JPS59200984A - ビ−ム径測定用マ−カ− - Google Patents

ビ−ム径測定用マ−カ−

Info

Publication number
JPS59200984A
JPS59200984A JP7381883A JP7381883A JPS59200984A JP S59200984 A JPS59200984 A JP S59200984A JP 7381883 A JP7381883 A JP 7381883A JP 7381883 A JP7381883 A JP 7381883A JP S59200984 A JPS59200984 A JP S59200984A
Authority
JP
Japan
Prior art keywords
marker
beam diameter
substrate
signal
family
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7381883A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449670B2 (enExample
Inventor
Takashi Suzuki
隆 鈴木
Kanji Wada
和田　寛次
Toshiya Muraguchi
要也 村口
Yoshihide Kato
加藤　芳秀
Kei Kirita
桐田　慶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP7381883A priority Critical patent/JPS59200984A/ja
Publication of JPS59200984A publication Critical patent/JPS59200984A/ja
Publication of JPH0449670B2 publication Critical patent/JPH0449670B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Radiation (AREA)
JP7381883A 1983-04-28 1983-04-28 ビ−ム径測定用マ−カ− Granted JPS59200984A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7381883A JPS59200984A (ja) 1983-04-28 1983-04-28 ビ−ム径測定用マ−カ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7381883A JPS59200984A (ja) 1983-04-28 1983-04-28 ビ−ム径測定用マ−カ−

Publications (2)

Publication Number Publication Date
JPS59200984A true JPS59200984A (ja) 1984-11-14
JPH0449670B2 JPH0449670B2 (enExample) 1992-08-12

Family

ID=13529113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7381883A Granted JPS59200984A (ja) 1983-04-28 1983-04-28 ビ−ム径測定用マ−カ−

Country Status (1)

Country Link
JP (1) JPS59200984A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140546A (ja) * 1987-11-27 1989-06-01 Hitachi Ltd 照射ビーム径評価用素子及び評価方法
JPH11118717A (ja) * 1997-10-16 1999-04-30 Agency Of Ind Science & Technol 顕微ラマン分光装置の実効分析領域測定用冶具及びその方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140546A (ja) * 1987-11-27 1989-06-01 Hitachi Ltd 照射ビーム径評価用素子及び評価方法
JPH11118717A (ja) * 1997-10-16 1999-04-30 Agency Of Ind Science & Technol 顕微ラマン分光装置の実効分析領域測定用冶具及びその方法

Also Published As

Publication number Publication date
JPH0449670B2 (enExample) 1992-08-12

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