JPS59230035A - プラズマ処理方法 - Google Patents

プラズマ処理方法

Info

Publication number
JPS59230035A
JPS59230035A JP58104906A JP10490683A JPS59230035A JP S59230035 A JPS59230035 A JP S59230035A JP 58104906 A JP58104906 A JP 58104906A JP 10490683 A JP10490683 A JP 10490683A JP S59230035 A JPS59230035 A JP S59230035A
Authority
JP
Japan
Prior art keywords
plasma
processing
microwave
pressure
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58104906A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0254375B2 (cs
Inventor
Kenji Fukuda
賢治 福田
Takaoki Kaneko
金子　隆興
Yoshinobu Takahashi
芳信 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toyota Motor Corp
Original Assignee
Toshiba Corp
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toyota Motor Corp filed Critical Toshiba Corp
Priority to JP58104906A priority Critical patent/JPS59230035A/ja
Priority to AU29217/84A priority patent/AU544534B2/en
Priority to US06/619,174 priority patent/US4576692A/en
Priority to EP84106753A priority patent/EP0129199B1/en
Priority to DE8484106753T priority patent/DE3463001D1/de
Publication of JPS59230035A publication Critical patent/JPS59230035A/ja
Publication of JPH0254375B2 publication Critical patent/JPH0254375B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP58104906A 1983-06-14 1983-06-14 プラズマ処理方法 Granted JPS59230035A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP58104906A JPS59230035A (ja) 1983-06-14 1983-06-14 プラズマ処理方法
AU29217/84A AU544534B2 (en) 1983-06-14 1984-06-08 Plasma coating
US06/619,174 US4576692A (en) 1983-06-14 1984-06-11 Method for controlling the operation of a microwave-excited oxygen plasma surface treatment apparatus
EP84106753A EP0129199B1 (en) 1983-06-14 1984-06-13 A method for controlling the operation of a microwave-excited oxygen plasma surface treatment apparatus
DE8484106753T DE3463001D1 (en) 1983-06-14 1984-06-13 A method for controlling the operation of a microwave-excited oxygen plasma surface treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58104906A JPS59230035A (ja) 1983-06-14 1983-06-14 プラズマ処理方法

Publications (2)

Publication Number Publication Date
JPS59230035A true JPS59230035A (ja) 1984-12-24
JPH0254375B2 JPH0254375B2 (cs) 1990-11-21

Family

ID=14393163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58104906A Granted JPS59230035A (ja) 1983-06-14 1983-06-14 プラズマ処理方法

Country Status (1)

Country Link
JP (1) JPS59230035A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62160138A (ja) * 1986-01-08 1987-07-16 Hitachi Ltd 放電洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62160138A (ja) * 1986-01-08 1987-07-16 Hitachi Ltd 放電洗浄装置

Also Published As

Publication number Publication date
JPH0254375B2 (cs) 1990-11-21

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