JPS5929333A - 電子顕微鏡用視野移動装置 - Google Patents

電子顕微鏡用視野移動装置

Info

Publication number
JPS5929333A
JPS5929333A JP57139324A JP13932482A JPS5929333A JP S5929333 A JPS5929333 A JP S5929333A JP 57139324 A JP57139324 A JP 57139324A JP 13932482 A JP13932482 A JP 13932482A JP S5929333 A JPS5929333 A JP S5929333A
Authority
JP
Japan
Prior art keywords
field
movement
view
signal
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57139324A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234421B2 (enrdf_load_stackoverflow
Inventor
Kenji Obara
健二 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57139324A priority Critical patent/JPS5929333A/ja
Publication of JPS5929333A publication Critical patent/JPS5929333A/ja
Publication of JPH0234421B2 publication Critical patent/JPH0234421B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57139324A 1982-08-11 1982-08-11 電子顕微鏡用視野移動装置 Granted JPS5929333A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57139324A JPS5929333A (ja) 1982-08-11 1982-08-11 電子顕微鏡用視野移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57139324A JPS5929333A (ja) 1982-08-11 1982-08-11 電子顕微鏡用視野移動装置

Publications (2)

Publication Number Publication Date
JPS5929333A true JPS5929333A (ja) 1984-02-16
JPH0234421B2 JPH0234421B2 (enrdf_load_stackoverflow) 1990-08-03

Family

ID=15242654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57139324A Granted JPS5929333A (ja) 1982-08-11 1982-08-11 電子顕微鏡用視野移動装置

Country Status (1)

Country Link
JP (1) JPS5929333A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0690474A1 (en) * 1994-06-29 1996-01-03 Hitachi, Ltd. Bi-axial-tilting specimen fine motion device and method of correcting image shifting
JP2002216695A (ja) * 2001-01-15 2002-08-02 Topcon Denshi Beam Service:Kk 分析透過型電子顕微鏡

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478075A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Sample image display device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478075A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Sample image display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0690474A1 (en) * 1994-06-29 1996-01-03 Hitachi, Ltd. Bi-axial-tilting specimen fine motion device and method of correcting image shifting
JP2002216695A (ja) * 2001-01-15 2002-08-02 Topcon Denshi Beam Service:Kk 分析透過型電子顕微鏡

Also Published As

Publication number Publication date
JPH0234421B2 (enrdf_load_stackoverflow) 1990-08-03

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