JPH02186817A - Contour sliding crystal resonator - Google Patents

Abstract

PURPOSE:To obtain a contour sliding crystal resonator with no oscillation leakage and low loss resistance by forming an oscillation part and a supporting part integrally by an etching method. CONSTITUTION:A resonator 1 is constituted of the oscillation part 2, and the supporting part 3, and they are formed integrally by the etching method. A curvature part 4 is provided at the supporting part 3, and free excitation can be obtained without suppressing the oscillation of the oscillation part 2, and furthermore, the end part of the curvature part 4 is connected to a connection part 5 to reduce the oscillation leakage, and is fixed at a pedestal, etc., with a mounting part 6. At this time, the supporting part 3 is arranged in a direction of z'-axis, and also, dead weight for frequency adjustment is provided on the end part on a diagonal line. Thereby, no oscillation leakage occurs, and the loss resistance can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a weight and a support part for frequency adjustment of a contour slip quartz crystal resonator in which the vibrating part and the support part are formed by an etching method.

[Summary of the Invention 1 The object of the present invention is to provide a contour slip crystal resonator with excellent electrical characteristics, that is, with very little vibration leakage and with a small loss resistance R1. Crystal is a very stable substance both physically and chemically.

Therefore, a so-called crystal resonator formed from this can have a low loss resistance and a high Q value. However, such excellent identification can only be obtained by designing a vibrator shape with small vibration leakage.6 In the present invention, the vibrating part and the supporting part are formed integrally by an etching method. By devising and improving the shape and dimensions of the support portion of the sliding crystal resonator, the energy of the vibrating portion can be confined within the vibrating portion. That is, an object of the present invention is to obtain a contour slip crystal resonator with small vibration leakage. Another object of the present invention is to provide a weight that allows efficient frequency adjustment.

[Prior Art] A conventional contour slip crystal resonator is formed by machining, and the resonator is usually supported by two thin lead wires at the center of a square plate.

For this reason, there were many problems such as difficulty in miniaturization, weak resistance to shock (furthermore, there was a lot of vibration leakage due to the support points, and it was not possible to obtain a contour slip crystal resonator with small loss resistance R1. Adjustments were made by mechanically shortening the length of the sides, which was inefficient and caused high costs.

[Problem to be solved by the invention 1] For this reason, these days it is not used except for special purposes, and as mentioned above, it is difficult to miniaturize because it is a mechanized work, and in terms of frequency, it is difficult to miniaturize at most. It has been completely impossible to obtain a contour slip quartz crystal with a frequency of around 2 MHz up to 500 kHz. Therefore, the present invention provides a contour slip crystal resonator with a small loss resistance R+ even when the frequency is around 2 MHz. In other words, it is small and
The present invention provides a contour slip crystal resonator with excellent impact resistance and low loss resistance R3. Another object of the present invention is to provide a weight that allows frequency adjustment with good work efficiency.

[Means for Solving the Problems] FIG. 1 is a plan view of an embodiment of a contour slip quartz crystal resonator shape and a weight according to the present invention. FIG. 2 is a plan view of another embodiment of the invention. FIG. 3 is a modeled plan view for explaining the principle of the contour slip crystal resonator of the present invention. The vibrator 1 consists of a vibrating part 2 and a support part 3, and the support part can be considered to be fixed under the boundary condition of being supported at one end.

In addition, the vibrating part 2 is expressed by length xo, width Z0, and thickness yo,
When the length of the support part 3 is expressed by the width W, the vibrating part 2 of the vibrator 1 now undergoes contour slipping displacement as shown by the broken line, and at that time the support part 3 is also displaced as shown by the broken line. . Conversely, it is obvious that if an electric field (provided on the front and back surfaces of the vibrating section, not shown) is applied, the displacements of expansion and contraction occur in opposite directions. That is, in the present invention, the degree of freedom of vibration is not suppressed by converting the displacement of the outline of the vibrating part 2 into the bending mode of the support part 3.

In reality, there are dimensions that do not suppress vibrations. The shape and dimensions are determined by the strain energy of the vibrating section 2 and the support section 3. That is, the strain energy of the vibrating part 2 is
, if the strain energy at the bent part is U2, then U3. U
x is expressed by the following formula.

However, stress Ts, strain Ss, Young's modulus E, moment of inertia I, displacement U, volume V,,V,, coordinate Z are shown.
Furthermore, the following relationship holds true from equations (1) and (2) that does not suppress the vibration of the contour-slip crystal oscillator.

U+>Ui −(3) From this,
For example, when the frequency of the vibrator of the present invention is 1.84 MHz, the dimensions of the vibrating portion are Xo = Zo = 1, 65 mm, yo = 50 μm.
In this case, if the dimension W of the bent part of the support part is smaller than 0.67L, R, J has a small loss resistance of 4100Ω, and
A contour slip crystal resonator with a high Q value can be obtained.

Next, the relationship between the support portion and the crystal axis of the crystal will be described.

The electrical axis, mechanical axis, and optical axis of the crystal are the X axis, y axis, and Z axis, respectively.
The contour slip crystal resonator of the present invention has the Y plate as the axis.
It is formed from a plate rotated by a rotation angle of θ up to 37° with the shaft as the rotation axis. Here, the new axes after the rotation of the y-axis and the Z-axis are defined as the y'-axis and the Z'-axis. The support part formed integrally with the vibrating part is provided in the Z-axis direction. The reason for this is that both ends of the support part are called mount parts and are fixed to a ceramic pedestal. At this time, the linear expansion coefficient of ceramics is 6 to 7.
X I O-'/''C, which is relatively small.

On the other hand, the linear expansion coefficient of crystal in the X-axis and Z-axis directions is 1374
I O-'/'C17,48X 10-'/"C and Z
The coefficient of linear expansion in the axial direction is closer to that of ceramics.

Also, even if the θ cape is rotated by 7 degrees, the coefficient of linear expansion in the 2'-axis direction is 9.75X10-'/"C and 13.74X in the X-axis direction.
Since it is smaller than IO-'/''C, it is better to provide a support part in the Z'-axis direction than to provide it in the X-axis direction.Also, even if it is mounted at both ends, the influence of temperature changes is small, and the loss resistance R1 Furthermore, as is clear from Fig. 3, the displacement is largest at the diagonal ends of the vibrating section 2. Therefore, by providing weights at both ends, the efficiency can be improved. This can be done with a well-tuned laser.

[Effect]

As described above, the present invention proposes a contour slip quartz crystal resonator formed by an etching method, which consists of a vibrating part and a supporting part, and thereby achieves a high Q with a small size, excellent shock resistance, and low loss resistance. It is possible to obtain a contour-slip quartz crystal with a value of . At the same time, by analyzing the vibration mode of the support part, a contour slip crystal resonator with small vibration leakage can be obtained. Further, by providing a weight at the diagonal end of the vibrating section, the frequency can be adjusted efficiently.

〔Example〕

Next, the results obtained with the present invention will be specifically described. 1st
The figure is a plan view showing an embodiment of the contour slip quartz crystal resonator of the present invention. The resonator 1 is composed of a vibrating section 2 and a support section 3, which are integrally formed by an etching method. The support part 3 is provided with a bent part 4, the width of which is W, and the length of which is L.
Then, W is set to be smaller than 067L. The reason for this is that the vibrating section 2 can vibrate freely without suppressing its vibration. Furthermore, in order to reduce vibration leakage, the end of the bent part 4 is connected to a connecting part 5, and is fixed to a pedestal or the like by a mount part 6. At this time, as mentioned above, since the support part is arranged in the Z'-axis direction, the difference in linear expansion coefficient between the crystal oscillator and the ceramic pedestal is not very large, so the crystal oscillator is affected by temperature changes. Negative effects can be eliminated. Further, since the weights for frequency adjustment are provided at the diagonal ends, the frequency value can be adjusted efficiently. FIG. 2 shows another embodiment of the present invention, in which weights are provided at both diagonal ends of the vibrating section. Since weights are provided at the four corners, the range of frequency adjustment can be made larger than when using three corners.

[Effects of the Invention 1 As described above, the present invention has the following remarkable effects by proposing a contour slip crystal resonator in which the vibrating part and the supporting part are integrally formed by an etching method.

(2) Since the support portion is provided in the Z'-axis direction, there is no change in R1 due to temperature changes even if the crystal resonator is fixed on top of ceramics.

-By devising and improving the shape and dimensions of the support part, vibration can be made free, resulting in lower loss resistance.

■The vibrating part and supporting part are integrally molded using the etching method, allowing for miniaturization.

- Since weights are provided at both ends of the vibrating section in the diagonal direction, the frequency can be adjusted efficiently and the cost can be reduced.

■Since the vibration part and support part are integrally molded, it has excellent impact resistance.

■Since the connection part of the support part has a mass effect, vibration leakage is reduced.

[Brief explanation of the drawing]

FIG. 1 is a plan view of an embodiment of the contour slip quartz crystal resonator shape and weight of the present invention. FIG. 2 is a plan view of another embodiment of the weight of the contour slip quartz crystal resonator of the present invention. FIG. 3 is a modeled plan view for explaining the principle of the contour slip crystal resonator of the present invention.・・Vibrator・・Vibration part・・Support part・・Bending part・・Connection part・・Mount part・・Weight・・Width・・Length・・Electrical axis・・Mechanical axis・・Optical axis・・Width zo・Length 5'.・More than thickness

Claims (1)

[Claims] In a contour slip quartz crystal resonator in which a vibrating part and a supporting part are integrally formed by an etching method, weights are disposed at at least two corners of the diagonal ends of the resonator, and,
A contour slip crystal resonator, characterized in that the support portion of the resonator is provided in the Z'-axis direction.