JPS5924132U - マイクロ波プラズマ処理装置 - Google Patents

マイクロ波プラズマ処理装置

Info

Publication number
JPS5924132U
JPS5924132U JP12072982U JP12072982U JPS5924132U JP S5924132 U JPS5924132 U JP S5924132U JP 12072982 U JP12072982 U JP 12072982U JP 12072982 U JP12072982 U JP 12072982U JP S5924132 U JPS5924132 U JP S5924132U
Authority
JP
Japan
Prior art keywords
plasma generation
plasma processing
microwave
plasma
microwave plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12072982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236240Y2 (enExample
Inventor
篠塚　利貞
恒男 村中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP12072982U priority Critical patent/JPS5924132U/ja
Publication of JPS5924132U publication Critical patent/JPS5924132U/ja
Application granted granted Critical
Publication of JPS6236240Y2 publication Critical patent/JPS6236240Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP12072982U 1982-08-09 1982-08-09 マイクロ波プラズマ処理装置 Granted JPS5924132U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12072982U JPS5924132U (ja) 1982-08-09 1982-08-09 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12072982U JPS5924132U (ja) 1982-08-09 1982-08-09 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS5924132U true JPS5924132U (ja) 1984-02-15
JPS6236240Y2 JPS6236240Y2 (enExample) 1987-09-14

Family

ID=30276581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12072982U Granted JPS5924132U (ja) 1982-08-09 1982-08-09 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS5924132U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59226027A (ja) * 1983-06-07 1984-12-19 Toyota Motor Corp プラズマ処理方法
JPH02151021A (ja) * 1988-12-02 1990-06-11 Agency Of Ind Science & Technol プラズマ加工堆積装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221332U (enExample) * 1975-08-01 1977-02-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221332U (enExample) * 1975-08-01 1977-02-15

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59226027A (ja) * 1983-06-07 1984-12-19 Toyota Motor Corp プラズマ処理方法
JPH02151021A (ja) * 1988-12-02 1990-06-11 Agency Of Ind Science & Technol プラズマ加工堆積装置

Also Published As

Publication number Publication date
JPS6236240Y2 (enExample) 1987-09-14

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