JPS5924819A - 干渉測定装置の光軸合せ機構 - Google Patents

干渉測定装置の光軸合せ機構

Info

Publication number
JPS5924819A
JPS5924819A JP57134650A JP13465082A JPS5924819A JP S5924819 A JPS5924819 A JP S5924819A JP 57134650 A JP57134650 A JP 57134650A JP 13465082 A JP13465082 A JP 13465082A JP S5924819 A JPS5924819 A JP S5924819A
Authority
JP
Japan
Prior art keywords
optical axis
light
receiving element
sample surface
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57134650A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6313121B2 (enrdf_load_stackoverflow
Inventor
Junichi Kitabayashi
淳一 北林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP57134650A priority Critical patent/JPS5924819A/ja
Publication of JPS5924819A publication Critical patent/JPS5924819A/ja
Publication of JPS6313121B2 publication Critical patent/JPS6313121B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP57134650A 1982-08-03 1982-08-03 干渉測定装置の光軸合せ機構 Granted JPS5924819A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57134650A JPS5924819A (ja) 1982-08-03 1982-08-03 干渉測定装置の光軸合せ機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57134650A JPS5924819A (ja) 1982-08-03 1982-08-03 干渉測定装置の光軸合せ機構

Publications (2)

Publication Number Publication Date
JPS5924819A true JPS5924819A (ja) 1984-02-08
JPS6313121B2 JPS6313121B2 (enrdf_load_stackoverflow) 1988-03-24

Family

ID=15133325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57134650A Granted JPS5924819A (ja) 1982-08-03 1982-08-03 干渉測定装置の光軸合せ機構

Country Status (1)

Country Link
JP (1) JPS5924819A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62129711A (ja) * 1985-11-29 1987-06-12 Toshiba Corp 物体の形状誤差を測定する方法およびその装置
JPS63252207A (ja) * 1987-04-08 1988-10-19 Olympus Optical Co Ltd ステ−ジ
JPS6416904A (en) * 1987-07-10 1989-01-20 Fujitsu Ltd Inspection instrument for surface waviness
JPH0238807A (ja) * 1988-07-27 1990-02-08 Tokyo Seimitsu Co Ltd 平面度自動測定装置
JP2004354283A (ja) * 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0661935U (ja) * 1991-10-16 1994-09-02 クラレケミカル株式会社 水虫治療剤

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62129711A (ja) * 1985-11-29 1987-06-12 Toshiba Corp 物体の形状誤差を測定する方法およびその装置
JPS63252207A (ja) * 1987-04-08 1988-10-19 Olympus Optical Co Ltd ステ−ジ
JPS6416904A (en) * 1987-07-10 1989-01-20 Fujitsu Ltd Inspection instrument for surface waviness
JPH0238807A (ja) * 1988-07-27 1990-02-08 Tokyo Seimitsu Co Ltd 平面度自動測定装置
JP2004354283A (ja) * 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。

Also Published As

Publication number Publication date
JPS6313121B2 (enrdf_load_stackoverflow) 1988-03-24

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