JPS59195825A - 荷電粒子線露光装置 - Google Patents

荷電粒子線露光装置

Info

Publication number
JPS59195825A
JPS59195825A JP58070650A JP7065083A JPS59195825A JP S59195825 A JPS59195825 A JP S59195825A JP 58070650 A JP58070650 A JP 58070650A JP 7065083 A JP7065083 A JP 7065083A JP S59195825 A JPS59195825 A JP S59195825A
Authority
JP
Japan
Prior art keywords
charged particle
exposure
particle beam
signal
abnormality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58070650A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0324772B2 (enExample
Inventor
Toyoki Kitayama
北山　豊樹
Shigeru Moriya
茂 守屋
Kazuhiko Komatsu
一彦 小松
Teruaki Okino
輝昭 沖野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58070650A priority Critical patent/JPS59195825A/ja
Publication of JPS59195825A publication Critical patent/JPS59195825A/ja
Publication of JPH0324772B2 publication Critical patent/JPH0324772B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP58070650A 1983-04-21 1983-04-21 荷電粒子線露光装置 Granted JPS59195825A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58070650A JPS59195825A (ja) 1983-04-21 1983-04-21 荷電粒子線露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58070650A JPS59195825A (ja) 1983-04-21 1983-04-21 荷電粒子線露光装置

Publications (2)

Publication Number Publication Date
JPS59195825A true JPS59195825A (ja) 1984-11-07
JPH0324772B2 JPH0324772B2 (enExample) 1991-04-04

Family

ID=13437733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58070650A Granted JPS59195825A (ja) 1983-04-21 1983-04-21 荷電粒子線露光装置

Country Status (1)

Country Link
JP (1) JPS59195825A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5554620B2 (ja) 2010-04-14 2014-07-23 株式会社ニューフレアテクノロジー 描画装置、描画方法および描画装置の異常診断方法
KR101499660B1 (ko) * 2012-12-05 2015-03-06 한라비스테온공조 주식회사 차량용 공조장치 및 그 제어방법

Also Published As

Publication number Publication date
JPH0324772B2 (enExample) 1991-04-04

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