979-10-13 Seiko Epson Corp Support structure of vertical oscillator
JPS55140313A (en) * 1979-04-18 1980-11-01 Seiko Instr & Electronics Ltd Small-size piezoelectric vibrator of outline vibration mode

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220508A (en) * 1985-03-26 1986-09-30 Kinseki Kk Manufacture of crystal chip
JPH0533565B2 (en) * 1985-03-26 1993-05-19 Kinseki Ltd
JPS6328853A (en) * 1986-07-22 1988-02-06 Daido Steel Co Ltd Batch type carburizing process
US5059853A (en) * 1987-06-02 1991-10-22 Seiko Electric Components Ltd. Longitudinal quartz crystal resonator
JPS6422105A (en) * 1987-07-17 1989-01-25 Seiko Electronic Components Longitudinal crystal vibrator
JPS6465912A (en) * 1987-09-04 1989-03-13 Seiko Electronic Components Longitudinal crystal resonator
JPS6465913A (en) * 1987-09-04 1989-03-13 Seiko Electronic Components Longitudinal crystal resonator
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
JPH01212011A (en) * 1988-02-18 1989-08-25 Seiko Electronic Components Ltd Longitudinal crystal vibrator
US5107164A (en) * 1988-05-20 1992-04-21 Seiko Electronic Components Ltd. Length-extentional quartz resonator
JPH02124616A (en) * 1988-06-17 1990-05-11 Matsushima Kogyo Co Ltd Longitudinal vibrator
JPH02132909A (en) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd Electrode structure of vertical crystal resonator
JPH02132913A (en) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd Vertical crystal resonator
JPH02132910A (en) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd Vertical crystal resonator
JPH02132911A (en) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd Vertical crystal resonator
JPH02135907A (en) * 1988-11-17 1990-05-24 Seiko Electronic Components Ltd Vertical crystal resonator
JPH02260710A (en) * 1989-03-30 1990-10-23 Seiko Electronic Components Ltd Longitudinal crystal resonator
JPH03192810A (en) * 1989-12-21 1991-08-22 Seiko Electronic Components Ltd H type bending crystal resonator
US5144184A (en) * 1990-01-26 1992-09-01 The Charles Stark Draper Laboratory, Inc. Micromechanical device with a trimmable resonant frequency structure and method of trimming same
JPH0454010A (en) * 1990-06-21 1992-02-21 Seiko Electronic Components Ltd Longitudinal crystal resonator
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
WO2004059836A2 (en) * 2002-08-06 2004-07-15 Charles Stark Draper Laboratory Inc. Piezoelectric mems resonator
WO2004059836A3 (en) * 2002-08-06 2004-11-25 Draper Lab Charles S Piezoelectric mems resonator
US7005946B2 (en) 2002-08-06 2006-02-28 The Charles Stark Draper Laboratory, Inc. MEMS piezoelectric longitudinal mode resonator

Also Published As

Publication number Publication date
JPH0352249B2 (en) 1991-08-09

Similar Documents

Publication Publication Date Title
JPS5937722A (en) Longitudinal oscillation type piezoelectric oscillator
JP2002141770A (en) Small-sized vibrator
JP4068370B2 (en) Vibrating gyro
JP2010171966A (en) Bending vibration piece and electronic component
JP2004357178A (en) Piezoelectric vibrator
JP2006201118A (en) Piezoelectric vibrating gyroscope element and gyro sensor
JPH0754891B2 (en) Vertical crystal unit
JP4848873B2 (en) Gyro vibrating piece
JPH0821828B2 (en) Vertical crystal unit
JP4440682B2 (en) Vibrating gyro
JP5589517B2 (en) Vibrating piece, vibrator and oscillator
JPS5844805A (en) Quartz oscillator
JPH01227515A (en) Piezoelectric oscillator
JPS5838015A (en) Piezoelectric oscillator
JPS5944118A (en) Tuning fork type vibrator
JP4641107B2 (en) Vibrating gyro
JPH0831759B2 (en) Vertical crystal unit
JPS587702Y2 (en) Width-slip crystal oscillator
JPS6255500A (en) Piezo-electric fan
JPH02135907A (en) Vertical crystal resonator
JPS5919419A (en) Supporting structure of tuning fork type oscillator
JPH0828640B2 (en) Vertical crystal unit
JPH02260710A (en) Longitudinal crystal resonator
JPH02186817A (en) Contour sliding crystal resonator
JPS63280507A (en) Coupling crystal resonator