JPS5918867B2 - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS5918867B2
JPS5918867B2 JP48092007A JP9200773A JPS5918867B2 JP S5918867 B2 JPS5918867 B2 JP S5918867B2 JP 48092007 A JP48092007 A JP 48092007A JP 9200773 A JP9200773 A JP 9200773A JP S5918867 B2 JPS5918867 B2 JP S5918867B2
Authority
JP
Japan
Prior art keywords
plane
channel
diffusion
channel stopper
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48092007A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5040289A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
祥治 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP48092007A priority Critical patent/JPS5918867B2/ja
Publication of JPS5040289A publication Critical patent/JPS5040289A/ja
Publication of JPS5918867B2 publication Critical patent/JPS5918867B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP48092007A 1973-08-15 1973-08-15 半導体装置 Expired JPS5918867B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48092007A JPS5918867B2 (ja) 1973-08-15 1973-08-15 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48092007A JPS5918867B2 (ja) 1973-08-15 1973-08-15 半導体装置

Publications (2)

Publication Number Publication Date
JPS5040289A JPS5040289A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-04-12
JPS5918867B2 true JPS5918867B2 (ja) 1984-05-01

Family

ID=14042387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48092007A Expired JPS5918867B2 (ja) 1973-08-15 1973-08-15 半導体装置

Country Status (1)

Country Link
JP (1) JPS5918867B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544706A (en) * 1978-09-25 1980-03-29 Hitachi Ltd Semiconductor device
JPS59165434A (ja) * 1983-03-11 1984-09-18 Toshiba Corp 半導体装置の製造方法
US5650820A (en) * 1987-03-19 1997-07-22 Canon Kabushiki Kaisha Hand recording apparatus and movement guide therefor
US4999016A (en) * 1987-06-08 1991-03-12 Canon Kabushiki Kaisha Hand recording apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL170348C (nl) * 1970-07-10 1982-10-18 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij op een oppervlak van een halfgeleiderlichaam een tegen dotering en tegen thermische oxydatie maskerend masker wordt aangebracht, de door de vensters in het masker vrijgelaten delen van het oppervlak worden onderworpen aan een etsbehandeling voor het vormen van verdiepingen en het halfgeleiderlichaam met het masker wordt onderworpen aan een thermische oxydatiebehandeling voor het vormen van een oxydepatroon dat de verdiepingen althans ten dele opvult.
US3796612A (en) * 1971-08-05 1974-03-12 Scient Micro Syst Inc Semiconductor isolation method utilizing anisotropic etching and differential thermal oxidation

Also Published As

Publication number Publication date
JPS5040289A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-04-12

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