JPS59181812A - Piezoelectric vibrator - Google Patents

Abstract

PURPOSE:To make the frequency adjustment of a vibrator accurate by forming an insulating tube part opposed to an electrode of the vibrating element into a plane in parallel with the electrode to improve the positioning accuracy of laser light. CONSTITUTION:A package 31 to build in a vibrating element where an electrode pattern is formed to a strip form substrate cut out of a crystal plate of LiTaO3 is constituted by a glass tube 32 having the capacity of transmission of YAG laser light therethrough and a couple of metallic caps 34 to seal airtightly the open end of the glass tube 32. One end of the glass tube 32 is formed with a plane section 33 and the section is bonded by a sealing member after a cap 34 is fitted to the outside of the end of the glass tube 32. When one major plane of the vibrating element is incorporated to be made in parallel with the plane section 33, the laser spot for trimming of the electrode formed as a pattern on the major plane is moved on the electrode without being changed by the glass tube 32.

Description

[Detailed Description of the Invention] (a) Technical Field of the Invention The present invention provides a method for installing a vibration element inside a package ζζ, and then
The present invention relates to a piezoelectric vibrator structure ζ in which the electrodes formed on the element can be laser-trimmed from outside the piezo cage.

(b) Background of the technology A piezoelectric vibrator with a built-in panocage is an element in which opposing chamber frames are formed on each of the opposing main surfaces of a piezoelectric substrate.
Since it has advantages such as small size and high performance, it is widely used in oscillation circuits and filters of 11M machines and the like.

However, it is difficult to increase the resonant frequency to the desired value of 6 using only processing technology, so a frequency adjustment process is required, but there is a method that uses the mass effect of the rod. , a method of increasing the mass of the electrode by means such as plating,
``There is a quality ν reduction method in which a part of the electrode is cut off or removed. Conventionally, a method of increasing the mass of the electric body was adopted, but the method of reducing the quality of the electrode using laser light stabilizes the electric current characteristics such as cross-resistance and mechanical coupling coefficient, and adjusts the electrode mass. It has recently come into practical use because it has the advantage of making work easier.

(C) Prior Art and Problems FIGS. 1 and 2 are side sectional views of a vibrator in which a vibrating element is built into a conventional alternative package.

In FIG. 1, 1 is a vibrator whose element is covered with a case made of gold, and 2 is a vibrating element. 'ci' formed on each of the opposing main surfaces of 2
The i pattern 6 is connected to each terminal 3i (:) via a pair of wires 7.

In FIG. 2, 11 is a chip type vibrator, 12 is a strip type vibrator, and the package is a ceramic substrate. The electrode patterns 5 formed on each of the main surfaces are connected via conductor terminals 16 formed on each of one opposing end of the element 12 and a pair of conductor patterns 17 formed on the surface of the substrate 13. The vibrator guided out to the outer surface of the pan cage and configured in this way is a vibrating element whose frequency has been adjusted and is installed and built into the pan cage. Sometimes, the disadvantage was that the frequency characteristics changed.

FIG. 3 is a side sectional view of a vibrator having a conventional configuration in which the frequency can be adjusted after the vibrating element is built into the pan cage.

In FIG. 3, 21 is a chip-type vibrator, 22 is a strip-type vibrator, and the package is composed of a glass tube 23 through which YAG laser light can pass and a pair of terminal plates 24 made of metal. The electrode patterns 25 formed on each of the opposing main surfaces of the element 22 connect the conductor terminals 26 formed on each of the opposite ends of the element 22 with the conductive adhesive 271 to approximately the center of each terminal plate 24. After connection 7, the glass tube 23 and each terminal plate 24 are hermetically sealed with a sealing adhesive 28.

In order to adjust the frequency of the vibrator configured in this way, a part of the electrode pattern is cut off with a YAG laser or scattered, and incorporated into the entire element package where the frequency adjustment has been mostly performed. Tube evening+l1flll to Y
Shine the IC onto the AG laser's subotowo electrode pattern and scatter the errant part! Kollu. Therefore, changes in frequency errors due to factors such as M and aging of the element can be corrected.

However, in the final adjustment, the laser spot bends and scatters when passing through a glass tube with curvature, resulting in lower positioning accuracy and energy efficiency.

OBJECT OF THE INVENTION An object of the present invention is to provide a piezoelectric vibrator which eliminates the above-mentioned problems.

(e) Structure of the Invention The above objects (1. The insulating tube for a pan cage through which laser light is transmitted is arranged so that at least one electrode of a vibrating element built therein (the opposing portion thereof is in a plane substantially parallel to the electrode); The structure of the piezoelectric vibrator is characterized by the formation of

(f) Examples of the invention Hereinafter, the present invention will be explained in detail using the drawings.

FIG. 4 is an exploded perspective view of a vibrator package according to an embodiment of the present invention, FIG. 5 is an exploded perspective view of a vibrator package according to another embodiment of the present invention, and FIG. 8 is an exploded perspective view of a vibrator package according to a further embodiment of the present invention, FIG. 7 is a side sectional view showing a structural example of a terminal cap for a package according to the present invention, and FIG.
The figure is a side sectional view of a vibrator according to another embodiment C of the present invention.

In FIG. 4, LiTa0. A package 31 for completely incorporating a vibrating element (the above-mentioned element 22 has an oscillation element) on which an electrode pattern is formed is made of a glass tube 32 through which YAG laser light can pass.
It is comprised of a pair of metal caps 34 (compatible with the aforementioned terminal plate 24) that hermetically seal the open end of the glass tube 32. However, the glass tube 32 has a flat part 33 formed on one side thereof, and the shape of the camp 34 that is attached to the outside of the end of the glass tube 32 (after being fitted with the sealing material) is the same as that of the glass tube 32.
AJ: ``The surface shape is the same.

Therefore, when one main surface of the vibrating element is parallel to the plane part 33 (ζ1), when the above-mentioned element is made to work with the above-mentioned vibrator 21 by PI-like means, the main surface (hereinafter Kuhn-shaped) is
The laser spot for trimming one body is No Las O 32
O so that it can move on the electrode without being changed by
This will happen.

The second package 41 containing a vibration element (corresponding to the element 22 of +7.) on which a strip-type basic electrode pattern cut out from a LiTa0a crystal plate is formed is a YAG sensor. A glass tube 42 that allows light to pass through and has a parallel rectangular cross section, and one of the glass tubes 42.
．． H> It is composed of a pair of metal drying rings (equivalent to the terminal plate 2.N described above) 44 whose mouth end is completely hermetically sealed. The cage 41 configured in this way is
110 on the outside of each end (the fitted cap 44
is now glued with a restraining material.

Therefore, the elements tJ are arranged so that the opposing main surfaces of the vibrating elements are parallel to each of the opposing flat parts 43 of the glass tube 42.
When built in using the same means as the tl-output vibrator 21, it becomes smaller (thinner) than the vibrator 21 and stabilizes the built-in element. With this, a pattern is formed on each of the main surfaces, and the laser spot for trimming the fc@pole is placed on the glass tube 4.
2i so that it can move completely on the electrode without being changed.

In FIG. 6, a package 51 containing a strip type vibrating element includes a glass tube 52 through which the YAG laser source can pass and has an oval cross section, and a pair of metal camps ( The vibrating element is constructed with the aforementioned terminal plate 24 (equivalent to this) 54, and the vibrating element is housed with its opposing main surface parallel to the flat part 53 of the glass tube 52.

Therefore, the pan cage 51 has the same structural advantages as the package 41, and the formation of the glass tube 52 is easier than the formation of the glass v42.

In FIG. 7(A), the cap 61 has a raw part 62 that is fitted and sealed with a glass tube (a glass tube), and a lead part 63 that protrudes from the main part 62 to one side. The lifter has nine built-in vibrating elements,
When mounting on a printed wiring board, connect the leads to the
! The connection is made through the through hole provided on the plate.

Seventh (Me) (B) l, the cap 65 has a main part 66 that is fitted and sealed to the glass tube, and a metal J having spring elasticity.
The contact 67 is connected to the inner center of the main portion 66 by spot welding, adhesion using a conductive adhesive, soldering, etc. Therefore, in a vibrator in which a vibrating element is built into a package using the cap 65, when connecting and holding the element in the package, the conductor terminals of the element (terminals 16 and 26 mentioned above) are contacted. 67i
Since it is only necessary to press the connector in place, the connection and holding operations described above become extremely easy.

In FIG. 7(C), the camp 70 has a pair of protrusions 71 formed at its inner center by press working, and the protrusions 71 are connected to the vibrating element in place of the contact 671 described above. - Becomes a W body to hold.

In FIG. 7(d), the cap 75 is formed by pressing a pair of tongues 76 protruding inward at the center thereof, and the tongues 76 are formed by pressing the above-mentioned contacts. It comes to connect and hold the vibrating element. however,
Before or after the Shiko coating is applied, the tongue piece 76 is formed (all the through holes need to be closed with an adhesive material 77, etc.).

FIG. 7(E) - The cap 80 has a play hole 81 in its center through which the end of the vibrating element 82 can pass, and a conductor terminal (not shown) of the element 82. The connection between the terminal and the camp 70 is made by applying a conductive adhesive (or solder) 73 from the outside of the cap 80 to the through hole 81 (after fitting the terminal therein), and making the connection hermetically sealed. become.

In Fig. 7 (f) 1, the camp 85 is composed of a main part 86 that is fitted and sealed to the glass tube, and a wire region 87 that is made of intertwined metal wires, and the tangent of the vibrating element - Retention is achieved by the tetraelectricity and elasticity of the line area 87.

Note that the gaps 61, 65, 70, 75, and 80° 85 can be made by fitting a pair of the same shape into the pan cage glass tube, or by combining different shapes, for example, the gap 80.
It can be used by combining 85-karat gold and straining 1:1.

FIG. 8 (In this case, the vibrator 90 is a package consisting of a glass tube 91 that can transmit YAG laser light and has a parallel rectangular cross section and a pair of metal camps 921. Strip type vibrating element 9
3 built-in.

However, the glass tube 91 is fitted over the outside of a pair of deep-drawn caps 92 and then sealed and polished with a sealing ring 97. The main surface (a pair of opposing sides formed in this way), the main part 94' of the pole 94
A pair of conductor pins 95 having a numeral 7 formed on the inner end of the element 93 are connected to each cap 92 via a 4-electrical adhesive 96.

In the vibrator 90 configured in this way, a part of each of the electrode main parts 94' is separated by a laser beam, and frequency adjustment (correction) for scattering is performed by using a laser beam spot perpendicular to the plane of the glass tube 91 from the outside. is applied to the electrode main part 94',
The movement of the spot is performed without being changed by the glass tube 9-1, and has the advantage of being easier to assemble compared to a package structure vibrator in which a cap on the outside of the glass tube is fitted.

(g) As described in detail, the vibrator according to the present invention includes a package (
Since the adjustment of the frequency of the built-in vibrating element is not affected by the glass tube for forming the package, the effect of making the adjustment easier and more accurate is remarkable.

[Brief explanation of the drawing]

Figure 1 is a side cross-sectional view showing the conventional configuration of a vibrator in which the vibrating element is covered with a metal case, and Figure 2 is a side cross-sectional view showing the conventional configuration of a chip-type sensor in which the vibrating element is built into a ceramic package. , FIG. 3 is a side sectional view showing the conventional structure of a chip-type vibrator in which a vibrating element is built into a glass tube package.
FIG. 4 is an exploded perspective view of the cage of a vibrator according to one embodiment of the present invention, and FIG. 5 is an exploded perspective view of the vibration J, j, /% of 7 is an exploded perspective view of the cage, FIG. 6 is an exploded perspective view of the package of the resonator according to another embodiment of the invention, and FIG. FIG. 8 is a side 1f) i-side view showing an example of the structure of a terminal plate (cap) for a package, and FIG. 8 is a side sectional view of a vibrator according to still another embodiment of the present invention. 1.] 1,21.90 is the vibrator・2'
, 12.22.93 is a vibration element, 6, 15, 25°94
is an electrode patterned on the vibrating element, 23°32.42
, 52.91 is a glass tube (insulated tube), 24.34, 44
, 54, 61, 65, 7n, 75°80.85.92 are caps, and 33, 43.53 are glass tube flat parts. One nest!寥 2 口 φ 寥 4 Figure 1

Claims (4)

[Claims] (1) In a piezoelectric vibrator in which a vibrator is built in an insulated tube through which a laser beam passes, the electrode of the vibrating element (the portion of the insulated tube facing the electrode) is formed with one main surface substantially parallel to the electrode. A piezoelectric vibrator that is characterized by (2) A patented vibrator characterized in that the insulating tube has a rectangular cross section. (3) The piezoelectric vibrator described in item (1) C above, characterized in that the cross section of the insulating tube is oval. (4) The piezoelectric vibration described in claim (1) above, wherein the vibrating element is a Strinop-type substrate cut from a LiTaO3 crystal plate, on which all desired electrode patterns are formed. Child.