JPS637628B2 - - Google Patents

Info

Publication number
JPS637628B2
JPS637628B2 JP57138312A JP13831282A JPS637628B2 JP S637628 B2 JPS637628 B2 JP S637628B2 JP 57138312 A JP57138312 A JP 57138312A JP 13831282 A JP13831282 A JP 13831282A JP S637628 B2 JPS637628 B2 JP S637628B2
Authority
JP
Japan
Prior art keywords
tank
temperature
screening
chamber
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57138312A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5928347A (ja
Inventor
Yasuo Eguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57138312A priority Critical patent/JPS5928347A/ja
Publication of JPS5928347A publication Critical patent/JPS5928347A/ja
Publication of JPS637628B2 publication Critical patent/JPS637628B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2642—Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57138312A 1982-08-09 1982-08-09 半導体装置のスクリ−ニング装置 Granted JPS5928347A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57138312A JPS5928347A (ja) 1982-08-09 1982-08-09 半導体装置のスクリ−ニング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57138312A JPS5928347A (ja) 1982-08-09 1982-08-09 半導体装置のスクリ−ニング装置

Publications (2)

Publication Number Publication Date
JPS5928347A JPS5928347A (ja) 1984-02-15
JPS637628B2 true JPS637628B2 (enrdf_load_html_response) 1988-02-17

Family

ID=15218941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57138312A Granted JPS5928347A (ja) 1982-08-09 1982-08-09 半導体装置のスクリ−ニング装置

Country Status (1)

Country Link
JP (1) JPS5928347A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0127106Y2 (enrdf_load_html_response) * 1984-09-20 1989-08-14
JPS6341782U (enrdf_load_html_response) * 1986-09-03 1988-03-18
CN110824339A (zh) * 2019-10-22 2020-02-21 苏州盛科科技有限公司 一种交换芯片老化筛选测试的恒温控制装置及方法

Also Published As

Publication number Publication date
JPS5928347A (ja) 1984-02-15

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