JP6751421B2 - ウェーハ洗浄装置及びそれを用いたウェーハ洗浄装置のクリーニング方法 - Google Patents
ウェーハ洗浄装置及びそれを用いたウェーハ洗浄装置のクリーニング方法 Download PDFInfo
- Publication number
- JP6751421B2 JP6751421B2 JP2018090420A JP2018090420A JP6751421B2 JP 6751421 B2 JP6751421 B2 JP 6751421B2 JP 2018090420 A JP2018090420 A JP 2018090420A JP 2018090420 A JP2018090420 A JP 2018090420A JP 6751421 B2 JP6751421 B2 JP 6751421B2
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- Prior art keywords
- cleaning
- wafer
- pipe
- unit
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
200:排水管 300:排水バルブ
400:クリーニングユニット 410、410a:噴射管
411、411a:噴射穴 410b:噴射ノズル
420:供給管 430:ワイヤー
440:引き上げ手段 450:供給バルブ
500:制御部
Claims (8)
- 洗浄槽;
前記洗浄槽内部に昇下降可能に設置され、前記洗浄槽の内壁にクリーニング液を噴射す
るクリーニングユニット;及び
前記洗浄槽内部の洗浄液が排出中であるか排出が完了すると、前記クリーニングユニッ
トを下降させて前記クリーニング液が噴射されるように制御する制御部を含み、
前記クリーニングユニットは
前記洗浄槽の内壁に隣接して配置される噴射管;
前記噴射管に前記クリーニング液を供給する供給管;及び
前記噴射管を昇下降させる昇下降部を含むウェーハ洗浄装置。 - 前記噴射管は、水平方向に沿って配置される複数の噴射穴を有する、請求項1に記載の
ウェーハ洗浄装置。 - 前記複数の噴射穴は、前記洗浄槽の内壁と向き合うように前記噴射管の外側に配置され
る、請求項2に記載のウェーハ洗浄装置。 - 前記複数の噴射穴は、前記噴射管の水平線を基準として一定の角度傾斜するように配置
される、請求項3に記載のウェーハ洗浄装置。 - 前記昇下降部は
前記噴射管と連結されるワイヤー;及び
前記ワイヤーの長さを調節する引き上げ手段を含む、請求項1に記載のウェーハ洗浄装
置 。 - 前記洗浄槽は、上部が開放された直六面体形状を有し、
前記噴射管は長方形状を有する、請求項3に記載のウェーハ洗浄装置。 - 前記ウェーハ洗浄装置は
前記洗浄槽の底面と連結される排水管;及び
前記排水管の開閉を調節する排水バルブをさらに含む、請求項6に記載のウェーハ洗浄
装置。 - 前記クリーニングユニットは
前記供給管と連結されてクリーニング液の供給を調節する供給バルブをさらに含む、請
求項7に記載のウェーハ洗浄装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2017-0104711 | 2017-08-18 | ||
KR1020170104711A KR101971152B1 (ko) | 2017-08-18 | 2017-08-18 | 웨이퍼 세정 장치 및 그를 이용한 웨이퍼 세정 장치의 클리닝 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019036709A JP2019036709A (ja) | 2019-03-07 |
JP6751421B2 true JP6751421B2 (ja) | 2020-09-02 |
Family
ID=65361292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018090420A Active JP6751421B2 (ja) | 2017-08-18 | 2018-05-09 | ウェーハ洗浄装置及びそれを用いたウェーハ洗浄装置のクリーニング方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11152228B2 (ja) |
JP (1) | JP6751421B2 (ja) |
KR (1) | KR101971152B1 (ja) |
CN (1) | CN109396102B (ja) |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US511569A (en) * | 1893-12-26 | Boiler for heating apparatus | ||
JPS61179742A (ja) | 1984-12-27 | 1986-08-12 | Koichiro Matsuo | シ−ト印刷機 |
JPS61179742U (ja) * | 1985-04-30 | 1986-11-10 | ||
JPS62281431A (ja) | 1986-05-30 | 1987-12-07 | Hitachi Electronics Eng Co Ltd | 超音波洗浄方法および装置 |
US5512106A (en) * | 1993-01-27 | 1996-04-30 | Sumitomo Heavy Industries, Ltd. | Surface cleaning with argon |
JPH0737850A (ja) | 1993-07-20 | 1995-02-07 | Mitsubishi Electric Corp | 洗浄装置 |
JP3386892B2 (ja) | 1994-08-08 | 2003-03-17 | 株式会社ダン科学 | 洗浄槽 |
JPH08195371A (ja) | 1995-01-12 | 1996-07-30 | Tokyo Electron Ltd | 洗浄装置及びその方法 |
JPH09290199A (ja) * | 1996-04-25 | 1997-11-11 | Dainippon Screen Mfg Co Ltd | カップ洗浄装置および回転式基板処理装置 |
US6199568B1 (en) * | 1997-10-20 | 2001-03-13 | Dainippon Screen Mfg. Co., Ltd. | Treating tank, and substrate treating apparatus having the treating tank |
TW434668B (en) * | 2000-01-27 | 2001-05-16 | Ind Tech Res Inst | Wafer rinse apparatus and rinse method of the same |
US6418945B1 (en) * | 2000-07-07 | 2002-07-16 | Semitool, Inc. | Dual cassette centrifugal processor |
JP2002075951A (ja) | 2000-08-31 | 2002-03-15 | Super Silicon Kenkyusho:Kk | 半導体ウエハ用洗浄装置 |
US6752897B2 (en) * | 2002-10-22 | 2004-06-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wet etch system with overflow particle removing feature |
KR100636035B1 (ko) * | 2003-11-08 | 2006-10-18 | 삼성전자주식회사 | 웨이퍼를 건조하기 위한 방법 및 장치, 그리고 웨이퍼 건조 장치를 포함하는 웨이퍼 처리 장치 |
JP2006351574A (ja) | 2005-06-13 | 2006-12-28 | Toppan Printing Co Ltd | 洗浄用治具及びその治具を用いた装置 |
TWI406330B (zh) * | 2007-09-26 | 2013-08-21 | Dainippon Screen Mfg | 基板處理裝置及基板處理方法 |
JP5116628B2 (ja) | 2008-10-20 | 2013-01-09 | ヴァリアス株式会社 | 被洗浄物の洗浄方法 |
JP6295023B2 (ja) | 2012-10-03 | 2018-03-14 | 株式会社荏原製作所 | 基板洗浄装置、基板洗浄方法、および研磨装置 |
KR20140084511A (ko) * | 2012-12-27 | 2014-07-07 | 조창현 | 캐리어 세정의 위한 노즐부 |
JP6308910B2 (ja) * | 2013-11-13 | 2018-04-11 | 東京エレクトロン株式会社 | 基板洗浄方法、基板洗浄システムおよび記憶媒体 |
TWM487519U (zh) | 2014-06-17 | 2014-10-01 | Full Power Idea Tech Ltd | 箱體清洗治具 |
US9601358B2 (en) * | 2014-08-15 | 2017-03-21 | SCREEN Holdings Co., Ltd. | Substrate treatment apparatus, and substrate treatment method |
JP6605394B2 (ja) * | 2016-05-17 | 2019-11-13 | 東京エレクトロン株式会社 | 基板液処理装置、タンク洗浄方法及び記憶媒体 |
-
2017
- 2017-08-18 KR KR1020170104711A patent/KR101971152B1/ko active IP Right Grant
-
2018
- 2018-05-08 US US15/974,415 patent/US11152228B2/en active Active
- 2018-05-09 JP JP2018090420A patent/JP6751421B2/ja active Active
- 2018-06-28 CN CN201810687730.1A patent/CN109396102B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN109396102A (zh) | 2019-03-01 |
KR101971152B1 (ko) | 2019-04-22 |
US20190057883A1 (en) | 2019-02-21 |
JP2019036709A (ja) | 2019-03-07 |
CN109396102B (zh) | 2022-02-18 |
KR20190019581A (ko) | 2019-02-27 |
US11152228B2 (en) | 2021-10-19 |
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