JPS593371A - 半導体装置の試験装置 - Google Patents

半導体装置の試験装置

Info

Publication number
JPS593371A
JPS593371A JP57113201A JP11320182A JPS593371A JP S593371 A JPS593371 A JP S593371A JP 57113201 A JP57113201 A JP 57113201A JP 11320182 A JP11320182 A JP 11320182A JP S593371 A JPS593371 A JP S593371A
Authority
JP
Japan
Prior art keywords
test
tests
pieces
tested
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57113201A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429988B2 (enrdf_load_stackoverflow
Inventor
Yasushi Matsukawa
靖 松川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57113201A priority Critical patent/JPS593371A/ja
Publication of JPS593371A publication Critical patent/JPS593371A/ja
Publication of JPH0429988B2 publication Critical patent/JPH0429988B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57113201A 1982-06-30 1982-06-30 半導体装置の試験装置 Granted JPS593371A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57113201A JPS593371A (ja) 1982-06-30 1982-06-30 半導体装置の試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57113201A JPS593371A (ja) 1982-06-30 1982-06-30 半導体装置の試験装置

Publications (2)

Publication Number Publication Date
JPS593371A true JPS593371A (ja) 1984-01-10
JPH0429988B2 JPH0429988B2 (enrdf_load_stackoverflow) 1992-05-20

Family

ID=14606111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57113201A Granted JPS593371A (ja) 1982-06-30 1982-06-30 半導体装置の試験装置

Country Status (1)

Country Link
JP (1) JPS593371A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59228729A (ja) * 1983-06-09 1984-12-22 Toshiba Corp 半導体測定装置
JPH01197674A (ja) * 1988-02-03 1989-08-09 Mitsubishi Electric Corp 物品検査方法
JPH0252446A (ja) * 1988-08-17 1990-02-22 Nec Kyushu Ltd 集積回路の試験装置
JPH0737959A (ja) * 1993-07-22 1995-02-07 Nec Corp ウエハの検査方法
WO1998033213A1 (fr) * 1997-01-29 1998-07-30 Hitachi, Ltd. Procede de fabrication d'un dispositif semi-conducteur
JP2000515662A (ja) * 1996-08-07 2000-11-21 マイクロン、テクノロジー、インコーポレーテッド 欠陥を有する集積回路のテスト時間と修復時間とを最適化するためのシステム

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59228729A (ja) * 1983-06-09 1984-12-22 Toshiba Corp 半導体測定装置
JPH01197674A (ja) * 1988-02-03 1989-08-09 Mitsubishi Electric Corp 物品検査方法
JPH0252446A (ja) * 1988-08-17 1990-02-22 Nec Kyushu Ltd 集積回路の試験装置
JPH0737959A (ja) * 1993-07-22 1995-02-07 Nec Corp ウエハの検査方法
JP2000515662A (ja) * 1996-08-07 2000-11-21 マイクロン、テクノロジー、インコーポレーテッド 欠陥を有する集積回路のテスト時間と修復時間とを最適化するためのシステム
WO1998033213A1 (fr) * 1997-01-29 1998-07-30 Hitachi, Ltd. Procede de fabrication d'un dispositif semi-conducteur

Also Published As

Publication number Publication date
JPH0429988B2 (enrdf_load_stackoverflow) 1992-05-20

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