JPS591978B2 - 物体状態検査装置 - Google Patents

物体状態検査装置

Info

Publication number
JPS591978B2
JPS591978B2 JP49070246A JP7024674A JPS591978B2 JP S591978 B2 JPS591978 B2 JP S591978B2 JP 49070246 A JP49070246 A JP 49070246A JP 7024674 A JP7024674 A JP 7024674A JP S591978 B2 JPS591978 B2 JP S591978B2
Authority
JP
Japan
Prior art keywords
wiring
signal
pulse
output
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49070246A
Other languages
English (en)
Japanese (ja)
Other versions
JPS51988A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
清 中川
宏幸 伊部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP49070246A priority Critical patent/JPS591978B2/ja
Publication of JPS51988A publication Critical patent/JPS51988A/ja
Publication of JPS591978B2 publication Critical patent/JPS591978B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Input (AREA)
JP49070246A 1974-06-21 1974-06-21 物体状態検査装置 Expired JPS591978B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49070246A JPS591978B2 (ja) 1974-06-21 1974-06-21 物体状態検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49070246A JPS591978B2 (ja) 1974-06-21 1974-06-21 物体状態検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP17295583A Division JPS5990034A (ja) 1983-09-21 1983-09-21 物体状態検査装置

Publications (2)

Publication Number Publication Date
JPS51988A JPS51988A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-01-07
JPS591978B2 true JPS591978B2 (ja) 1984-01-14

Family

ID=13426005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49070246A Expired JPS591978B2 (ja) 1974-06-21 1974-06-21 物体状態検査装置

Country Status (1)

Country Link
JP (1) JPS591978B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198783U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-06-04 1986-12-12
JPS6224179U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-07-27 1987-02-14
JPH01176277U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-06-03 1989-12-15

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6273142A (ja) * 1985-09-27 1987-04-03 Alps Electric Co Ltd プリント基板のパタ−ン外観検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4848183A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-10-21 1973-07-07
JPS5149437B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-12-17 1976-12-27

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198783U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-06-04 1986-12-12
JPS6224179U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-07-27 1987-02-14
JPH01176277U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-06-03 1989-12-15

Also Published As

Publication number Publication date
JPS51988A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-01-07

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