JPS59228737A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS59228737A
JPS59228737A JP58103799A JP10379983A JPS59228737A JP S59228737 A JPS59228737 A JP S59228737A JP 58103799 A JP58103799 A JP 58103799A JP 10379983 A JP10379983 A JP 10379983A JP S59228737 A JPS59228737 A JP S59228737A
Authority
JP
Japan
Prior art keywords
layer
silicon layer
type
metal
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58103799A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0550140B2 (enExample
Inventor
Juri Kato
樹理 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP58103799A priority Critical patent/JPS59228737A/ja
Publication of JPS59228737A publication Critical patent/JPS59228737A/ja
Publication of JPH0550140B2 publication Critical patent/JPH0550140B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
JP58103799A 1983-06-10 1983-06-10 半導体装置 Granted JPS59228737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58103799A JPS59228737A (ja) 1983-06-10 1983-06-10 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58103799A JPS59228737A (ja) 1983-06-10 1983-06-10 半導体装置

Publications (2)

Publication Number Publication Date
JPS59228737A true JPS59228737A (ja) 1984-12-22
JPH0550140B2 JPH0550140B2 (enExample) 1993-07-28

Family

ID=14363440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58103799A Granted JPS59228737A (ja) 1983-06-10 1983-06-10 半導体装置

Country Status (1)

Country Link
JP (1) JPS59228737A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4926236A (en) * 1986-02-12 1990-05-15 General Electric Company Multilayer interconnect and method of forming same
US5619071A (en) * 1994-10-17 1997-04-08 Intel Corporation Anchored via connection

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841683A (enExample) * 1971-09-27 1973-06-18
JPS55130145A (en) * 1980-03-03 1980-10-08 Nec Corp Semiconductor integrated circuit device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841683A (enExample) * 1971-09-27 1973-06-18
JPS55130145A (en) * 1980-03-03 1980-10-08 Nec Corp Semiconductor integrated circuit device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4926236A (en) * 1986-02-12 1990-05-15 General Electric Company Multilayer interconnect and method of forming same
US5619071A (en) * 1994-10-17 1997-04-08 Intel Corporation Anchored via connection

Also Published As

Publication number Publication date
JPH0550140B2 (enExample) 1993-07-28

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