JPH0411803B2 - - Google Patents
Info
- Publication number
- JPH0411803B2 JPH0411803B2 JP6008183A JP6008183A JPH0411803B2 JP H0411803 B2 JPH0411803 B2 JP H0411803B2 JP 6008183 A JP6008183 A JP 6008183A JP 6008183 A JP6008183 A JP 6008183A JP H0411803 B2 JPH0411803 B2 JP H0411803B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- scanning
- signal
- value
- analog signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 79
- 238000005070 sampling Methods 0.000 claims description 36
- 230000010354 integration Effects 0.000 claims description 27
- 230000002441 reversible effect Effects 0.000 claims description 17
- 238000000605 extraction Methods 0.000 claims description 10
- 238000004364 calculation method Methods 0.000 claims description 6
- 230000004044 response Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 20
- 238000012545 processing Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 18
- 235000012431 wafers Nutrition 0.000 description 18
- 230000006870 function Effects 0.000 description 9
- 230000005484 gravity Effects 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 5
- 238000005286 illumination Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003708 edge detection Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6008183A JPS59187208A (ja) | 1983-04-07 | 1983-04-07 | 位置検出装置 |
| US06/851,293 US4639604A (en) | 1983-03-29 | 1986-04-04 | Method and apparatus for detecting an edge position of a pattern and eliminating overlapping pattern signals |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6008183A JPS59187208A (ja) | 1983-04-07 | 1983-04-07 | 位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59187208A JPS59187208A (ja) | 1984-10-24 |
| JPH0411803B2 true JPH0411803B2 (enrdf_load_stackoverflow) | 1992-03-02 |
Family
ID=13131772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6008183A Granted JPS59187208A (ja) | 1983-03-29 | 1983-04-07 | 位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59187208A (enrdf_load_stackoverflow) |
-
1983
- 1983-04-07 JP JP6008183A patent/JPS59187208A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59187208A (ja) | 1984-10-24 |
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