JPS5925250A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5925250A
JPS5925250A JP58071218A JP7121883A JPS5925250A JP S5925250 A JPS5925250 A JP S5925250A JP 58071218 A JP58071218 A JP 58071218A JP 7121883 A JP7121883 A JP 7121883A JP S5925250 A JPS5925250 A JP S5925250A
Authority
JP
Japan
Prior art keywords
silicon
film
semiconductor
silicon oxide
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58071218A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6120141B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Shiba
宏 柴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58071218A priority Critical patent/JPS5925250A/ja
Publication of JPS5925250A publication Critical patent/JPS5925250A/ja
Publication of JPS6120141B2 publication Critical patent/JPS6120141B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP58071218A 1983-04-22 1983-04-22 半導体装置の製造方法 Granted JPS5925250A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58071218A JPS5925250A (ja) 1983-04-22 1983-04-22 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58071218A JPS5925250A (ja) 1983-04-22 1983-04-22 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP49114408A Division JPS5915495B2 (ja) 1974-10-04 1974-10-04 半導体装置

Publications (2)

Publication Number Publication Date
JPS5925250A true JPS5925250A (ja) 1984-02-09
JPS6120141B2 JPS6120141B2 (enrdf_load_stackoverflow) 1986-05-21

Family

ID=13454312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58071218A Granted JPS5925250A (ja) 1983-04-22 1983-04-22 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5925250A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142867A (ja) * 1986-12-05 1988-06-15 Nec Corp Ｍｉｓトランジスタ及びその製造方法
JPH02138349U (enrdf_load_stackoverflow) * 1989-04-18 1990-11-19

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03129044U (enrdf_load_stackoverflow) * 1990-04-11 1991-12-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142867A (ja) * 1986-12-05 1988-06-15 Nec Corp Ｍｉｓトランジスタ及びその製造方法
JPH02138349U (enrdf_load_stackoverflow) * 1989-04-18 1990-11-19

Also Published As

Publication number Publication date
JPS6120141B2 (enrdf_load_stackoverflow) 1986-05-21

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