JPS59184523A - バイポーラトランジスタの製造方法 - Google Patents
バイポーラトランジスタの製造方法Info
- Publication number
- JPS59184523A JPS59184523A JP58059526A JP5952683A JPS59184523A JP S59184523 A JPS59184523 A JP S59184523A JP 58059526 A JP58059526 A JP 58059526A JP 5952683 A JP5952683 A JP 5952683A JP S59184523 A JPS59184523 A JP S59184523A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor integrated
- region
- integrated circuit
- film
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000000034 method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 241001247411 Thetella Species 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58059526A JPS59184523A (ja) | 1983-04-05 | 1983-04-05 | バイポーラトランジスタの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58059526A JPS59184523A (ja) | 1983-04-05 | 1983-04-05 | バイポーラトランジスタの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59184523A true JPS59184523A (ja) | 1984-10-19 |
JPH0257703B2 JPH0257703B2 (enrdf_load_stackoverflow) | 1990-12-05 |
Family
ID=13115801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58059526A Granted JPS59184523A (ja) | 1983-04-05 | 1983-04-05 | バイポーラトランジスタの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59184523A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009018193A (ja) * | 2008-10-03 | 2009-01-29 | Twinbird Corp | ブラシ装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0416004U (enrdf_load_stackoverflow) * | 1990-05-31 | 1992-02-10 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53115173A (en) * | 1977-03-18 | 1978-10-07 | Hitachi Ltd | Production of semiconductor device |
-
1983
- 1983-04-05 JP JP58059526A patent/JPS59184523A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53115173A (en) * | 1977-03-18 | 1978-10-07 | Hitachi Ltd | Production of semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009018193A (ja) * | 2008-10-03 | 2009-01-29 | Twinbird Corp | ブラシ装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0257703B2 (enrdf_load_stackoverflow) | 1990-12-05 |
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