JPS5935089A - ３−５族化合物半導体単結晶の直径制御方法 - Google Patents

３−５族化合物半導体単結晶の直径制御方法

Info

Publication number
JPS5935089A
JPS5935089A JP14332382A JP14332382A JPS5935089A JP S5935089 A JPS5935089 A JP S5935089A JP 14332382 A JP14332382 A JP 14332382A JP 14332382 A JP14332382 A JP 14332382A JP S5935089 A JPS5935089 A JP S5935089A
Authority
JP
Japan
Prior art keywords
diameter
single crystal
crystal
signal
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14332382A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0379319B2 (enrdf_load_stackoverflow
Inventor
Shoichi Washitsuka
鷲塚　章一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14332382A priority Critical patent/JPS5935089A/ja
Publication of JPS5935089A publication Critical patent/JPS5935089A/ja
Publication of JPH0379319B2 publication Critical patent/JPH0379319B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14332382A 1982-08-20 1982-08-20 ３−５族化合物半導体単結晶の直径制御方法 Granted JPS5935089A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14332382A JPS5935089A (ja) 1982-08-20 1982-08-20 ３−５族化合物半導体単結晶の直径制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14332382A JPS5935089A (ja) 1982-08-20 1982-08-20 ３−５族化合物半導体単結晶の直径制御方法

Publications (2)

Publication Number Publication Date
JPS5935089A true JPS5935089A (ja) 1984-02-25
JPH0379319B2 JPH0379319B2 (enrdf_load_stackoverflow) 1991-12-18

Family

ID=15336110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14332382A Granted JPS5935089A (ja) 1982-08-20 1982-08-20 ３−５族化合物半導体単結晶の直径制御方法

Country Status (1)

Country Link
JP (1) JPS5935089A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184796A (ja) * 1983-04-04 1984-10-20 Agency Of Ind Science & Technol ３−５族化合物半導体単結晶の製造方法
JPS62159356A (ja) * 1986-01-08 1987-07-15 Victor Co Of Japan Ltd 光学的情報信号再生装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184796A (ja) * 1983-04-04 1984-10-20 Agency Of Ind Science & Technol ３−５族化合物半導体単結晶の製造方法
JPS62159356A (ja) * 1986-01-08 1987-07-15 Victor Co Of Japan Ltd 光学的情報信号再生装置

Also Published As

Publication number Publication date
JPH0379319B2 (enrdf_load_stackoverflow) 1991-12-18

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