JPS5321564A - Scan-type electron microscope - Google Patents

Scan-type electron microscope

Info

Publication number
JPS5321564A
JPS5321564A JP9634976A JP9634976A JPS5321564A JP S5321564 A JPS5321564 A JP S5321564A JP 9634976 A JP9634976 A JP 9634976A JP 9634976 A JP9634976 A JP 9634976A JP S5321564 A JPS5321564 A JP S5321564A
Authority
JP
Japan
Prior art keywords
scan
electron microscope
type electron
amplifier
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9634976A
Other languages
Japanese (ja)
Other versions
JPS5833657B2 (en
Inventor
Yoshiaki Goto
Yasuo Furukawa
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9634976A priority Critical patent/JPS5833657B2/en
Publication of JPS5321564A publication Critical patent/JPS5321564A/en
Publication of JPS5833657B2 publication Critical patent/JPS5833657B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: In a scan-type electron microscope, a constant-level signal is extracted without relating to the moving to stages, thereby automatically fixing the output of an amplifier all the time.
COPYRIGHT: (C)1978,JPO&Japio
JP9634976A 1976-08-11 1976-08-11 Scanning electron microscope Expired JPS5833657B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9634976A JPS5833657B2 (en) 1976-08-11 1976-08-11 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9634976A JPS5833657B2 (en) 1976-08-11 1976-08-11 Scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS5321564A true JPS5321564A (en) 1978-02-28
JPS5833657B2 JPS5833657B2 (en) 1983-07-21

Family

ID=14162515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9634976A Expired JPS5833657B2 (en) 1976-08-11 1976-08-11 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5833657B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114630845A (en) 2019-10-30 2022-06-14 Ａｇｃ株式会社 Fluorine-containing copolymer, fluorine-containing copolymer composition, and crosslinked rubber article

Also Published As

Publication number Publication date
JPS5833657B2 (en) 1983-07-21

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