JPS5924819A - 干渉測定装置の光軸合せ機構 - Google Patents

干渉測定装置の光軸合せ機構

Info

Publication number
JPS5924819A
JPS5924819A JP57134650A JP13465082A JPS5924819A JP S5924819 A JPS5924819 A JP S5924819A JP 57134650 A JP57134650 A JP 57134650A JP 13465082 A JP13465082 A JP 13465082A JP S5924819 A JPS5924819 A JP S5924819A
Authority
JP
Japan
Prior art keywords
optical axis
light
receiving element
sample surface
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57134650A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6313121B2 (enrdf_load_stackoverflow
Inventor
Junichi Kitabayashi
淳一 北林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP57134650A priority Critical patent/JPS5924819A/ja
Publication of JPS5924819A publication Critical patent/JPS5924819A/ja
Publication of JPS6313121B2 publication Critical patent/JPS6313121B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP57134650A 1982-08-03 1982-08-03 干渉測定装置の光軸合せ機構 Granted JPS5924819A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57134650A JPS5924819A (ja) 1982-08-03 1982-08-03 干渉測定装置の光軸合せ機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57134650A JPS5924819A (ja) 1982-08-03 1982-08-03 干渉測定装置の光軸合せ機構

Publications (2)

Publication Number Publication Date
JPS5924819A true JPS5924819A (ja) 1984-02-08
JPS6313121B2 JPS6313121B2 (enrdf_load_stackoverflow) 1988-03-24

Family

ID=15133325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57134650A Granted JPS5924819A (ja) 1982-08-03 1982-08-03 干渉測定装置の光軸合せ機構

Country Status (1)

Country Link
JP (1) JPS5924819A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62129711A (ja) * 1985-11-29 1987-06-12 Toshiba Corp 物体の形状誤差を測定する方法およびその装置
JPS63252207A (ja) * 1987-04-08 1988-10-19 Olympus Optical Co Ltd ステ−ジ
JPS6416904A (en) * 1987-07-10 1989-01-20 Fujitsu Ltd Inspection instrument for surface waviness
JPH0238807A (ja) * 1988-07-27 1990-02-08 Tokyo Seimitsu Co Ltd 平面度自動測定装置
JP2004354283A (ja) * 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0661935U (ja) * 1991-10-16 1994-09-02 クラレケミカル株式会社 水虫治療剤

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62129711A (ja) * 1985-11-29 1987-06-12 Toshiba Corp 物体の形状誤差を測定する方法およびその装置
JPS63252207A (ja) * 1987-04-08 1988-10-19 Olympus Optical Co Ltd ステ−ジ
JPS6416904A (en) * 1987-07-10 1989-01-20 Fujitsu Ltd Inspection instrument for surface waviness
JPH0238807A (ja) * 1988-07-27 1990-02-08 Tokyo Seimitsu Co Ltd 平面度自動測定装置
JP2004354283A (ja) * 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。

Also Published As

Publication number Publication date
JPS6313121B2 (enrdf_load_stackoverflow) 1988-03-24

Similar Documents

Publication Publication Date Title
US5459564A (en) Apparatus and method for inspecting end faces of optical fibers and optical fiber connectors
US5307368A (en) Laser apparatus for simultaneously generating mutually perpendicular planes
JPH01245104A (ja) 顕微鏡的構造を測定する装置を有する顕微鏡
EP0505623B1 (en) Off-axis mirror alignment
US5289254A (en) Process and apparatus for testing optical components or systems
US7145659B2 (en) Light interference measurement method using computer-generated hologram, and interferometer using this method
JPS5924819A (ja) 干渉測定装置の光軸合せ機構
US4653911A (en) Autocollimation method and apparatus
CN101526736A (zh) 激光直接绘制装置
US4385325A (en) Raster input scanner comprising two CCD arrays
JP3365884B2 (ja) 走査型光学顕微鏡
JPH063219A (ja) 干渉計装置
JPH11211426A (ja) 面形状測定装置
JPH0613999B2 (ja) 光学部品の偏心測定装置
JP2001174217A (ja) 光学検査装置のアライメント方法およびその機構
RU2018792C1 (ru) Способ юстировки интерферометра фабри - перо и устройство для его осуществления
CN110926367B (zh) 长程光学表面面形检测装置及检测方法
JP3341779B2 (ja) 干渉計におけるアライメント装置
JP3003453B2 (ja) 光素子モジュールの組立装置
JP3118989B2 (ja) 干渉計装置
JPH0323883B2 (enrdf_load_stackoverflow)
KR100544953B1 (ko) 턴테이블의 와블측정방법
JPH10281720A (ja) ステージ装置およびそれを用いた波面収差測定装置
JPH0713058A (ja) 対物レンズの光軸調整方法
JP2001013004A (ja) 走査光学系の光スポット径測定装置