JPS5921505B2 - 微量ガス流検出器 - Google Patents

微量ガス流検出器

Info

Publication number
JPS5921505B2
JPS5921505B2 JP52150413A JP15041377A JPS5921505B2 JP S5921505 B2 JPS5921505 B2 JP S5921505B2 JP 52150413 A JP52150413 A JP 52150413A JP 15041377 A JP15041377 A JP 15041377A JP S5921505 B2 JPS5921505 B2 JP S5921505B2
Authority
JP
Japan
Prior art keywords
thermal conductor
trace gas
gas flow
flow detector
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52150413A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5374457A (en
Inventor
ギユンタ−・シユンク
アルベルト・ランダウ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of JPS5374457A publication Critical patent/JPS5374457A/ja
Publication of JPS5921505B2 publication Critical patent/JPS5921505B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/002—Investigating fluid-tightness of structures by using thermal means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/38—Investigating fluid-tightness of structures by using light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/37—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using pneumatic detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Radiation Pyrometers (AREA)
JP52150413A 1976-12-14 1977-12-14 微量ガス流検出器 Expired JPS5921505B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE000P26564874 1976-12-14
DE2656487A DE2656487C3 (de) 1976-12-14 1976-12-14 Mikroströmungsfühler für Gase

Publications (2)

Publication Number Publication Date
JPS5374457A JPS5374457A (en) 1978-07-01
JPS5921505B2 true JPS5921505B2 (ja) 1984-05-21

Family

ID=5995438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52150413A Expired JPS5921505B2 (ja) 1976-12-14 1977-12-14 微量ガス流検出器

Country Status (8)

Country Link
US (1) US4154087A (enExample)
JP (1) JPS5921505B2 (enExample)
CH (1) CH626452A5 (enExample)
DE (1) DE2656487C3 (enExample)
FR (1) FR2374626A1 (enExample)
GB (1) GB1556979A (enExample)
IT (1) IT1088026B (enExample)
NL (1) NL186406C (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2720636C2 (de) * 1977-05-07 1985-01-03 Leybold-Heraeus GmbH, 5000 Köln Pneumatischer Infrarot-Strahlungsdetektor mit einer vakuumdichten Kammer und einem strahlungsdurchlässigen Fenster
DE2845662C2 (de) * 1978-10-20 1987-03-19 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur Messung der Masse eines strömenden Mediums
JPS57173758A (en) * 1981-04-20 1982-10-26 Hitachi Ltd Hot wire type current meter
US4604895A (en) * 1983-05-02 1986-08-12 Air Sensor Inc. Hot wire anemometer
US4523461A (en) * 1983-05-02 1985-06-18 Air Sensors, Inc. Hot wire anemometer
DE3630427A1 (de) * 1986-09-06 1988-03-10 Draegerwerk Ag Hitzdrahtsensor zur integralen messung von stoff- oder volumenstroemen
DE3842399C2 (de) * 1988-12-16 1997-07-31 Fisher Rosemount Gmbh & Co Ges Mikroströmungsfühler für Gase
WO2006070843A1 (ja) * 2004-12-28 2006-07-06 Yokogawa Electric Corporation 赤外線ガス分析計

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2509889A (en) * 1948-01-13 1950-05-30 Bell Telephone Labor Inc Differential altimeter
US2645117A (en) * 1948-12-30 1953-07-14 Continental Can Co Leak detector for cans and the like
US3621707A (en) * 1969-07-08 1971-11-23 Hewlett Packard Co Thermal conductivity detector assembly
US4024761A (en) * 1976-06-11 1977-05-24 Kyma Corporation Directional hot film anemometer transducer

Also Published As

Publication number Publication date
CH626452A5 (enExample) 1981-11-13
DE2656487B2 (de) 1980-04-30
NL186406B (nl) 1990-06-18
JPS5374457A (en) 1978-07-01
US4154087A (en) 1979-05-15
FR2374626B1 (enExample) 1982-11-26
DE2656487C3 (de) 1981-01-29
NL186406C (nl) 1990-11-16
FR2374626A1 (fr) 1978-07-13
DE2656487A1 (de) 1978-06-15
GB1556979A (en) 1979-12-05
IT1088026B (it) 1985-06-04
NL7713537A (nl) 1978-06-16

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