JPS52117546A - Position matching method of emitter - Google Patents

Position matching method of emitter

Info

Publication number
JPS52117546A
JPS52117546A JP3485876A JP3485876A JPS52117546A JP S52117546 A JPS52117546 A JP S52117546A JP 3485876 A JP3485876 A JP 3485876A JP 3485876 A JP3485876 A JP 3485876A JP S52117546 A JPS52117546 A JP S52117546A
Authority
JP
Japan
Prior art keywords
emitter
position matching
matching method
anode
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3485876A
Other languages
Japanese (ja)
Inventor
Noriaki Nakayama
Yasuo Furukawa
Masahiro Okabe
Seigo Igaki
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3485876A priority Critical patent/JPS52117546A/en
Publication of JPS52117546A publication Critical patent/JPS52117546A/en
Pending legal-status Critical Current

Links

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  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To shift the emitter so as to reduce the output to the minimum level through detection of the anode signal caused by irradiation of electronic beam from the emitter, and thus to secure position matching in a short time between the center of the emitter and open hole of the anode.
COPYRIGHT: (C)1977,JPO&Japio
JP3485876A 1976-03-30 1976-03-30 Position matching method of emitter Pending JPS52117546A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3485876A JPS52117546A (en) 1976-03-30 1976-03-30 Position matching method of emitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3485876A JPS52117546A (en) 1976-03-30 1976-03-30 Position matching method of emitter

Publications (1)

Publication Number Publication Date
JPS52117546A true JPS52117546A (en) 1977-10-03

Family

ID=12425862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3485876A Pending JPS52117546A (en) 1976-03-30 1976-03-30 Position matching method of emitter

Country Status (1)

Country Link
JP (1) JPS52117546A (en)

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