JPS5936972A - 静電誘導トランジスタの製造方法 - Google Patents
静電誘導トランジスタの製造方法Info
- Publication number
- JPS5936972A JPS5936972A JP57148707A JP14870782A JPS5936972A JP S5936972 A JPS5936972 A JP S5936972A JP 57148707 A JP57148707 A JP 57148707A JP 14870782 A JP14870782 A JP 14870782A JP S5936972 A JPS5936972 A JP S5936972A
- Authority
- JP
- Japan
- Prior art keywords
- gate
- chip
- region
- drain
- epitaxially grown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57148707A JPS5936972A (ja) | 1982-08-25 | 1982-08-25 | 静電誘導トランジスタの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57148707A JPS5936972A (ja) | 1982-08-25 | 1982-08-25 | 静電誘導トランジスタの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5936972A true JPS5936972A (ja) | 1984-02-29 |
| JPS6249752B2 JPS6249752B2 (enrdf_load_stackoverflow) | 1987-10-21 |
Family
ID=15458794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57148707A Granted JPS5936972A (ja) | 1982-08-25 | 1982-08-25 | 静電誘導トランジスタの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5936972A (enrdf_load_stackoverflow) |
-
1982
- 1982-08-25 JP JP57148707A patent/JPS5936972A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6249752B2 (enrdf_load_stackoverflow) | 1987-10-21 |
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