JPS5923416Y2 - 液処理装置 - Google Patents

液処理装置

Info

Publication number
JPS5923416Y2
JPS5923416Y2 JP1977055620U JP5562077U JPS5923416Y2 JP S5923416 Y2 JPS5923416 Y2 JP S5923416Y2 JP 1977055620 U JP1977055620 U JP 1977055620U JP 5562077 U JP5562077 U JP 5562077U JP S5923416 Y2 JPS5923416 Y2 JP S5923416Y2
Authority
JP
Japan
Prior art keywords
liquid
siphon
cleaning
tank
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977055620U
Other languages
English (en)
Japanese (ja)
Other versions
JPS53149566U (enExample
Inventor
照雄 香西
茂治 小原
臣吾 柳原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1977055620U priority Critical patent/JPS5923416Y2/ja
Publication of JPS53149566U publication Critical patent/JPS53149566U/ja
Application granted granted Critical
Publication of JPS5923416Y2 publication Critical patent/JPS5923416Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Jet Pumps And Other Pumps (AREA)
JP1977055620U 1977-04-28 1977-04-28 液処理装置 Expired JPS5923416Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977055620U JPS5923416Y2 (ja) 1977-04-28 1977-04-28 液処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977055620U JPS5923416Y2 (ja) 1977-04-28 1977-04-28 液処理装置

Publications (2)

Publication Number Publication Date
JPS53149566U JPS53149566U (enExample) 1978-11-25
JPS5923416Y2 true JPS5923416Y2 (ja) 1984-07-12

Family

ID=28951670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977055620U Expired JPS5923416Y2 (ja) 1977-04-28 1977-04-28 液処理装置

Country Status (1)

Country Link
JP (1) JPS5923416Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584453B2 (ja) * 1973-09-18 1983-01-26 日本電気株式会社 ハンドウタイウエハ− ノ エキシヨリソウチ

Also Published As

Publication number Publication date
JPS53149566U (enExample) 1978-11-25

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