DE2656487C3 - Mikroströmungsfühler für Gase - Google Patents

Mikroströmungsfühler für Gase

Info

Publication number
DE2656487C3
DE2656487C3 DE2656487A DE2656487A DE2656487C3 DE 2656487 C3 DE2656487 C3 DE 2656487C3 DE 2656487 A DE2656487 A DE 2656487A DE 2656487 A DE2656487 A DE 2656487A DE 2656487 C3 DE2656487 C3 DE 2656487C3
Authority
DE
Germany
Prior art keywords
heating conductor
connecting wires
sensor according
flow
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2656487A
Other languages
German (de)
English (en)
Other versions
DE2656487B2 (de
DE2656487A1 (de
Inventor
Albert Ing.(Grad.) Randow
Guenter Dr.-Ing. Schunck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Emerson Process Management GmbH and Co OHG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE2656487A priority Critical patent/DE2656487C3/de
Priority to IT29204/77A priority patent/IT1088026B/it
Priority to CH1452177A priority patent/CH626452A5/de
Priority to NLAANVRAGE7713537,A priority patent/NL186406C/xx
Priority to GB51195/77A priority patent/GB1556979A/en
Priority to US05/860,477 priority patent/US4154087A/en
Priority to JP52150413A priority patent/JPS5921505B2/ja
Priority to FR7737713A priority patent/FR2374626A1/fr
Publication of DE2656487A1 publication Critical patent/DE2656487A1/de
Publication of DE2656487B2 publication Critical patent/DE2656487B2/de
Application granted granted Critical
Publication of DE2656487C3 publication Critical patent/DE2656487C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/002—Investigating fluid-tightness of structures by using thermal means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/38—Investigating fluid-tightness of structures by using light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/37—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using pneumatic detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Radiation Pyrometers (AREA)
DE2656487A 1976-12-14 1976-12-14 Mikroströmungsfühler für Gase Expired DE2656487C3 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE2656487A DE2656487C3 (de) 1976-12-14 1976-12-14 Mikroströmungsfühler für Gase
IT29204/77A IT1088026B (it) 1976-12-14 1977-10-31 Sensore di microflusso per gas
CH1452177A CH626452A5 (enExample) 1976-12-14 1977-11-28
NLAANVRAGE7713537,A NL186406C (nl) 1976-12-14 1977-12-07 Microstromingsvoeler voor gassen.
GB51195/77A GB1556979A (en) 1976-12-14 1977-12-08 Microwlow sensor for gases
US05/860,477 US4154087A (en) 1976-12-14 1977-12-14 Microrheoscopic detector for gases
JP52150413A JPS5921505B2 (ja) 1976-12-14 1977-12-14 微量ガス流検出器
FR7737713A FR2374626A1 (fr) 1976-12-14 1977-12-14 Capteur de microdebits de gaz

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2656487A DE2656487C3 (de) 1976-12-14 1976-12-14 Mikroströmungsfühler für Gase

Publications (3)

Publication Number Publication Date
DE2656487A1 DE2656487A1 (de) 1978-06-15
DE2656487B2 DE2656487B2 (de) 1980-04-30
DE2656487C3 true DE2656487C3 (de) 1981-01-29

Family

ID=5995438

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2656487A Expired DE2656487C3 (de) 1976-12-14 1976-12-14 Mikroströmungsfühler für Gase

Country Status (8)

Country Link
US (1) US4154087A (enExample)
JP (1) JPS5921505B2 (enExample)
CH (1) CH626452A5 (enExample)
DE (1) DE2656487C3 (enExample)
FR (1) FR2374626A1 (enExample)
GB (1) GB1556979A (enExample)
IT (1) IT1088026B (enExample)
NL (1) NL186406C (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2720636C2 (de) * 1977-05-07 1985-01-03 Leybold-Heraeus GmbH, 5000 Köln Pneumatischer Infrarot-Strahlungsdetektor mit einer vakuumdichten Kammer und einem strahlungsdurchlässigen Fenster
DE2845662C2 (de) * 1978-10-20 1987-03-19 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur Messung der Masse eines strömenden Mediums
JPS57173758A (en) * 1981-04-20 1982-10-26 Hitachi Ltd Hot wire type current meter
US4604895A (en) * 1983-05-02 1986-08-12 Air Sensor Inc. Hot wire anemometer
US4523461A (en) * 1983-05-02 1985-06-18 Air Sensors, Inc. Hot wire anemometer
DE3630427A1 (de) * 1986-09-06 1988-03-10 Draegerwerk Ag Hitzdrahtsensor zur integralen messung von stoff- oder volumenstroemen
DE3842399C2 (de) * 1988-12-16 1997-07-31 Fisher Rosemount Gmbh & Co Ges Mikroströmungsfühler für Gase
WO2006070843A1 (ja) * 2004-12-28 2006-07-06 Yokogawa Electric Corporation 赤外線ガス分析計

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2509889A (en) * 1948-01-13 1950-05-30 Bell Telephone Labor Inc Differential altimeter
US2645117A (en) * 1948-12-30 1953-07-14 Continental Can Co Leak detector for cans and the like
US3621707A (en) * 1969-07-08 1971-11-23 Hewlett Packard Co Thermal conductivity detector assembly
US4024761A (en) * 1976-06-11 1977-05-24 Kyma Corporation Directional hot film anemometer transducer

Also Published As

Publication number Publication date
CH626452A5 (enExample) 1981-11-13
DE2656487B2 (de) 1980-04-30
NL186406B (nl) 1990-06-18
JPS5374457A (en) 1978-07-01
US4154087A (en) 1979-05-15
FR2374626B1 (enExample) 1982-11-26
NL186406C (nl) 1990-11-16
JPS5921505B2 (ja) 1984-05-21
FR2374626A1 (fr) 1978-07-13
DE2656487A1 (de) 1978-06-15
GB1556979A (en) 1979-12-05
IT1088026B (it) 1985-06-04
NL7713537A (nl) 1978-06-16

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Legal Events

Date Code Title Description
OAM Search report available
OC Search report available
OD Request for examination
C3 Grant after two publication steps (3rd publication)
8327 Change in the person/name/address of the patent owner

Owner name: LEYBOLD AG, 6450 HANAU, DE

8327 Change in the person/name/address of the patent owner

Owner name: ROSEMOUNT GMBH & CO, 6450 HANAU, DE

8339 Ceased/non-payment of the annual fee