JPS5928347A - 半導体装置のスクリ−ニング装置 - Google Patents
半導体装置のスクリ−ニング装置Info
- Publication number
- JPS5928347A JPS5928347A JP57138312A JP13831282A JPS5928347A JP S5928347 A JPS5928347 A JP S5928347A JP 57138312 A JP57138312 A JP 57138312A JP 13831282 A JP13831282 A JP 13831282A JP S5928347 A JPS5928347 A JP S5928347A
- Authority
- JP
- Japan
- Prior art keywords
- bath
- temperature
- screening
- timer
- intake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012216 screening Methods 0.000 title claims abstract description 14
- 239000004065 semiconductor Substances 0.000 title claims description 5
- 238000001816 cooling Methods 0.000 claims abstract description 3
- 238000009434 installation Methods 0.000 claims 1
- 238000003756 stirring Methods 0.000 abstract description 5
- 238000002955 isolation Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000006378 damage Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2642—Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57138312A JPS5928347A (ja) | 1982-08-09 | 1982-08-09 | 半導体装置のスクリ−ニング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57138312A JPS5928347A (ja) | 1982-08-09 | 1982-08-09 | 半導体装置のスクリ−ニング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5928347A true JPS5928347A (ja) | 1984-02-15 |
| JPS637628B2 JPS637628B2 (enrdf_load_html_response) | 1988-02-17 |
Family
ID=15218941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57138312A Granted JPS5928347A (ja) | 1982-08-09 | 1982-08-09 | 半導体装置のスクリ−ニング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5928347A (enrdf_load_html_response) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6157875U (enrdf_load_html_response) * | 1984-09-20 | 1986-04-18 | ||
| JPS6341782U (enrdf_load_html_response) * | 1986-09-03 | 1988-03-18 | ||
| CN110824339A (zh) * | 2019-10-22 | 2020-02-21 | 苏州盛科科技有限公司 | 一种交换芯片老化筛选测试的恒温控制装置及方法 |
-
1982
- 1982-08-09 JP JP57138312A patent/JPS5928347A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6157875U (enrdf_load_html_response) * | 1984-09-20 | 1986-04-18 | ||
| JPS6341782U (enrdf_load_html_response) * | 1986-09-03 | 1988-03-18 | ||
| CN110824339A (zh) * | 2019-10-22 | 2020-02-21 | 苏州盛科科技有限公司 | 一种交换芯片老化筛选测试的恒温控制装置及方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS637628B2 (enrdf_load_html_response) | 1988-02-17 |
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