JPS59232932A - 光フアイバ用プリフオ−ムの製造方法 - Google Patents
光フアイバ用プリフオ−ムの製造方法Info
- Publication number
- JPS59232932A JPS59232932A JP10721683A JP10721683A JPS59232932A JP S59232932 A JPS59232932 A JP S59232932A JP 10721683 A JP10721683 A JP 10721683A JP 10721683 A JP10721683 A JP 10721683A JP S59232932 A JPS59232932 A JP S59232932A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- refractive index
- center
- ejected
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000463 material Substances 0.000 claims abstract description 14
- 239000007789 gas Substances 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 5
- 239000007858 starting material Substances 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims description 2
- 239000002737 fuel gas Substances 0.000 claims 1
- 238000009826 distribution Methods 0.000 abstract description 19
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 abstract description 12
- 239000004071 soot Substances 0.000 abstract description 8
- 239000002019 doping agent Substances 0.000 abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 3
- 239000006104 solid solution Substances 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract description 2
- 238000002485 combustion reaction Methods 0.000 abstract description 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 229910052682 stishovite Inorganic materials 0.000 abstract description 2
- 229910052905 tridymite Inorganic materials 0.000 abstract description 2
- 229910003910 SiCl4 Inorganic materials 0.000 abstract 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 2
- 229910006113 GeCl4 Inorganic materials 0.000 abstract 1
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 abstract 1
- 239000000835 fiber Substances 0.000 description 5
- 229910052909 inorganic silicate Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 101100336480 Drosophila melanogaster Gem2 gene Proteins 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000010437 gem Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910005267 GaCl3 Inorganic materials 0.000 description 1
- 229910003080 TiO4 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- UPWPDUACHOATKO-UHFFFAOYSA-K gallium trichloride Chemical compound Cl[Ga](Cl)Cl UPWPDUACHOATKO-UHFFFAOYSA-K 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
- C03B2207/26—Multiple ports for glass precursor
- C03B2207/28—Multiple ports for glass precursor for different glass precursors, reactants or modifiers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10721683A JPS59232932A (ja) | 1983-06-15 | 1983-06-15 | 光フアイバ用プリフオ−ムの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10721683A JPS59232932A (ja) | 1983-06-15 | 1983-06-15 | 光フアイバ用プリフオ−ムの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59232932A true JPS59232932A (ja) | 1984-12-27 |
| JPS6144821B2 JPS6144821B2 (enrdf_load_stackoverflow) | 1986-10-04 |
Family
ID=14453427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10721683A Granted JPS59232932A (ja) | 1983-06-15 | 1983-06-15 | 光フアイバ用プリフオ−ムの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59232932A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010173923A (ja) * | 2009-02-02 | 2010-08-12 | Sumitomo Electric Ind Ltd | 多孔質ガラス母材の製造方法 |
| WO2010098352A1 (ja) * | 2009-02-24 | 2010-09-02 | 旭硝子株式会社 | 多孔質石英ガラス体の製造方法およびｅｕｖリソグラフィ用光学部材 |
-
1983
- 1983-06-15 JP JP10721683A patent/JPS59232932A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010173923A (ja) * | 2009-02-02 | 2010-08-12 | Sumitomo Electric Ind Ltd | 多孔質ガラス母材の製造方法 |
| WO2010098352A1 (ja) * | 2009-02-24 | 2010-09-02 | 旭硝子株式会社 | 多孔質石英ガラス体の製造方法およびｅｕｖリソグラフィ用光学部材 |
| US8356494B2 (en) | 2009-02-24 | 2013-01-22 | Asahi Glass Company, Limited | Process for producing porous quartz glass object, and optical member for EUV lithography |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6144821B2 (enrdf_load_stackoverflow) | 1986-10-04 |
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