JPS5936326A - Vertically magnetized recording medium and its production - Google Patents

Abstract

PURPOSE:To enable easily a vertically magnetized recording, by elevating gradually the temp. of a nonmagnetic substrate, sputtering a Co-Cr alloy, and decreasing a coercive force in the direction perpendicular to a film surface from the top to the bottom continuously or discontinuously. CONSTITUTION:A vertically magnetized film of a Co-Cr alloy is formed by sputtering while elevating gradually the temp. thereof from room temp. to 100- 180 deg.C. By this method, a coercive force is decreased continuously or discontinuously in the direction perpendicular to the substrate from the surface to the bottom. Thus, the characteristics such as recording at a low electric current and erasion of previous records are improved.

Description

DETAILED DESCRIPTION OF THE INVENTION (1) Technical Field The present invention relates to a perpendicular magnetic recording medium, and particularly to a perpendicular magnetic recording medium that facilitates writing by a magnetic head by controlling the coercive force of a film.

(2) Background of the technology If the coercive force of a perpendicularly magnetized recording medium is high, the output will be large if sufficient writing is performed, but for this purpose, the write current must be increased.

(3) Prior art and problems Conventional perpendicular LFI magnetization recording media have a high coercive force and 1. The sharpening force Vi is constant in the vertical direction of the crotch 17j. f[
1. The m field from the magnetic head weakens as it goes downward in the perpendicular direction from the film surface. Therefore, in the F section of the C film,
There is a drawback that the KfM ratio is not sufficiently high compared to the surface or upper part of the film.

(4) Purpose of the invention The object of the present invention is to eliminate the above-mentioned drawbacks.

(5) Structure of the Invention The above object of the present invention is to provide a CoCr-based perpendicular magnetization recording medium having magnetic anisotropy perpendicular to the film surface, in which the coercive force perpendicular to the film surface is directed perpendicularly from the film surface. Co is characterized by decreasing continuously or discontinuously downward.
The above object of the present invention is to provide a method for producing a CoCr-based perpendicularly magnetized recording medium having magnetic anisotropy perpendicular to the film plane, which ] CoC, which is characterized by sputtering CoCr-based alloy Thr while gradually increasing the temperature of the hot water.
It can be obtained continuously by a method for producing an r-based manually magnetized recording medium.

Co Cr-based directly magnetized films are usually formed using 7-back links to form VC films on substrates.
When keeping the gas pressure constant, the film growth process is affected by the temperature of the substrate, and this causes differences in the diameter of the pillars in the columnar structure of the CoCr film. ? is thought to occur and the coercive force changes.

In the ring head, the magnetic field generated in the magnetic head IIC is at the gap (W magnetic head structure), and at the throat, the VC increases rapidly as the distance from the tip of the ball nap increases by 1'L.
Decrease. Therefore, if the magnetic recording medium has a droplet ζ coercive force distribution in the profile of the generated magnetic field, the EJ performance will be improved at low current, and the prior history erasing property will also be improved.

(6) As a model example, several °rlumite boards were used, and each board [output 500 Wq-Ar Ef, force 1.5
A CoCr perpendicularly magnetized film with a thickness of 1 ttm is sputtered at -'Torr, and at this time the temperature of the substrate is 1jLf.
The coercive force of this perpendicular magnetization recording medium was varied from room temperature to 10°C to 180°C. The coercive force of this perpendicular magnetization recording medium was 9° compared to the temperature of the substrate during 2-back linking (see Figure 81).

Therefore, without raising the substrate υ w'c to 2, the CoCr yarn perpendicular magnetization film is formed by battering, and the 7C recording medium turns from the bottom surface to the F direction (the coercive force decreases). are doing.

(7) Effects of the Invention The present invention takes advantage of the fact that the coercive force in the direction perpendicular to the film surface of a perpendicularly magnetized film depends on the temperature of the substrate during film formation.

Coercive force perpendicular to the film surface 1[iL k 1:f:, t
As a result, writing with a magnetic head is possible. It was made easy.

[Brief explanation of drawings]

FIG. 1 is a graph showing the relationship between the coercive force of a CoCr perpendicularly magnetized film and the substrate humidity. Patent Applicant: Fujitsu Limited Special D1 Application Representative Patent Attorney: Akira Yoiki, Patent Attorney: Kazuyuki Nishidate, Patent Attorney: 1) Yukio, Male Patent Attorney, Akira Yama, 1) Figure 1: Substrate Temperature (C)

Claims (1)

[Claims] 1. In a CoCr-based perpendicular magnetization recording medium having magnetic anisotropy perpendicular to the film surface, the coercive force perpendicular to the film surface is continuously or continuously directed downward from the film surface in the duty direction. A CoCr-based perpendicular magnetization recording medium characterized by a discontinuous decrease in I7. 2. A method for manufacturing a CoCr-based perpendicular magnetization recording medium having magnetic anisotropy perpendicular to the film surface fa: temperature of the substrate? While gradually increasing the amount of CoCr alloy? A method for producing a CoCr-based perpendicular magnetization recording medium, characterized by sputtering.