JPS52117546A - Position matching method of emitter - Google Patents
Position matching method of emitterInfo
- Publication number
- JPS52117546A JPS52117546A JP3485876A JP3485876A JPS52117546A JP S52117546 A JPS52117546 A JP S52117546A JP 3485876 A JP3485876 A JP 3485876A JP 3485876 A JP3485876 A JP 3485876A JP S52117546 A JPS52117546 A JP S52117546A
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- position matching
- matching method
- anode
- irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: To shift the emitter so as to reduce the output to the minimum level through detection of the anode signal caused by irradiation of electronic beam from the emitter, and thus to secure position matching in a short time between the center of the emitter and open hole of the anode.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3485876A JPS52117546A (en) | 1976-03-30 | 1976-03-30 | Position matching method of emitter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3485876A JPS52117546A (en) | 1976-03-30 | 1976-03-30 | Position matching method of emitter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52117546A true JPS52117546A (en) | 1977-10-03 |
Family
ID=12425862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3485876A Pending JPS52117546A (en) | 1976-03-30 | 1976-03-30 | Position matching method of emitter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52117546A (en) |
-
1976
- 1976-03-30 JP JP3485876A patent/JPS52117546A/en active Pending
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