JPS59209727A - 超高真空用アルミ系材料の加工法 - Google Patents

超高真空用アルミ系材料の加工法

Info

Publication number
JPS59209727A
JPS59209727A JP58083250A JP8325083A JPS59209727A JP S59209727 A JPS59209727 A JP S59209727A JP 58083250 A JP58083250 A JP 58083250A JP 8325083 A JP8325083 A JP 8325083A JP S59209727 A JPS59209727 A JP S59209727A
Authority
JP
Japan
Prior art keywords
aluminum
cutting
ultra
high vacuum
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58083250A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6247651B2 (cg-RX-API-DMAC7.html
Inventor
Hajime Ishimaru
石丸　肇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP58083250A priority Critical patent/JPS59209727A/ja
Publication of JPS59209727A publication Critical patent/JPS59209727A/ja
Publication of JPS6247651B2 publication Critical patent/JPS6247651B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P25/00—Auxiliary treatment of workpieces, before or during machining operations, to facilitate the action of the tool or the attainment of a desired final condition of the work, e.g. relief of internal stress
    • B23P25/003—Auxiliary treatment of workpieces, before or during machining operations, to facilitate the action of the tool or the attainment of a desired final condition of the work, e.g. relief of internal stress immediately preceding a cutting tool

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Turning (AREA)
JP58083250A 1983-05-12 1983-05-12 超高真空用アルミ系材料の加工法 Granted JPS59209727A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58083250A JPS59209727A (ja) 1983-05-12 1983-05-12 超高真空用アルミ系材料の加工法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58083250A JPS59209727A (ja) 1983-05-12 1983-05-12 超高真空用アルミ系材料の加工法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1877284A Division JPS6071101A (ja) 1984-02-03 1984-02-03 超高真空用アルミ系材料の加工法

Publications (2)

Publication Number Publication Date
JPS59209727A true JPS59209727A (ja) 1984-11-28
JPS6247651B2 JPS6247651B2 (cg-RX-API-DMAC7.html) 1987-10-08

Family

ID=13797084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58083250A Granted JPS59209727A (ja) 1983-05-12 1983-05-12 超高真空用アルミ系材料の加工法

Country Status (1)

Country Link
JP (1) JPS59209727A (cg-RX-API-DMAC7.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004063418A1 (ja) * 2003-01-14 2004-07-29 Tokyo Electron Limited プラズマ処理装置用の部材、処理装置用の部材、プラズマ処理装置、処理装置及びプラズマ処理方法
US7387477B2 (en) * 2003-02-25 2008-06-17 Shimane University Controlled atmosphere cutting method using oxygen enrichment and cutting tool
CN104190571A (zh) * 2014-08-20 2014-12-10 傅庆材 一种纳米镀膜设备
CN104625571A (zh) * 2015-01-06 2015-05-20 湖南科技大学 一种时效强化铝合金的切削加工方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5038882A (cg-RX-API-DMAC7.html) * 1973-08-13 1975-04-10
JPS5877712A (ja) * 1981-11-04 1983-05-11 昭和アルミニウム株式会社 真空用アルミニウム製中空押出形材の製造法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5038882A (cg-RX-API-DMAC7.html) * 1973-08-13 1975-04-10
JPS5877712A (ja) * 1981-11-04 1983-05-11 昭和アルミニウム株式会社 真空用アルミニウム製中空押出形材の製造法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004063418A1 (ja) * 2003-01-14 2004-07-29 Tokyo Electron Limited プラズマ処理装置用の部材、処理装置用の部材、プラズマ処理装置、処理装置及びプラズマ処理方法
EP1593751A4 (en) * 2003-01-14 2008-08-06 Tokyo Electron Ltd ELEMENT OF A PLASMA TREATMENT DEVICE, ELEMENT OF A TREATMENT DEVICE, PLASMA TREATMENT DEVICE, TREATMENT DEVICE AND METHOD OF PLASMA TREATMENT
US7387477B2 (en) * 2003-02-25 2008-06-17 Shimane University Controlled atmosphere cutting method using oxygen enrichment and cutting tool
CN104190571A (zh) * 2014-08-20 2014-12-10 傅庆材 一种纳米镀膜设备
CN104190571B (zh) * 2014-08-20 2017-02-15 傅庆材 一种纳米镀膜设备
CN104625571A (zh) * 2015-01-06 2015-05-20 湖南科技大学 一种时效强化铝合金的切削加工方法

Also Published As

Publication number Publication date
JPS6247651B2 (cg-RX-API-DMAC7.html) 1987-10-08

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