JPS5921648A - 含フツ素メタクリル酸エステル - Google Patents

含フツ素メタクリル酸エステル

Info

Publication number
JPS5921648A
JPS5921648A JP13116282A JP13116282A JPS5921648A JP S5921648 A JPS5921648 A JP S5921648A JP 13116282 A JP13116282 A JP 13116282A JP 13116282 A JP13116282 A JP 13116282A JP S5921648 A JPS5921648 A JP S5921648A
Authority
JP
Japan
Prior art keywords
formula
acid ester
containing fluorine
methacrylic acid
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13116282A
Other languages
English (en)
Japanese (ja)
Other versions
JPH038329B2 (enrdf_load_stackoverflow
Inventor
Iwao Oshima
尾島 巌
Takamasa Fuchigami
渕上 高正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagami Chemical Research Institute
Original Assignee
Sagami Chemical Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagami Chemical Research Institute filed Critical Sagami Chemical Research Institute
Priority to JP13116282A priority Critical patent/JPS5921648A/ja
Publication of JPS5921648A publication Critical patent/JPS5921648A/ja
Publication of JPH038329B2 publication Critical patent/JPH038329B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP13116282A 1982-07-29 1982-07-29 含フツ素メタクリル酸エステル Granted JPS5921648A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13116282A JPS5921648A (ja) 1982-07-29 1982-07-29 含フツ素メタクリル酸エステル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13116282A JPS5921648A (ja) 1982-07-29 1982-07-29 含フツ素メタクリル酸エステル

Publications (2)

Publication Number Publication Date
JPS5921648A true JPS5921648A (ja) 1984-02-03
JPH038329B2 JPH038329B2 (enrdf_load_stackoverflow) 1991-02-05

Family

ID=15051448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13116282A Granted JPS5921648A (ja) 1982-07-29 1982-07-29 含フツ素メタクリル酸エステル

Country Status (1)

Country Link
JP (1) JPS5921648A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5116544A (en) * 1987-12-04 1992-05-26 Daikin Industries, Ltd. Hexafluoroneopentyl alcohol, derivative thereof fluorine-containing polymer and its use
JPH05171193A (ja) * 1986-07-03 1993-07-09 Sandoz Ag ポリ−α−ヒドロキシアクリル酸の水溶性塩を含むストック溶液およびその製法
JP2001322955A (ja) * 2000-05-16 2001-11-20 Kanto Denka Kogyo Co Ltd 2−ブロモ−3,3,3−トリフルオロプロペンの製造方法
US6710148B2 (en) 2001-02-09 2004-03-23 Shin Etsu Chemical Co., Ltd. Polymers, resist compositions and patterning process
US6730451B2 (en) * 1999-12-15 2004-05-04 Shin-Etsu Chemical Co., Ltd. Polymers, chemical amplification resist compositions and patterning process
US8466310B2 (en) 2008-09-01 2013-06-18 Central Glass Company, Limited Process for producing α-substituted norbornanyl acrylates
US8524941B2 (en) 2009-04-27 2013-09-03 Central Glass Company, Limited Process for producing monomer for fluorinated resist

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05171193A (ja) * 1986-07-03 1993-07-09 Sandoz Ag ポリ−α−ヒドロキシアクリル酸の水溶性塩を含むストック溶液およびその製法
US5116544A (en) * 1987-12-04 1992-05-26 Daikin Industries, Ltd. Hexafluoroneopentyl alcohol, derivative thereof fluorine-containing polymer and its use
US6730451B2 (en) * 1999-12-15 2004-05-04 Shin-Etsu Chemical Co., Ltd. Polymers, chemical amplification resist compositions and patterning process
JP2001322955A (ja) * 2000-05-16 2001-11-20 Kanto Denka Kogyo Co Ltd 2−ブロモ−3,3,3−トリフルオロプロペンの製造方法
US6710148B2 (en) 2001-02-09 2004-03-23 Shin Etsu Chemical Co., Ltd. Polymers, resist compositions and patterning process
US8466310B2 (en) 2008-09-01 2013-06-18 Central Glass Company, Limited Process for producing α-substituted norbornanyl acrylates
US8524941B2 (en) 2009-04-27 2013-09-03 Central Glass Company, Limited Process for producing monomer for fluorinated resist

Also Published As

Publication number Publication date
JPH038329B2 (enrdf_load_stackoverflow) 1991-02-05

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