JPS59202052A - 感湿素子 - Google Patents
感湿素子Info
- Publication number
- JPS59202052A JPS59202052A JP58077802A JP7780283A JPS59202052A JP S59202052 A JPS59202052 A JP S59202052A JP 58077802 A JP58077802 A JP 58077802A JP 7780283 A JP7780283 A JP 7780283A JP S59202052 A JPS59202052 A JP S59202052A
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- moisture
- film
- electrode
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004372 Polyvinyl alcohol Substances 0.000 claims abstract description 12
- 229920002451 polyvinyl alcohol Polymers 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000004020 conductor Substances 0.000 claims abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 5
- 239000010931 gold Substances 0.000 abstract description 5
- 229910052737 gold Inorganic materials 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 239000002904 solvent Substances 0.000 abstract description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 21
- 230000008859 change Effects 0.000 description 7
- 239000012298 atmosphere Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000013256 coordination polymer Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000003792 electrolyte Substances 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229920001477 hydrophilic polymer Polymers 0.000 description 2
- 238000012886 linear function Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 241000283690 Bos taurus Species 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010775 animal oil Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 235000019198 oils Nutrition 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000026041 response to humidity Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 235000015112 vegetable and seed oil Nutrition 0.000 description 1
- 239000008158 vegetable oil Substances 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/913—Material designed to be responsive to temperature, light, moisture
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/256—Heavy metal or aluminum or compound thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31855—Of addition polymer from unsaturated monomers
- Y10T428/31935—Ester, halide or nitrile of addition polymer
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58077802A JPS59202052A (ja) | 1983-04-30 | 1983-04-30 | 感湿素子 |
| US06/604,389 US4632879A (en) | 1983-04-30 | 1984-04-27 | Moisture sensor |
| GB08410883A GB2138953B (en) | 1983-04-30 | 1984-04-27 | Electrical moisture sensors |
| DE19843416108 DE3416108A1 (de) | 1983-04-30 | 1984-04-30 | Feuchtigkeits-sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58077802A JPS59202052A (ja) | 1983-04-30 | 1983-04-30 | 感湿素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59202052A true JPS59202052A (ja) | 1984-11-15 |
| JPH0242429B2 JPH0242429B2 (en, 2012) | 1990-09-21 |
Family
ID=13644133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58077802A Granted JPS59202052A (ja) | 1983-04-30 | 1983-04-30 | 感湿素子 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4632879A (en, 2012) |
| JP (1) | JPS59202052A (en, 2012) |
| DE (1) | DE3416108A1 (en, 2012) |
| GB (1) | GB2138953B (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103592336A (zh) * | 2013-09-24 | 2014-02-19 | 合肥工业大学 | 一种聚电解质二氧化钛复合型湿敏元件及其制备方法 |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6486053A (en) * | 1987-09-29 | 1989-03-30 | Toshiba Corp | Sensitive element |
| US5533393A (en) * | 1995-01-13 | 1996-07-09 | Honeywell Inc. | Determination of dew point or absolute humidity |
| US5616851A (en) * | 1995-09-29 | 1997-04-01 | Farmex Inc. | Ex-situ grain moisture analyzer for a combine |
| JP3625348B2 (ja) * | 1996-12-10 | 2005-03-02 | Ｔｄｋ株式会社 | 感湿素子 |
| US6566893B2 (en) | 1997-02-28 | 2003-05-20 | Ust Umweltsensortechnik Gmbh | Method and arrangement for monitoring surfaces for the presence of dew |
| US7021124B2 (en) * | 2004-08-27 | 2006-04-04 | International Business Machines Corporation | Method and apparatus for detecting leaks in a fluid cooling system |
| CN101532975B (zh) * | 2008-03-12 | 2012-12-12 | 中国科学院电子学研究所 | 一种恒温测量式微型湿度传感器和制作方法 |
| US9562872B2 (en) | 2012-05-29 | 2017-02-07 | 3M Innovative Properties Company | Humidity sensor and sensor element |
| CN102854222A (zh) * | 2012-09-27 | 2013-01-02 | 吉林大学 | 一种基于钽酸钾敏感膜的湿敏传感器及其制备方法 |
| ITMI20130484A1 (it) | 2013-03-29 | 2014-09-30 | St Microelectronics Srl | Dispositivo elettronico integrato per il monitoraggio di umidita' e/o acidita'/basicita' ambientali e/o corrosione |
| EP3183693B1 (en) | 2014-08-19 | 2018-08-29 | R. R. Donnelley & Sons Company | Apparatus and method for monitoring a package during transit |
| US10379072B2 (en) | 2016-01-04 | 2019-08-13 | Cryovac, Llc | Multiple detector apparatus and method for monitoring an environment |
| CN106046216B (zh) * | 2016-07-07 | 2019-01-25 | 广州海谷电子科技有限公司 | 一种耐高温高湿湿敏聚合物及其制备方法和基于湿敏聚合物制备成的电容传感器 |
| US10342136B2 (en) | 2016-09-23 | 2019-07-02 | R.R. Donnelley & Sons Company | Monitoring device |
| CN106645405B (zh) * | 2016-12-01 | 2018-10-09 | 广西壮族自治区农业科学院甘蔗研究所（中国农业科学院甘蔗研究中心） | 一种适用于多品种甘蔗抗螟性鉴定方法的抗螟虫实验装置 |
| US10445692B2 (en) | 2017-03-06 | 2019-10-15 | Cryovac, Llc | Monitoring device and method of operating a monitoring device to transmit data |
| CN110470697B (zh) * | 2019-08-28 | 2023-03-21 | 歌尔科技有限公司 | 耳机收纳装置、耳机及耳机含水量检测方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3477055A (en) * | 1967-12-22 | 1969-11-04 | Gen Motors Corp | Thermistor construction |
| GB1464605A (en) * | 1973-08-14 | 1977-02-16 | Nippon Sheet Glass Co Ltd | Humidity-sensitive sensor |
| DE3224920C2 (de) * | 1981-07-08 | 1986-11-20 | Sharp K.K., Osaka | Feuchtigkeitsempfindliches Widerstandselement |
| GB2105569B (en) * | 1981-09-22 | 1985-04-24 | Os Bad Rozwojowy Aparatury Mle | A container for activation of microbiophysical properties of substances especially food-stuffs |
| US4442422A (en) * | 1982-03-31 | 1984-04-10 | Murata Manufacturing Co., Ltd. | Humidity sensitive resistor |
| JPS59173743A (ja) * | 1983-03-23 | 1984-10-01 | Sharp Corp | 感湿素子 |
-
1983
- 1983-04-30 JP JP58077802A patent/JPS59202052A/ja active Granted
-
1984
- 1984-04-27 US US06/604,389 patent/US4632879A/en not_active Expired - Fee Related
- 1984-04-27 GB GB08410883A patent/GB2138953B/en not_active Expired
- 1984-04-30 DE DE19843416108 patent/DE3416108A1/de active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103592336A (zh) * | 2013-09-24 | 2014-02-19 | 合肥工业大学 | 一种聚电解质二氧化钛复合型湿敏元件及其制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3416108C2 (en, 2012) | 1988-11-10 |
| JPH0242429B2 (en, 2012) | 1990-09-21 |
| US4632879A (en) | 1986-12-30 |
| DE3416108A1 (de) | 1984-11-08 |
| GB8410883D0 (en) | 1984-06-06 |
| GB2138953B (en) | 1987-04-08 |
| GB2138953A (en) | 1984-10-31 |
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