JPS5928034Y2 - マグネトロンスパッタ装置 - Google Patents

マグネトロンスパッタ装置

Info

Publication number
JPS5928034Y2
JPS5928034Y2 JP753780U JP753780U JPS5928034Y2 JP S5928034 Y2 JPS5928034 Y2 JP S5928034Y2 JP 753780 U JP753780 U JP 753780U JP 753780 U JP753780 U JP 753780U JP S5928034 Y2 JPS5928034 Y2 JP S5928034Y2
Authority
JP
Japan
Prior art keywords
target
magnet
magnetic field
parallel
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP753780U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56111167U (index.php
Inventor
高正 坂井
猛 岡本
盛広 新見
昭一 皆川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Faurecia Clarion Electronics Co Ltd
Original Assignee
Clarion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clarion Co Ltd filed Critical Clarion Co Ltd
Priority to JP753780U priority Critical patent/JPS5928034Y2/ja
Publication of JPS56111167U publication Critical patent/JPS56111167U/ja
Application granted granted Critical
Publication of JPS5928034Y2 publication Critical patent/JPS5928034Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP753780U 1980-01-26 1980-01-26 マグネトロンスパッタ装置 Expired JPS5928034Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP753780U JPS5928034Y2 (ja) 1980-01-26 1980-01-26 マグネトロンスパッタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP753780U JPS5928034Y2 (ja) 1980-01-26 1980-01-26 マグネトロンスパッタ装置

Publications (2)

Publication Number Publication Date
JPS56111167U JPS56111167U (index.php) 1981-08-27
JPS5928034Y2 true JPS5928034Y2 (ja) 1984-08-14

Family

ID=29604185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP753780U Expired JPS5928034Y2 (ja) 1980-01-26 1980-01-26 マグネトロンスパッタ装置

Country Status (1)

Country Link
JP (1) JPS5928034Y2 (index.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58136777A (ja) * 1982-02-09 1983-08-13 Hitachi Ltd スパツタ薄膜形成装置

Also Published As

Publication number Publication date
JPS56111167U (index.php) 1981-08-27

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