JPH0831759B2 - Vertical crystal unit - Google Patents
Vertical crystal unitInfo
- Publication number
- JPH0831759B2 JPH0831759B2 JP63230484A JP23048488A JPH0831759B2 JP H0831759 B2 JPH0831759 B2 JP H0831759B2 JP 63230484 A JP63230484 A JP 63230484A JP 23048488 A JP23048488 A JP 23048488A JP H0831759 B2 JPH0831759 B2 JP H0831759B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- vibration
- bridge
- crystal unit
- vertical crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、周波数が1MHz前後の中周波数帯をカバーす
る縦水晶振動子に関する。特に、その振動子の支持部の
形状に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to a vertical crystal unit that covers a medium frequency band having a frequency of about 1 MHz. In particular, it relates to the shape of the support portion of the vibrator.
本発明は、振動モレが非常に少なく、R1の小さい小型
縦水晶振動子を提供することにある。水晶は物理的、お
よび化学的に大変に安定した物質であり、従って、これ
から形成される、いわゆる水晶振動子は損失抵抗の小さ
い、高いＱ値を持った振動子を得ることができる。しか
しながら、このように優れた特性が得られるのは、振動
モレの小さい振動子形状の設計がなされて初めて得られ
るのである。本発明では振動部と支持部がエッチング法
によって一体に形成された縦水晶振動子の支持部の形状
を新規にすることにより、振動部のエネルギーを振動部
内部に閉じ込めることができる。その結果、損失抵抗R1
の小さい、且つ、Ｑ値の高い縦水晶振動子を得ることが
できるものである。An object of the present invention is to provide a small vertical crystal unit having a very small vibration leak and a small R 1 . Quartz is a physically and chemically very stable substance, so that a so-called quartz oscillator formed from this can obtain an oscillator having a low loss resistance and a high Q value. However, such excellent characteristics can be obtained only after designing a vibrator shape with small vibration leakage. According to the present invention, the energy of the vibrating section can be confined inside the vibrating section by making the shape of the supporting section of the vertical crystal unit in which the vibrating section and the supporting section are integrally formed by the etching method. As a result, the loss resistance R 1
It is possible to obtain a vertical crystal resonator having a small Q value and a high Q value.
振動部と支持部をエッチング法によって一体に形成さ
れた従来の縦水晶振動子は支持部のフレームの幅が一
様、且つ、同一方向に形成され、その端部でマウントさ
れるため、振動部のエネルギーがマウント部まで伝わ
り、振動モレの原因となっていた。そのために、損失抵
抗R1の小さい縦水晶振動子を得ることができなかった。In the conventional vertical crystal unit in which the vibrating portion and the supporting portion are integrally formed by the etching method, the width of the frame of the supporting portion is uniform and formed in the same direction, and the vibrating portion is mounted at the end. Energy was transmitted to the mount, causing vibration leakage. Therefore, it was not possible to obtain a vertical crystal unit having a small loss resistance R 1 .
このために、増幅器の増幅度を高める等して対応して
きたが消費電流が多くなる等の欠点があり、ひどい時に
は、機器に配置したときに、振動モレが大きく、発振停
止するという大きな問題が生じていた。そこで、本発明
はこの振動モレの非常に小さい縦水晶振動子を提案する
ものである。即ち、振動モレの非常に小さい形状を提供
するものである。For this reason, the amplification degree of the amplifier has been increased, but there is a drawback that the current consumption increases, and in a severe case, when it is placed in a device, vibration leakage is large and oscillation is stopped. It was happening. Therefore, the present invention proposes a vertical crystal oscillator having a very small vibration leakage. That is, it provides a very small shape of vibration leakage.
第１図は本発明の縦水晶振動子の一実施例で、第２図
は第１図の縦水晶振動子の原理を説明するための簡略化
した平面図である。第２図において、振動子１は振動部
２と支持部３から成り、支持部３は両端支持という境界
条件で固定されていると考えることができる。又、振動
部２は長さL1,幅W1,厚みＴで表し、支持部３は長さL2、
幅W2で表すと、今、振動子１の振動部２は矢印Ａで示し
たように、伸びの変位をすると、支持部３の屈曲部は、
当然矢印Ｂで示すごとく内側に曲げのモードを発生す
る。ここでは屈曲モードを起こす部分を屈曲部５で示
す。逆に、振動部２が縮めば、支持部３の屈曲部５は外
側に曲げのモードを発生する。即ち、本発明では、振動
部２の幅方向の変位を支持部３の屈曲モードに変換する
ことによって、その振動の自由度を抑圧しないようにし
ている。そして、実際には、振動を抑圧しない寸法があ
る。この形状寸法は振動部２のひずみエネルギーによっ
て決まる。すなわち、振動部２のひずみエネルギーを
U1、屈曲部のひずみエネルギーをU2とすると、U1,U2は
次式で表される。FIG. 1 is an embodiment of the vertical crystal unit of the present invention, and FIG. 2 is a simplified plan view for explaining the principle of the vertical crystal unit of FIG. In FIG. 2, the vibrator 1 includes a vibrating portion 2 and a supporting portion 3, and the supporting portion 3 can be considered to be fixed under the boundary condition of supporting both ends. The vibrating portion 2 is represented by a length L 1 , a width W 1 , and a thickness T, and the supporting portion 3 has a length L 2 ,
In terms of the width W 2 , when the vibrating portion 2 of the vibrator 1 is displaced by extension as indicated by an arrow A, the bending portion of the supporting portion 3 is
Naturally, a bending mode is generated inward as indicated by arrow B. Here, a portion where the bending mode occurs is indicated by a bent portion 5. On the contrary, when the vibrating portion 2 contracts, the bending portion 5 of the supporting portion 3 generates a bending mode to the outside. That is, in the present invention, the displacement of the vibration section 2 in the width direction is converted into the bending mode of the support section 3 so that the degree of freedom of the vibration is not suppressed. And, in reality, there is a dimension that does not suppress vibration. This shape size is determined by the strain energy of the vibrating portion 2. That is, the strain energy of the vibration part 2
If U 1 and the strain energy of the bent portion are U 2 , then U 1 and U 2 are expressed by the following equations.
但し、応力T2、ひずみS2、ヤング率Ｅ、断面２次モー
メントＩ、変位ｖ、体積V1,V2、座標ｘを示す。又、縦
水晶振動子の振動を抑圧しない関係は式（１），（２）
より、次の関係が成り立つ。 However, stress T 2 , strain S 2 , Young's modulus E, moment of inertia I of area, displacement v, volumes V 1 , V 2 , and coordinates x are shown. In addition, the relationship that does not suppress the vibration of the vertical crystal unit is expressed by equations (1) and (2).
Therefore, the following relation holds.
U1＞U2 ……（３） これより、屈曲部５の寸法L2、W2が決定される。例え
ば、本発明の周波数1MHzのときの振動部の寸法は長さL1
＝2.6mm、W1＝80μｍ、Ｔ＝160μｍのとき、支持部の屈
曲部の寸法比W2/L2は0.16以下であれば良い。このよう
に寸法を決めることにより、損失抵抗の小さい、且つ、
高いＱ値を持つ縦水晶振動子を得ることができる。次
に、振動モレについて述べる。第２図の簡略化した図か
ら分かるように、振動部２の振動エネルギーは支持部３
へ第１ブリッジ部４を介して伝達する。従って、支持部
３でのエネルギー損失を小さくすれば良い訳で、支持部
３のモードは屈曲モードに変換されるから、両端支持部
の質量が実質的に無限に大きければ、支持部３の屈曲部
５のエネルギーはマウント部８までモレないことにな
る。換言するならば、本発明は、振動部２から伝わる支
持部３の屈曲モードに変換する形状、即ち、幅W2と長さ
L2の比W2/L2を選択することにより、振動部の振動を自
由にし、且つ、屈曲モードする部分と接続する両端支持
の境界条件を持つ支持部の質量を無限に大きくすること
によって、本発明の目的を達成するものである。U 1 > U 2 (3) From this, the dimensions L 2 and W 2 of the bent portion 5 are determined. For example, the dimension of the vibrating portion at the frequency of 1 MHz of the present invention is the length L 1
= 2.6 mm, W 1 = 80 μm, T = 160 μm, the dimensional ratio W 2 / L 2 of the bent portion of the supporting portion may be 0.16 or less. By determining the dimensions in this way, the loss resistance is small, and
A vertical crystal unit having a high Q value can be obtained. Next, vibration leakage will be described. As can be seen from the simplified diagram of FIG. 2, the vibration energy of the vibrating part 2 is equal to that of the supporting part 3.
It is transmitted to the first bridge portion 4 through. Therefore, it suffices to reduce the energy loss in the support portion 3, and the mode of the support portion 3 is converted to the bending mode. Therefore, if the mass of the support portions at both ends is substantially infinitely large, the bending of the support portion 3 is performed. The energy of the part 5 does not leak to the mount part 8. In other words, according to the present invention, the shape of the supporting portion 3 transmitted from the vibrating portion 2 is converted into the bending mode, that is, the width W 2 and the length.
By selecting the ratio W 2 / L 2 of L 2, by freeing the vibration of the vibration portion, and, to increase the mass of the support portion having both ends supported boundary conditions for connecting with the bending mode portion infinitely That is, the object of the present invention is achieved.
このように、本発明は振動部と支持部から構成され
る、エッチング法によって形成される縦水晶振動子の支
持部の形状寸法を改善することにより、損失抵抗の小さ
い、且つ、高いＱ値を有する縦水晶振動子を得ることが
できる。同時に、支持部の振動モードを解析することに
より、振動モレの小さい縦水晶振動子が得られる。As described above, according to the present invention, by improving the shape and size of the supporting portion of the vertical crystal resonator formed by the etching method, which is composed of the vibrating portion and the supporting portion, the loss resistance is small and the high Q value is high. It is possible to obtain a vertical crystal oscillator having the same. At the same time, by analyzing the vibration mode of the support portion, a vertical crystal resonator with small vibration leakage can be obtained.
次に、本発明にて得られた結果を具体的に述べる。第
１図は本発明の縦水晶振動子の一実施例を示す平面図
で、振動子１は振動部２と支持部３から第１ブリッジ部
４を介して構成されていて、エッチング法によって一体
に形成されている。尚、支持部３屈曲部５、穴７、第２
ブリッジ部９、フレーム６とマウント部８から成ってい
る。振動部２は一対の第１ブリッジ部４を介して一対の
各屈曲部５に接続され、更に、穴７の両端を介して各第
２ブリッジ部９の一端に接続され、各第２ブリッジ部９
の他端は振動部２の長手方向に平行に設けられた一対の
各フレーム６の一端に接続され、該各フレーム６の他端
は同一のマウント部８まで延在し、屈曲部、穴、ブリッ
ジ部、フレームとマウント部から成る支持部は振動部に
対して対称に設けられている。振動部２は外部からの電
界駆動（図示されてない）にて、長手方向に伸縮運動す
るが、それと同時にその垂直方向、即ち、第１ブリッジ
部４の方向にも同様の振動をする。この時に、まず、振
動部２の長手方向の振動を自由に励振するには、第１ブ
リッジ部４の方向の振動を十分に自由にすることが大切
で、そのために、本発明では支持部３の屈曲部５が十分
に自由に振動できるように、穴７が設けられている。
又、屈曲部５の長さＬと幅Ｗ（図示されてない）の比に
よって、例えば、周波数が約1MHzの場合、辺比W/Lが0.1
6以下であれば、長手方向の振動の抑圧を十分に小さく
することができる。次に、振動モレについては、振動子
１は振動部２から第１ブリッジ部４を介して屈曲部５へ
と一体にエッチング法によって形成され、屈曲部５の振
動を十分に自由にさせるために、穴７が設けられてい
る。更に、穴７の両端部はフレーム６に接続され、マウ
ント部８まで延びている。それ故、振動部２の第１ブリ
ッジ部４の方向の振動は屈曲モードに変換され、且つ、
穴７の両端部を介してフレーム６に接続、マウント部ま
で延びているので、マウント部８で固定しても、全く振
動モレのない縦水晶振動子が得られる。Next, the results obtained by the present invention will be specifically described. FIG. 1 is a plan view showing an embodiment of a vertical quartz oscillator of the present invention. The oscillator 1 is composed of a vibrating portion 2 and a supporting portion 3 via a first bridge portion 4, and is integrated by an etching method. Is formed in. In addition, the supporting portion 3, the bent portion 5, the hole 7, the second
It is composed of a bridge portion 9, a frame 6 and a mount portion 8. The vibrating portion 2 is connected to the pair of bent portions 5 through the pair of first bridge portions 4, and further connected to one end of each second bridge portion 9 through both ends of the hole 7, and each second bridge portion. 9
The other end of each frame 6 is connected to one end of each of a pair of frames 6 provided in parallel with the longitudinal direction of the vibrating portion 2, and the other end of each frame 6 extends to the same mount portion 8 and includes a bent portion, a hole, The support portion including the bridge portion, the frame and the mount portion is provided symmetrically with respect to the vibrating portion. The vibrating portion 2 expands and contracts in the longitudinal direction when driven by an electric field (not shown) from the outside, but at the same time, it vibrates in the vertical direction, that is, in the direction of the first bridge portion 4. At this time, first, in order to freely excite the vibration in the longitudinal direction of the vibrating portion 2, it is important that the vibration in the direction of the first bridge portion 4 is sufficiently free. Therefore, in the present invention, the supporting portion 3 is used. A hole 7 is provided so that the bent portion 5 can freely vibrate.
Also, depending on the ratio of the length L to the width W (not shown) of the bent portion 5, for example, when the frequency is about 1 MHz, the side ratio W / L is 0.1.
When it is 6 or less, the suppression of vibration in the longitudinal direction can be made sufficiently small. Next, regarding the vibration leakage, the vibrator 1 is integrally formed from the vibrating portion 2 to the bending portion 5 via the first bridge portion 4 by an etching method, so that the vibration of the bending portion 5 can be made sufficiently free. , Hole 7 is provided. Further, both ends of the hole 7 are connected to the frame 6 and extend to the mount portion 8. Therefore, the vibration of the vibrating portion 2 in the direction of the first bridge portion 4 is converted into the bending mode, and
Since it is connected to the frame 6 through both ends of the hole 7 and extends to the mount portion, even if it is fixed by the mount portion 8, a vertical crystal resonator having no vibration leak can be obtained.
以上述べたように、本発明は振動部と支持部をエッチ
ング法によって一体に形成する縦水晶振動子に於いて、
新形状の縦水晶振動子を提案することにより、次の著し
い効果を有する。As described above, the present invention provides a vertical crystal unit in which a vibrating portion and a supporting portion are integrally formed by an etching method,
By proposing a new vertical quartz crystal resonator, the following remarkable effects can be obtained.
支持部の形状寸法を改善することにより、振動を自由
にさせることができるので、損失抵抗が小さくなる。By improving the shape and size of the supporting portion, it is possible to freely vibrate, so that the loss resistance is reduced.
屈曲部とフレームの間に穴を設けているので、振動部
の振動を自由にさせることができると同時に、屈曲部の
エネルギーはフレームに伝わらないので、振動モレがな
くなり、マウント部で固定しても、R1の小さい振動子が
得られる。Since a hole is provided between the bending part and the frame, the vibration of the vibrating part can be freely made, and at the same time, the energy of the bending part is not transmitted to the frame, so there is no vibration leakage and it can be fixed by the mount part. Also, a small R 1 oscillator is obtained.
片側の面でマウントするので、製造が容易、且つ、小
型化できる。Since it is mounted on one side, it is easy to manufacture and can be downsized.
第１図は本発明の縦水晶振動子形状寸法の一実施例を示
す平面図である。 第２図は本発明の縦水晶振動子の原理を説明するための
簡略化した平面図である。 １……振動子 ２……振動部 ３……支持部 ４……第１ブリッジ部 ５……屈曲部 ６……フレーム ７……穴 ８……マウント部 ９……第２ブリッジ部 L,L2……屈曲部の長さ W,W2……屈曲部の幅 L1……振動部の長さ W1……振動部の幅FIG. 1 is a plan view showing an embodiment of the geometrical dimensions of a vertical crystal unit according to the present invention. FIG. 2 is a simplified plan view for explaining the principle of the vertical crystal unit of the present invention. 1 …… Vibrator 2 …… Vibration part 3 …… Supporting part 4 …… First bridge part 5 …… Bending part 6 …… Frame 7 …… Hole 8 …… Mount part 9 …… Second bridge part L, L 2 …… Bending length W, W 2 …… Bending width L 1 …… Vibration length W 1 …… Vibration width
Claims (1)
って一体に形成し、振動部は一対の第１ブリッジ部を介
して一対の各屈曲部に接続され、更に、各屈曲部の両端
は、穴の両端を介して各第２ブリッジ部の一端に接続さ
れる縦水晶振動子であって、各第２ブリッジ部の他端は
振動部の長手方向に平行に設けられた一対の各フレーム
の一端に接続され、該各フレームの他端は同一のマウン
ト部まで延在し、屈曲部、穴、ブリッジ部、フレームと
マウント部から成る支持部は振動部に対して対称に設け
られたことを特徴とする縦水晶振動子。1. A vibrating portion and a pair of supporting portions are integrally formed by an etching method, the vibrating portion is connected to a pair of bending portions through a pair of first bridge portions, and both ends of each bending portion are connected to each other. A vertical quartz oscillator connected to one end of each second bridge portion through both ends of the hole, the other end of each second bridge portion being a pair of frames provided parallel to the longitudinal direction of the vibrating portion. Connected to one end of the frame, the other end of each frame extends to the same mount portion, and the bent portion, the hole, the bridge portion, and the support portion including the frame and the mount portion are provided symmetrically with respect to the vibrating portion. Vertical crystal unit characterized by.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63230484A JPH0831759B2 (en) | 1988-09-14 | 1988-09-14 | Vertical crystal unit |
| GB8920145A GB2224159B (en) | 1988-09-09 | 1989-09-06 | Resonator |
| US07/404,324 US5001383A (en) | 1988-09-09 | 1989-09-07 | Longitudinal quartz crystal resonator |
| CH3275/89A CH678676A5 (en) | 1988-09-09 | 1989-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63230484A JPH0831759B2 (en) | 1988-09-14 | 1988-09-14 | Vertical crystal unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0279509A JPH0279509A (en) | 1990-03-20 |
| JPH0831759B2 true JPH0831759B2 (en) | 1996-03-27 |
Family
ID=16908510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63230484A Expired - Lifetime JPH0831759B2 (en) | 1988-09-09 | 1988-09-14 | Vertical crystal unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0831759B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4321949C2 (en) * | 1992-07-03 | 1997-07-10 | Murata Manufacturing Co | Vibrator unit |
| DE4322144C2 (en) * | 1992-07-03 | 1997-06-05 | Murata Manufacturing Co | Vibrator unit |
| GB2278721B (en) * | 1993-05-31 | 1996-12-18 | Murata Manufacturing Co | Chip-type piezoelectric resonance component |
| US5648746A (en) * | 1993-08-17 | 1997-07-15 | Murata Manufacturing Co., Ltd. | Stacked diezoelectric resonator ladder-type filter with at least one width expansion mode resonator |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5596713A (en) * | 1979-01-17 | 1980-07-23 | Seiko Instr & Electronics Ltd | Outline vibration mode piezo-vibrator |
| JPS60112121U (en) * | 1983-12-29 | 1985-07-30 | キンセキ株式会社 | piezoelectric vibrator |
| JPH0622311B2 (en) * | 1986-02-21 | 1994-03-23 | セイコ−電子部品株式会社 | Contour-slip crystal unit |
| JPH0622310B2 (en) * | 1986-02-21 | 1994-03-23 | セイコ−電子部品株式会社 | Contour-slip crystal unit |
-
1988
- 1988-09-14 JP JP63230484A patent/JPH0831759B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0279509A (en) | 1990-03-20 |
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