JPS59187208A - 位置検出装置 - Google Patents

位置検出装置

Info

Publication number
JPS59187208A
JPS59187208A JP6008183A JP6008183A JPS59187208A JP S59187208 A JPS59187208 A JP S59187208A JP 6008183 A JP6008183 A JP 6008183A JP 6008183 A JP6008183 A JP 6008183A JP S59187208 A JPS59187208 A JP S59187208A
Authority
JP
Japan
Prior art keywords
scanning
pattern
signal
data
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6008183A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0411803B2 (enrdf_load_stackoverflow
Inventor
Shigeo Murakami
成郎 村上
Muneki Hamashima
宗樹 浜島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP6008183A priority Critical patent/JPS59187208A/ja
Publication of JPS59187208A publication Critical patent/JPS59187208A/ja
Priority to US06/851,293 priority patent/US4639604A/en
Publication of JPH0411803B2 publication Critical patent/JPH0411803B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP6008183A 1983-03-29 1983-04-07 位置検出装置 Granted JPS59187208A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP6008183A JPS59187208A (ja) 1983-04-07 1983-04-07 位置検出装置
US06/851,293 US4639604A (en) 1983-03-29 1986-04-04 Method and apparatus for detecting an edge position of a pattern and eliminating overlapping pattern signals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6008183A JPS59187208A (ja) 1983-04-07 1983-04-07 位置検出装置

Publications (2)

Publication Number Publication Date
JPS59187208A true JPS59187208A (ja) 1984-10-24
JPH0411803B2 JPH0411803B2 (enrdf_load_stackoverflow) 1992-03-02

Family

ID=13131772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6008183A Granted JPS59187208A (ja) 1983-03-29 1983-04-07 位置検出装置

Country Status (1)

Country Link
JP (1) JPS59187208A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0411803B2 (enrdf_load_stackoverflow) 1992-03-02

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