JPS5936972A - 静電誘導トランジスタの製造方法 - Google Patents

静電誘導トランジスタの製造方法

Info

Publication number
JPS5936972A
JPS5936972A JP57148707A JP14870782A JPS5936972A JP S5936972 A JPS5936972 A JP S5936972A JP 57148707 A JP57148707 A JP 57148707A JP 14870782 A JP14870782 A JP 14870782A JP S5936972 A JPS5936972 A JP S5936972A
Authority
JP
Japan
Prior art keywords
gate
chip
drain
region
epitaxially grown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57148707A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6249752B2 (enrdf_load_stackoverflow
Inventor
Mitsutoshi Hibino
日比野　光利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57148707A priority Critical patent/JPS5936972A/ja
Publication of JPS5936972A publication Critical patent/JPS5936972A/ja
Publication of JPS6249752B2 publication Critical patent/JPS6249752B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Junction Field-Effect Transistors (AREA)
JP57148707A 1982-08-25 1982-08-25 静電誘導トランジスタの製造方法 Granted JPS5936972A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57148707A JPS5936972A (ja) 1982-08-25 1982-08-25 静電誘導トランジスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57148707A JPS5936972A (ja) 1982-08-25 1982-08-25 静電誘導トランジスタの製造方法

Publications (2)

Publication Number Publication Date
JPS5936972A true JPS5936972A (ja) 1984-02-29
JPS6249752B2 JPS6249752B2 (enrdf_load_stackoverflow) 1987-10-21

Family

ID=15458794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57148707A Granted JPS5936972A (ja) 1982-08-25 1982-08-25 静電誘導トランジスタの製造方法

Country Status (1)

Country Link
JP (1) JPS5936972A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6249752B2 (enrdf_load_stackoverflow) 1987-10-21

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