JPS59229109A - シランガス燃焼装置 - Google Patents

シランガス燃焼装置

Info

Publication number
JPS59229109A
JPS59229109A JP58096792A JP9679283A JPS59229109A JP S59229109 A JPS59229109 A JP S59229109A JP 58096792 A JP58096792 A JP 58096792A JP 9679283 A JP9679283 A JP 9679283A JP S59229109 A JPS59229109 A JP S59229109A
Authority
JP
Japan
Prior art keywords
combustion
silane gas
oxygen
gas
silane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58096792A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0214606B2 (enExample
Inventor
Takashi Tomii
隆 富井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP58096792A priority Critical patent/JPS59229109A/ja
Publication of JPS59229109A publication Critical patent/JPS59229109A/ja
Publication of JPH0214606B2 publication Critical patent/JPH0214606B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/003—Systems for controlling combustion using detectors sensitive to combustion gas properties
    • F23N5/006—Systems for controlling combustion using detectors sensitive to combustion gas properties the detector being sensitive to oxygen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/50—Control or safety arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2207/00—Control
    • F23G2207/10—Arrangement of sensing devices
    • F23G2207/103—Arrangement of sensing devices for oxygen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2235/00—Valves, nozzles or pumps
    • F23N2235/02—Air or combustion gas valves or dampers
    • F23N2235/06—Air or combustion gas valves or dampers at the air intake

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Regulation And Control Of Combustion (AREA)
  • Incineration Of Waste (AREA)
JP58096792A 1983-05-31 1983-05-31 シランガス燃焼装置 Granted JPS59229109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58096792A JPS59229109A (ja) 1983-05-31 1983-05-31 シランガス燃焼装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58096792A JPS59229109A (ja) 1983-05-31 1983-05-31 シランガス燃焼装置

Publications (2)

Publication Number Publication Date
JPS59229109A true JPS59229109A (ja) 1984-12-22
JPH0214606B2 JPH0214606B2 (enExample) 1990-04-09

Family

ID=14174483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58096792A Granted JPS59229109A (ja) 1983-05-31 1983-05-31 シランガス燃焼装置

Country Status (1)

Country Link
JP (1) JPS59229109A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2654362A1 (fr) * 1989-11-13 1991-05-17 Air Liquide Procede et dispositif de determination des conditions d'elimination d'hydrures gazeux tels silanes, arsine, phosphine et autres.
JP2003056828A (ja) * 2001-08-10 2003-02-26 Toshiba Mach Co Ltd 燃焼式除害装置
CN103574624A (zh) * 2012-07-31 2014-02-12 苏州仕净环保设备有限公司 硅烷燃烧塔
TWI673430B (zh) * 2013-04-24 2019-10-01 日商大陽日酸股份有限公司 排氣處理裝置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5511369A (en) * 1978-07-10 1980-01-26 Mitsubishi Electric Corp Film forming system
JPS57154838U (enExample) * 1981-03-23 1982-09-29
JPS57202428A (en) * 1981-06-05 1982-12-11 Chugai Ro Kogyo Kaisha Ltd Oxygen concentration adjuster in burner
JPS5815860U (ja) * 1981-07-17 1983-01-31 株式会社日立製作所 過剰空気調整装置付燃焼装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5511369A (en) * 1978-07-10 1980-01-26 Mitsubishi Electric Corp Film forming system
JPS57154838U (enExample) * 1981-03-23 1982-09-29
JPS57202428A (en) * 1981-06-05 1982-12-11 Chugai Ro Kogyo Kaisha Ltd Oxygen concentration adjuster in burner
JPS5815860U (ja) * 1981-07-17 1983-01-31 株式会社日立製作所 過剰空気調整装置付燃焼装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2654362A1 (fr) * 1989-11-13 1991-05-17 Air Liquide Procede et dispositif de determination des conditions d'elimination d'hydrures gazeux tels silanes, arsine, phosphine et autres.
JP2003056828A (ja) * 2001-08-10 2003-02-26 Toshiba Mach Co Ltd 燃焼式除害装置
CN103574624A (zh) * 2012-07-31 2014-02-12 苏州仕净环保设备有限公司 硅烷燃烧塔
TWI673430B (zh) * 2013-04-24 2019-10-01 日商大陽日酸股份有限公司 排氣處理裝置

Also Published As

Publication number Publication date
JPH0214606B2 (enExample) 1990-04-09

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