JPH0279509A - Longitudinal crystal resonator - Google Patents
Longitudinal crystal resonatorInfo
- Publication number
- JPH0279509A JPH0279509A JP23048488A JP23048488A JPH0279509A JP H0279509 A JPH0279509 A JP H0279509A JP 23048488 A JP23048488 A JP 23048488A JP 23048488 A JP23048488 A JP 23048488A JP H0279509 A JPH0279509 A JP H0279509A
- Authority
- JP
- Japan
- Prior art keywords
- crystal resonator
- vibrating
- mount
- bridge
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 26
- 238000005452 bending Methods 0.000 claims abstract description 18
- 238000005530 etching Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 abstract description 4
- 230000001629 suppression Effects 0.000 abstract description 2
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、周波数がＩＭＨｚ前後の中周波数帯をカバー
する縦水晶振動子に関する。特に、その振動子の支持部
の形状に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a vertical crystal resonator whose frequency covers a medium frequency band around IMHz. In particular, it relates to the shape of the support portion of the vibrator.
本発明は、振動モレが非常に少なく、Ｒ，の小さい小型
縦水晶振動子を提供することにある。水晶は物理的、お
よび化学的に大変に安定した物質であり、従って、これ
から形成される、いわゆる水晶振動子は損失抵抗の小さ
い、高いＱ値を持った振動子を得ることができる。しか
しながら、このように優れた特性が得られるのは、振動
モレの小さい振動子形状の設計がなされて初めて得られ
るのである。本発明では振動部と支持部がエツチング法
によって一体に形成された縦水晶振動子の支持部の形状
を新規にすることにより、振動部のエネルギーを振動部
内部に閉じ込めることができる。その結果、損失抵抗Ｒ
３の小さい、且つ、Ｑ値の高い縦水晶振動子を得ること
ができるものである。An object of the present invention is to provide a compact vertical crystal resonator with very little vibration leakage and a small R. Quartz is a physically and chemically very stable substance, and therefore, a so-called crystal resonator formed from it can have a low loss resistance and a high Q value. However, such excellent characteristics can only be obtained by designing a vibrator shape with small vibration leakage. In the present invention, the energy of the vibrating part can be confined within the vibrating part by creating a new shape of the supporting part of the vertical crystal resonator in which the vibrating part and the supporting part are integrally formed by etching. As a result, the loss resistance R
This makes it possible to obtain a vertical crystal resonator with a small Q value of 3 and a high Q value.
振動部と支持部をエツチング法によって一体に形成され
た従来の縦水晶振動子は支持部のフレームの幅が一様、
且つ、同一方向に形成され、その端部でマウントされる
ため、振動部のエネルギーがマウント部まで伝わり、振
動モレの原因となっていた。そのために、損失抵抗Ｒ９
の小さい縦水晶振動子を得ることができなかった。In conventional vertical crystal oscillators, in which the vibrating part and the support part are integrally formed by etching, the width of the frame of the support part is uniform;
Moreover, since they are formed in the same direction and mounted at their ends, the energy of the vibrating part is transmitted to the mount part, causing vibration leakage. Therefore, the loss resistance R9
It was not possible to obtain a small vertical crystal oscillator.
〔発明が解決しようとする５題〕
このために、増幅器の増幅度を高める等して対応してき
たが消費電流が多（なる等の欠点があり、ひどい時には
、機器に配置したときに、振動モレが大きく、発振停止
するという大きな問題が生じていた。そこで、本発明は
この振動モレの非常に小さい縦水晶振動子を提案するも
のである。即ち、振動モレの）ト常に小さい形状を提供
するものである。[Five problems to be solved by the invention] To solve this problem, attempts have been made to increase the amplification degree of the amplifier, but these have drawbacks such as high current consumption and, in severe cases, vibrations when installed in equipment. There was a big problem that the leakage was large and the oscillation stopped.Therefore, the present invention proposes a vertical crystal oscillator with very small vibration leakage.In other words, it provides a vertical crystal oscillator with very small vibration leakage. It is something to do.
第１図は本発明の縦水晶振動子の一実施例で、第２図は
第１図の縦水晶振動子の原理を説明するための簡略化し
た平面図である。第２図において、振動子１は振動部２
と支持部３から成り、支持部３は両端支持という境界条
件で固定されていると考えることができる。又、振動部
２は長さＬ＋、幅Ｗｌ、厚みＴで表し、支持部３は長さ
Ｌ２、幅Ｗ２で表すと、今、振動子ｌの振動部２は矢印
Ａで示したように、伸びの変位をすると、支持部３の屈
曲部は、当然矢印Ｂで示すごとく内側に曲げのモードを
発生する。ここでは屈曲モードを起こす部分を屈曲部５
で示す。逆に、振動部２が縮めば、支持部３の屈曲部５
は外側に曲げのモードを発生する。即ち、本発明では、
振動部２の幅方向の変位を支持部３の屈曲モードに変換
することによって、その振動の自由度を抑圧しないよう
にしている。そして、実際には、振動を抑圧しない寸法
がある。この形状寸法は振動部２のひずみ工２ルギーに
よって決まる。すなわち、振動部２のひずみエネルギー
をＵｌ、屈曲部のひずみエネルギーをＵ２とすると、Ｕ
、、Ｕ２は次式で表される。FIG. 1 shows an embodiment of the vertical crystal resonator of the present invention, and FIG. 2 is a simplified plan view for explaining the principle of the vertical crystal resonator of FIG. In FIG. 2, the vibrator 1 is the vibrating part 2.
and a support part 3, and the support part 3 can be considered to be fixed under the boundary condition of being supported at both ends. Also, if the vibrating part 2 is represented by length L+, width Wl, and thickness T, and support part 3 is represented by length L2 and width W2, now, as shown by arrow A, the vibrating part 2 of vibrator l is When subjected to elongation displacement, the bent portion of the support portion 3 naturally generates a bending mode inward as shown by arrow B. Here, the part where the bending mode occurs is the bending part 5.
Indicated by Conversely, if the vibrating part 2 contracts, the bent part 5 of the supporting part 3
generates an outward bending mode. That is, in the present invention,
By converting the displacement of the vibrating part 2 in the width direction into a bending mode of the support part 3, the degree of freedom of vibration is not suppressed. In reality, there are dimensions that do not suppress vibrations. The shape and dimensions are determined by the strain factor of the vibrating section 2. That is, if the strain energy of the vibrating part 2 is Ul and the strain energy of the bending part is U2, then U
, , U2 is expressed by the following formula.
■
但し、応力Ｔ２、ひずみＳ２、ヤング率Ｅ、１析面２次
モーメント１、変位Ｖ、体積Ｖ４、■２、座標Ｘを示す
。又、縦水晶振動子の振動を抑圧しない関係は式＋ｌ＋
、 ＋２１より、次の関係が成り立つ。(2) However, stress T2, strain S2, Young's modulus E, moment of inertia of 1 analytic plane 1, displacement V, volume V4, (2) and coordinate X are shown. Also, the relationship that does not suppress the vibration of the vertical crystal oscillator is the formula +l+
, +21, the following relationship holds true.
Ｕ ＋ ＞ Ｕ ２ −−−− （３１こ
れより、屈曲部５の寸法Ｌｍ、ＷＺが決定される。例え
ば、本発明の周波数ＩＭＨｚのときの振動部）寸法は長
さＬ＋ ＝２．６ ｎ、Ｗ＋＝８０μｍ、Ｔ ＝ １６
０μｍのとき、支持部の屈曲部の寸法比Ｗ２／Ｌ２は０
．１６以下であれば良い。このように寸法を決めること
により、損失抵抗の小さい、且つ、高いＱ値を持つ縦水
晶振動子を得ることができる。次に、振動モレについて
述べる。第２図の簡略化した図から分かるように、振動
部２の振動エネルギーは支持部３ヘブリノジ部４を介し
て伝達する。従って、支持部３でのエネルギー損失を小
さ（すれば良い訳で、支持部３のモードは屈曲モードに
変換されるから、両端支持部の質量が実質的に無限に大
きければ、支持部３の屈曲部５のエネルギーはマウント
部８までモレないことになる。換言するならば、本発明
は、振動部２から伝わる支持部３の屈曲モードに変換す
る形状、即ち、幅Ｗ２と長さし、の比’Ａｈ／Ｌ−ｚを
選択することにより、振動部の振動を自由にし、且つ、
屈曲モードする部分と接続する両端支持の境界条件を持
つ支持部の質量を無限に大きくすることによって、本発
明の目的を達成するものである。U + > U 2 ---- (31 From this, the dimensions Lm and WZ of the bending part 5 are determined. For example, the vibration part when the frequency of the present invention is IMHz) The dimensions are length L+ = 2.6 n , W+=80μm, T=16
When it is 0 μm, the dimension ratio W2/L2 of the bent part of the support part is 0.
．． It is sufficient if it is 16 or less. By determining the dimensions in this way, it is possible to obtain a vertical crystal resonator with low loss resistance and a high Q value. Next, we will discuss vibration leakage. As can be seen from the simplified diagram in FIG. 2, the vibration energy of the vibrating part 2 is transmitted via the support part 3 and the heblinary part 4. Therefore, it is only necessary to reduce the energy loss at the support part 3, and since the mode of the support part 3 is converted to a bending mode, if the masses of the support parts at both ends are substantially infinitely large, then the energy loss at the support part 3 can be reduced. The energy of the bending part 5 will not leak up to the mount part 8. In other words, the present invention has a shape that converts the bending mode of the support part 3 transmitted from the vibrating part 2, that is, the width W2 and the length, By selecting the ratio 'Ah/L-z, the vibration of the vibrating part can be made free, and
The object of the present invention is achieved by infinitely increasing the mass of the support part that has the boundary condition of being supported at both ends and is connected to the part that undergoes the bending mode.
［作用〕
このように、本発明は振動部と支持部から構成される、
エツチング法によって形成される縦水晶振動子の支持部
の形状寸法を改善することにより、損失抵抗の小さい、
且つ、高いＱ（ａを有する縦水晶振動子を得ることがで
きる。同時に、支持部の振動モードを解析することによ
り、振動モレの小さい縦水晶振動子が得られる。[Function] As described above, the present invention is composed of a vibrating section and a supporting section.
By improving the shape and dimensions of the support part of the vertical crystal resonator formed by the etching method, the loss resistance is reduced.
In addition, a vertical crystal resonator having a high Q(a) can be obtained.At the same time, by analyzing the vibration mode of the support portion, a vertical crystal resonator with small vibration leakage can be obtained.
［実施例］
次に、本発明にて得られた結果を具体的に述べる。第１
図は本発明の縦水晶振動子の一実施例を示す平面図で、
振動子１は振動部２と支持部３からブリンジ部４を介し
て構成されていて、エツチング法によって一体に形成さ
れている。尚、支持部３は屈曲部５、穴７、フレーム６
とマウント部８から成っている。振動部２は外部からの
電界駆動（図示されてない）にて、長手方向に伸縮運動
をするが、それと同時にその垂直方向、即ち、ブリッジ
部４の方向にも同様の振動をする。この時に、まず、振
動部２の長平方向の振動を自由に励振するには、ブリッ
ジ部４の方向の振動を十分に自由にすることが大切で、
そのために、本発明では支持部３の屈曲部５が十分に自
由に振動できるように、穴７が設けられている。又、屈
曲部５の長さしと幅Ｗ（図示されてない）の比によって
、例えば、周波数が約ＩＭｔｌｚの場合、辺比Ｗ／Ｌが
０．１６以下であれば、長平方向の振動の抑圧を十分に
小さくすることができる。次に、振動モレについては、
振動子ｌは振動部２からブリッジ部４を介して屈曲部５
へと一体にエツチング法によって形成され、屈曲部５の
振動を十分に自由にさせるために、穴７が設けられてい
る。更に、穴フの両端部はフレーム６に接続され、マウ
ント部８まで延びている。それ故、振動部２のプリフジ
部４の方向の振動は屈曲モードに変換され、且つ、穴マ
の両端部を介してフレーム６に接続、マウント部まで延
びているので、マウント部８で固定しても、全く振動モ
レのない縦水晶振動子が得られる。[Example] Next, the results obtained in the present invention will be specifically described. 1st
The figure is a plan view showing an embodiment of the vertical crystal oscillator of the present invention.
The vibrator 1 is composed of a vibrating part 2 and a support part 3 via a bridge part 4, and is integrally formed by an etching method. Note that the support part 3 includes a bent part 5, a hole 7, and a frame 6.
and a mount section 8. The vibrating section 2 is driven by an external electric field (not shown) to expand and contract in the longitudinal direction, but at the same time, it also vibrates in the vertical direction, that is, in the direction of the bridge section 4. At this time, first, in order to freely excite vibrations in the longitudinal direction of the vibrating part 2, it is important to make the vibrations in the direction of the bridge part 4 sufficiently free.
To this end, in the present invention, holes 7 are provided so that the bent portion 5 of the support portion 3 can vibrate sufficiently freely. Also, depending on the ratio of the length and width W (not shown) of the bent portion 5, for example, when the frequency is about IMtlz, if the side ratio W/L is 0.16 or less, the vibration in the long plane direction can be reduced. Suppression can be made sufficiently small. Next, regarding vibration leakage,
The vibrator l passes from the vibrating part 2 to the bending part 5 via the bridge part 4.
Holes 7 are provided in order to allow the bending portion 5 to vibrate sufficiently freely. Further, both ends of the hole are connected to the frame 6 and extend to the mount section 8. Therefore, the vibration of the vibrating part 2 in the direction of the pre-fuged part 4 is converted into a bending mode, and is connected to the frame 6 through both ends of the hole and extends to the mount part, so it can be fixed with the mount part 8. However, a vertical crystal resonator with no vibration leakage can be obtained.
以上述べたように、本発明は振動部と支持部を工、チン
グ法によって一体に形成する縦水晶振動子に於いて、新
形状の縦水晶振動子を提案することにより、次の著しい
効果を有する。As described above, the present invention provides the following remarkable effects by proposing a vertical crystal oscillator with a new shape in a vertical quartz crystal oscillator in which the vibrating part and the supporting part are integrally formed by the machining method. have
■支持部の形状寸法を改善することにより、振動を自由
にさせることができるので、損失抵抗が小さくなる。(2) By improving the shape and dimensions of the support part, vibration can be made free, so loss resistance is reduced.
■屈曲部とフレームの間に穴を設けているので、振動部
の振動を自由にさせることができると同時に、屈曲部の
エネルギーはフレームに伝わらないので、振動モレがな
くなり、マウント部で固定しても、Ｒ１の小さい振動子
が得られる。■Since there is a hole between the bending part and the frame, the vibrating part can vibrate freely, and at the same time, the energy of the bending part is not transmitted to the frame, eliminating vibration leakage and fixing it with the mount part. However, a resonator with a small R1 can be obtained.
０片側の面でマウントするので、製造が容易、且つ、小
型化できる。Since it is mounted on one side, manufacturing is easy and miniaturization is possible.
第１図は本発明の縦水晶振動子形状寸法の一実施例を示
す平面図である。
第２図は本発明の縦水晶振動子の原理を説明するだめの
簡略化した平面図である。
ｌ・・・振動子
２・・・振動部
３・・・支持部
４・・ ブリッジ部
５・・・屈曲部
６・・・フレーム
７・・・穴
８ ・・マウント部
り、Ｌ２ ・・・屈曲部の長さ
Ｗ、Ｗ２ ・・・屈曲部の輻
Ｌｌ ・・・振動部の長さ
Ｗｌ ・・・振動部の幅
以上
出願人 セイコー電子部品株式会社
代理人 弁理士 林 敬 之 助ｃ′ｒ１ｒ＼
α） （）FIG. 1 is a plan view showing an embodiment of the shape and dimensions of a vertical crystal resonator of the present invention. FIG. 2 is a simplified plan view for explaining the principle of the vertical crystal resonator of the present invention. l... Vibrator 2... Vibrating part 3... Support part 4... Bridge part 5... Bent part 6... Frame 7... Hole 8... Mount part, L2... Lengths W, W2 of the bent portion Ll of the bent portion Ll of the vibrating portion Wl … Width of the vibrating portion or more Applicant Seiko Electronic Components Co., Ltd. Agent Patent attorney Keisuke Hayashi c' r1r\
α) ()
Claims (1)
れた縦水晶振動子に於いて、振動部はブリッジ部を介し
て屈曲部に接続され、更に、穴の両端を介してフレーム
に接続されると同時に、マウント部まで延びていること
を特徴とする縦水晶振動子。In a vertical crystal oscillator in which the vibrating part and the supporting part are integrally formed by etching, the vibrating part is connected to the bending part through the bridge part, and is further connected to the frame through both ends of the hole. At the same time, it is a vertical crystal resonator characterized by extending to the mount.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63230484A JPH0831759B2 (en) | 1988-09-14 | 1988-09-14 | Vertical crystal unit |
| GB8920145A GB2224159B (en) | 1988-09-09 | 1989-09-06 | Resonator |
| US07/404,324 US5001383A (en) | 1988-09-09 | 1989-09-07 | Longitudinal quartz crystal resonator |
| CH3275/89A CH678676A5 (en) | 1988-09-09 | 1989-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63230484A JPH0831759B2 (en) | 1988-09-14 | 1988-09-14 | Vertical crystal unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0279509A true JPH0279509A (en) | 1990-03-20 |
| JPH0831759B2 JPH0831759B2 (en) | 1996-03-27 |
Family
ID=16908510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63230484A Expired - Lifetime JPH0831759B2 (en) | 1988-09-09 | 1988-09-14 | Vertical crystal unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0831759B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5541467A (en) * | 1992-07-03 | 1996-07-30 | Murata Manufacturing Co., Ltd. | Vibrating unit |
| US5627425A (en) * | 1992-07-03 | 1997-05-06 | Murata Manufacturing Co., Ltd. | Vibrating unit |
| US5696472A (en) * | 1993-08-17 | 1997-12-09 | Murata Manufacturing Co., Ltd. | Stacked ladder-type filter utilizing at least one shear mode piezoelectric resonator |
| US5701048A (en) * | 1993-05-31 | 1997-12-23 | Murata Manufacturing Co., Ltd. | Chip-type piezoelectric resonance component |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5596713A (en) * | 1979-01-17 | 1980-07-23 | Seiko Instr & Electronics Ltd | Outline vibration mode piezo-vibrator |
| JPS60112121U (en) * | 1983-12-29 | 1985-07-30 | キンセキ株式会社 | piezoelectric vibrator |
| JPS62194720A (en) * | 1986-02-21 | 1987-08-27 | Seiko Electronic Components Ltd | Contour shear crystal resonator |
| JPS62194718A (en) * | 1986-02-21 | 1987-08-27 | Seiko Electronic Components Ltd | Contour shear crystal resonator |
-
1988
- 1988-09-14 JP JP63230484A patent/JPH0831759B2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5596713A (en) * | 1979-01-17 | 1980-07-23 | Seiko Instr & Electronics Ltd | Outline vibration mode piezo-vibrator |
| JPS60112121U (en) * | 1983-12-29 | 1985-07-30 | キンセキ株式会社 | piezoelectric vibrator |
| JPS62194720A (en) * | 1986-02-21 | 1987-08-27 | Seiko Electronic Components Ltd | Contour shear crystal resonator |
| JPS62194718A (en) * | 1986-02-21 | 1987-08-27 | Seiko Electronic Components Ltd | Contour shear crystal resonator |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5541467A (en) * | 1992-07-03 | 1996-07-30 | Murata Manufacturing Co., Ltd. | Vibrating unit |
| US5627425A (en) * | 1992-07-03 | 1997-05-06 | Murata Manufacturing Co., Ltd. | Vibrating unit |
| US5701048A (en) * | 1993-05-31 | 1997-12-23 | Murata Manufacturing Co., Ltd. | Chip-type piezoelectric resonance component |
| US5696472A (en) * | 1993-08-17 | 1997-12-09 | Murata Manufacturing Co., Ltd. | Stacked ladder-type filter utilizing at least one shear mode piezoelectric resonator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0831759B2 (en) | 1996-03-27 |
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