JPS58172008A - Structure and manufacture of piezoelectric oscillator - Google Patents
Structure and manufacture of piezoelectric oscillatorInfo
- Publication number
- JPS58172008A JPS58172008A JP5592082A JP5592082A JPS58172008A JP S58172008 A JPS58172008 A JP S58172008A JP 5592082 A JP5592082 A JP 5592082A JP 5592082 A JP5592082 A JP 5592082A JP S58172008 A JPS58172008 A JP S58172008A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- electrode lead
- sealing body
- piezoelectric
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は大量生産によるコスト低減を[]的とした圧4
振動子の構造並びに製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention is a pressure-4 method aimed at cost reduction through mass production.
The present invention relates to the structure and manufacturing method of a vibrator.
圧′題振動子校びその封止構造は周知の如く形状、厚さ
及び表面状態を所定の値に加工した個別の圧電基板に夫
々電極を付着した後9個別に製作したペース中に突出す
るリード線に取り付は電気的接続及び機械的保持を行い
蛾後書二封止管をかぶせて密封するのが一般的であった
。As is well known, the piezoelectric transducer's sealing structure is such that electrodes are attached to individual piezoelectric substrates processed to predetermined shapes, thicknesses, and surface conditions. It was common to attach the wire by making electrical connections and mechanically holding it, then covering it with a sealing tube and sealing it.
上述の工程からも明らかな如く圧電振動子の製造工程は
自動化が困難であり、従って高価なものとならざるを得
なかった。As is clear from the above-mentioned process, it is difficult to automate the manufacturing process of piezoelectric vibrators, and therefore the process has to be expensive.
本発明は上述の事情に鑑みてなされたものであって大面
横の圧電基板に多数の電極及び電極リード部を同時に付
着し、該電極付着面を餉紀電極リード部と対応する位置
に適当な面積の貫通孔又は切り欠きを有する前記圧電基
板とは望等しい面積の封止体で覆い、前記各電極の周辺
で前記圧電基板と接着した後、前記貫通孔のはゾ中央を
通る線で切断することによって電極リード部を前記封止
体側縁部に於いて露出せしめた量産に適し製造工程自動
化の極めてgmな圧電振動子及びその製造方法を提供す
ることを目的とする。The present invention has been made in view of the above-mentioned circumstances, and involves simultaneously attaching a large number of electrodes and electrode lead portions to a large horizontal piezoelectric substrate, and placing the electrode attachment surface at an appropriate position corresponding to the electrode lead portion. The piezoelectric substrate having a through hole or notch with a desired area is covered with a sealing member having the same area as desired, and after bonding to the piezoelectric substrate around each electrode, the through hole is formed by a line passing through the center of the hole. It is an object of the present invention to provide a piezoelectric vibrator which is suitable for mass production and whose manufacturing process is automated, and which has an electrode lead portion exposed at the side edge of the sealing body by cutting, and a method of manufacturing the same.
以F本発明を実施例を示す図面に基づいて詳細に説明す
る。Hereinafter, the present invention will be explained in detail based on drawings showing embodiments.
第1図(a) 、 (b)は夫々本発明に係る圧(振動
子の構造を示す断面図及び斜視図である。FIGS. 1(a) and 1(b) are a sectional view and a perspective view, respectively, showing the structure of a pressure vibrator according to the present invention.
呻ち、水晶素板1の両面に夫々電極2,3を付着した水
晶振動子をこれと軸を揃え、且つ前記水晶素板1の中央
部にわすかな空隙を与えるよう凹部を設けた水晶板4及
び5によってチンドイツテした構造を有するものである
。而して前記水晶板4及び5の夫々2縁には切り欠き6
゜7及び8,9を設は該切り欠きに於いて前記電橋2及
び3から夫々砥びる゛(極リード部10及び11を露出
せしめ、これを電子回路と接続するものである。A crystal resonator having electrodes 2 and 3 attached to both sides of the crystal plate 1 is aligned with the crystal resonator, and a recess is provided in the center of the crystal plate 1 to provide a slight gap. It has a structure in which 4 and 5 are tied together. There are notches 6 on each of the two edges of the crystal plates 4 and 5.
7, 8, and 9 are cut out from the electric bridges 2 and 3, respectively (to expose the pole lead portions 10 and 11 and connect them to an electronic circuit).
しかしながら、第1図の構成のみでは前記切り欠考部6
及び7に於ける圧電振動子素板が外力により破損する可
能性が大であるから第2図(a)に示す如きコの字状の
金具11であって片持部分のLド中央部をへの字状に彎
曲させたものを前記切り欠き部を有する縁部に嶽入し導
電性接着剤等で固定した構造とする。その断面図及び斜
視図を夫々12図(b)及び(C)に示す。However, with only the configuration shown in FIG.
Since there is a high possibility that the piezoelectric vibrator element plate in 7 and 7 will be damaged by external force, it is necessary to use a U-shaped metal fitting 11 as shown in FIG. The structure is such that a curved part is inserted into the edge having the notch and fixed with a conductive adhesive or the like. A cross-sectional view and a perspective view thereof are shown in FIGS. 12(b) and 12(C), respectively.
斯くすることによって本発明の振動子は電極リード部の
破損を考慮することなしに各種の姿勢で特にリードをと
ることなくプリント基板に配置することが=J能となる
。By doing so, the vibrator of the present invention can be placed on a printed circuit board in various postures without taking any leads, without considering damage to the electrode lead portions.
第3図は第2図に示した実施の変形を示す断面図であっ
て、前記金具11の代りに前記切り欠き6及び7を有す
る縁部を導電性接着剤にディップして接着剤層12”で
核部な埋めたものである。FIG. 3 is a cross-sectional view showing a modification of the embodiment shown in FIG. 2, in which the edge portion having the cutouts 6 and 7 is dipped in a conductive adhesive instead of the metal fitting 11, and an adhesive layer 12 is formed. ” This is the core of the story.
尚1本発明は以上説明した如き両面に電極を有する圧電
振動子のみならず114図に示す如く弾性表向波振動子
13のように片面のみに電極を有する振動子の電極面に
対して適用することもできる。1. The present invention is applicable not only to the piezoelectric vibrator having electrodes on both sides as described above, but also to the electrode surface of a vibrator having electrodes on only one side, such as the surface acoustic wave vibrator 13 shown in FIG. 114. You can also.
上述の如きチンドイッチ構造によって圧電振動子素板の
四隅を固定してしまう構成をとる場合に於いて前記封止
体4及び5を圧電振動子素板と同一材質としその軸を揃
えれば熱膨張は均一であるから振動子素板に対する応力
の間−はないが高価となる。In the case where the four corners of the piezoelectric vibrator element plate are fixed by the above-mentioned chindwitch structure, if the sealing bodies 4 and 5 are made of the same material as the piezoelectric vibrator element plate and their axes are aligned, thermal expansion can be prevented. Since it is uniform, there is no stress on the vibrator element plate, but it is expensive.
そこで封止体をガラスで構成すると共に圧電振動子を第
5図又は46図に示す如き構造としてもよい。Therefore, the sealing body may be made of glass and the piezoelectric vibrator may have a structure as shown in FIG. 5 or 46.
即ち、圧電振動子素板1の内部に所要のスリット14,
148Lび15,15を例えばエツチング等によって形
成しこれらスリットによって包囲される中心部分16に
゛唯極17を付着することによって前記素板1の中心部
16のみを振動に関与せしめ、これと最外周の固定部と
の間をクッションとして用いる圧′flL振動子を使用
する。That is, the required slits 14,
By forming the slits 15, 15 by etching, for example, and attaching the sole pole 17 to the center portion 16 surrounded by these slits, only the center portion 16 of the blank plate 1 is allowed to participate in vibration, and this and the outermost periphery A pressure 'flL vibrator is used as a cushion between the fixed part and the fixed part.
JFr<フル、ニドによって振動子と封止体との膨張率
の差による振動子素板へのLISカは実用1問題となら
ないレベルまで低減することかり能である。When JFr<full, the LIS force on the vibrator element plate due to the difference in expansion coefficient between the vibrator and the sealing body can be reduced to a level that does not pose a practical problem.
尚、′@6図に示す如く前記ス’)yト14が一直であ
る場合であって2例えばJt 4 MyをA T’カッ
トの水晶とすれば当該カットの圧力に対する周波数変動
零の点、即ち、 軸に対し60@父は1201の位置
にスリット外周部と振動部16との結合部な設は核部を
介して電極リードを延ばすようにすれば応力の影響を回
避することかでさる。In addition, as shown in Figure 6, when the above-mentioned S')y 14 is straight, for example, if Jt 4 My is an A T'-cut crystal, the point of zero frequency fluctuation with respect to the pressure of the cut, In other words, the connection between the slit outer periphery and the vibrating part 16 can be set at a position of 60@1201 with respect to the axis, so that the influence of stress can be avoided by extending the electrode lead through the core. .
次に本発明に係る圧電振動子の大量生産方法について第
7図及び第8図を用いて簡単(=説明する。Next, a method for mass producing piezoelectric vibrators according to the present invention will be briefly explained using FIGS. 7 and 8.
第7図はその製造工程を示す説明図であって大面晴の圧
電振動子基板1上に多数の振動子領域を縦横に整列させ
るよう所定のスリット14゜14、・・・・・・ ゛
を例えば基板が水晶ならエツチングで、基板が
セラミックスであればその成形時に形成し、然る後その
中心部に電極l)及び′磁極リード部18.18.・・
・・・・を蒸着或はメッキによって付着し、fに、@記
各電極をとりまくスリブ)14,14.・・・・・・喬
チ士1HP1の外周にガラス半田19.19.・・・・
・・をスクリーン印刷により付着する。FIG. 7 is an explanatory diagram showing the manufacturing process, in which predetermined slits 14, 14, .
For example, if the substrate is quartz, it is etched, or if the substrate is ceramic, it is formed during molding, and then the electrode l) and the 'magnetic pole lead part 18.18.・・・
. . . is attached by vapor deposition or plating, and on f, a sleeve surrounding each electrode) 14, 14. ...Glass solder on the outer periphery of Qiaochishi 1HP1 19.19.・・・・・・
... is attached by screen printing.
以上の如く加工した圧填振動子基板1の両面に前記基板
1上に多数形成した各振動子電極とこれをとりまくスリ
ットを密封しうる間隙20゜20、・・・・・・及び多
数の前記リード電極18.18.・−・−・・を露出せ
しめる切り欠き或はスリット21,21.・・・・・・
を所定の位置に設けたガラス封止板22をサンドイッチ
状に重ね真空又は所定の不活性ガス雰囲気中で加熱し、
前記ガラス半田19によって接着する。On both sides of the pressed vibrator substrate 1 processed as above, there are gaps 20° 20, which can seal the vibrator electrodes formed in large numbers on the substrate 1 and the slits surrounding them, Lead electrode 18.18. Cutouts or slits 21, 21 .・・・・・・
The glass sealing plates 22 with the
The glass solder 19 is used for adhesion.
然る後にこのサンドイツチ板を的記゛電極す−ド部を露
出するスリブ)21,21.・・・・・・のはゾ中央部
を通る線に沿ってカッタで切断し、sS図に示r如く本
発明のチップ振動子が多数−列に並んだサンドイツチ板
23を製造fる。After that, this sandwich plate is attached to the target (slabs exposing the electrode board parts) 21, 21. . . . is cut with a cutter along a line passing through the center of the plate to produce a sandwich plate 23 in which a large number of chip vibrators of the present invention are lined up in rows as shown in Fig. sS.
前記サンドイツチ板23の成手方向両夛イドに、金属薄
板をコの字型にプレスすると同時(二その自由縁に等間
隔に所定幅の切り込みを入れ。At the same time, a thin metal plate is pressed into a U-shape on both sides of the sanderch plate 23 in the direction of construction (cuts of a predetermined width are made at equal intervals on the free edges thereof).
これを屈曲して電極リード部との接触片24.24゜・
・・・・・としたリード端子部材25を嵌入して導電性
接着剤で固定した後切断すれば$2図に示す如きチップ
振動子を優ることがで与る。Bend this and make the contact piece with the electrode lead part 24.24°.
If a lead terminal member 25 of .
尚、前記リード端子部材25を前記サンドイツを板23
両側に嵌入する代も月;核部を導電性接着剤でディップ
した後切断すればIIs図に示す如陰チップ振動子とな
ることはいうまでもない。Note that the lead terminal member 25 is attached to the plate 23
Needless to say, if the core part is dipped in conductive adhesive and then cut, a similar chip vibrator as shown in Fig. IIs can be obtained.
父、連続している各振動子の封止されたチントインチ板
は必ずしもダイヤモンド・カッタの如きもので切断する
必要はなく1例えば封止体22の前記切断線上にV字状
切り欠きを設けておき圧迫(=よって折断するようにし
てもよい。It is not necessary to cut the sealed tint inch plate of each successive vibrator with a diamond cutter or the like; for example, a V-shaped notch may be provided on the cutting line of the sealing body 22. It may be possible to press it (=therefore break it).
このような切断手法をとる場合リード部材としては金属
性のものより導電性接着剤ディップによる方がよいこと
は明らかであろう。When using such a cutting method, it is clear that it is better to use a conductive adhesive dip as the lead member than a metal one.
本発明は以上説明した如く構成するのでチップ状の圧電
振動子を極めて安価に生産することが=I能となると共
に完成した振動子は他の電子回路を配置したプリント基
板への装着形態の自由度が大きいものとなり、電子回路
の小型化。Since the present invention is constructed as described above, it is possible to produce chip-shaped piezoelectric vibrators at extremely low cost, and the completed vibrator can be mounted freely on a printed circuit board on which other electronic circuits are arranged. The electronic circuits become smaller.
低価格化に著しい効果を発揮するものである。This has a remarkable effect on lowering prices.
第1図(a)及び(b)は夫々本発明のチップ振動子封
止体の断面図及び斜視図、第2図(a)及び(b)は夫
々第1図の振動子封止体に金属製リード部材を嵌着した
状態を示す断面図及び斜視図、同図(C)は前記金属性
リート部材の斜視図、第3図は前配り一ド部材を導電性
接着剤ディップで盛り上げた構成を示す断面図、第4図
は本発明を弾性表面波共振子に適用した実施例を示す断
面図。
第5図及び第6図は夫々本発明のチップ振動子として用
いる振動子の相異なる構造の実施例を示す図、第7図は
本発明のチップ振動子製造工程の説明図、88図はリー
ド部材装着工程の説明図である。
l・・圧4振動子、4,5・・封止体
6、7.8及び9・・・切り欠き、10,11.及び1
8・・・リード電極、11.・・・金属性リード部材1
2 ・・・導電性接着剤、21 ・・・電極リート部露
出用孔又は切り欠きFIGS. 1(a) and (b) are a sectional view and a perspective view, respectively, of the chip resonator sealed body of the present invention, and FIGS. 2(a) and (b) are respectively the oscillator sealed body of FIG. 1. A cross-sectional view and a perspective view showing a state in which a metal lead member is fitted, FIG. 3 (C) is a perspective view of the metal lead member, and FIG. FIG. 4 is a cross-sectional view showing an embodiment in which the present invention is applied to a surface acoustic wave resonator. 5 and 6 are diagrams showing examples of different structures of the resonator used as the chip resonator of the present invention, FIG. 7 is an explanatory diagram of the chip resonator manufacturing process of the present invention, and FIG. 88 is a lead It is an explanatory view of a member attachment process. 1... Pressure 4 vibrator, 4, 5... Sealing body 6, 7.8 and 9... Notch, 10, 11. and 1
8... Lead electrode, 11. ...Metallic lead member 1
2... Conductive adhesive, 21... Hole or cutout for exposing the electrode lead part
Claims (1)
て密封する封止体と一体化させると共に1記封止体周縁
部の前記圧電振動子電極リード部との交叉部を所定面積
だけ切り欠き、前記電極リード部を露出させたことを特
徴と−する圧電振動子の構造。 (匂 前記圧電振動子を密封収納した封止体の前記切り
欠き部を有する縁端部を金属製リード部材に嵌入すると
共に、これと前記電極9−ド部とを電気的に接続したこ
とを特徴とする特許請求の範囲1記載の圧電振動子の構
造。 (8) 前記圧電振動子の密封収納した封止体の少な
くとも前記切り欠き部を有する縁端部に導電性接着剤を
付着することによって前記電極リード部と外部回路との
電気的接纏向を形成したことを特徴とする特許請求のI
I囲1記砿の圧電振動子の構造。 (4)多数の電極及び電極リード部を付着した所定形状
の圧電基板の両面又は片面に該基板と実質的に同一形状
であって予じめ前記電極リード部に対応する位置に貫通
孔或は切り欠き又はこれら両者を設けた圧゛鑞振動子封
止体を接着した後、これを前記封止体の各貫通孔のはゾ
中央部を通って切断し個別の封止された圧′罐振動子を
得るようにしたことを特徴とする圧電振動子の製造方法
。 (5) 前記封止体の各貫通孔のはゾ中央部を通る一
切断線に相当する部分に予じめV字状溝を刻んでおき政
情を境に折断することによって封止された多数の圧電振
動子を有する一枚の板状体からカッタを用いることなく
個別の封止された圧電振動子を得ることを特徴とする圧
電振動子の製造方法。[Scope of Claims] (1) The piezoelectric vibrator is integrated with a sealing body that seals the entire peripheral edge of both surfaces or one side thereof, and the piezoelectric vibrator electrode lead portion of the peripheral edge of the sealing body is integrated with the piezoelectric vibrator. A structure of a piezoelectric vibrator, characterized in that a predetermined area of the intersection portion is cut out to expose the electrode lead portion. (O) The edge portion having the notch portion of the sealing body that hermetically houses the piezoelectric vibrator is fitted into a metal lead member, and this and the electrode portion are electrically connected. The structure of a piezoelectric vibrator according to claim 1, characterized in that: (8) A conductive adhesive is attached to at least an edge portion having the notch portion of a sealed body in which the piezoelectric vibrator is hermetically housed. According to claim I, the electrical contact between the electrode lead portion and an external circuit is formed by
I Box 1 Structure of a piezoelectric vibrator. (4) Through-holes or through-holes are formed on both or one side of a piezoelectric substrate having a predetermined shape to which a large number of electrodes and electrode lead portions are attached, and which have substantially the same shape as the substrate and are placed in advance at positions corresponding to the electrode lead portions. After adhering a pressure resonator sealing body provided with a notch or both, it is cut through the center of each through hole of the sealing body to form individual sealed pressure cans. A method for manufacturing a piezoelectric vibrator, characterized in that a vibrator is obtained. (5) Each through-hole of the sealing body has a large number of sealed holes by cutting a V-shaped groove in advance at a portion corresponding to a cutting line passing through the center of the sealing body and cutting it at the political situation. A method for manufacturing a piezoelectric vibrator, characterized in that individual sealed piezoelectric vibrators are obtained from a single plate-shaped body having a piezoelectric vibrator without using a cutter.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5592082A JPS58172008A (en) | 1982-04-02 | 1982-04-02 | Structure and manufacture of piezoelectric oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5592082A JPS58172008A (en) | 1982-04-02 | 1982-04-02 | Structure and manufacture of piezoelectric oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58172008A true JPS58172008A (en) | 1983-10-08 |
Family
ID=13012539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5592082A Pending JPS58172008A (en) | 1982-04-02 | 1982-04-02 | Structure and manufacture of piezoelectric oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58172008A (en) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6082831U (en) * | 1983-11-10 | 1985-06-08 | 松下電器産業株式会社 | piezoelectric vibrator |
JPS613515A (en) * | 1984-06-18 | 1986-01-09 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
JPS613514A (en) * | 1984-06-18 | 1986-01-09 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
JPS61212908A (en) * | 1985-03-18 | 1986-09-20 | Matsushita Electric Ind Co Ltd | Manufacture of piezoelectric ceramic vibrator |
JPS62133424U (en) * | 1986-02-12 | 1987-08-22 | ||
JPS6378425U (en) * | 1986-11-07 | 1988-05-24 | ||
JPH025929U (en) * | 1988-06-24 | 1990-01-16 | ||
JPH0257621U (en) * | 1988-10-20 | 1990-04-25 | ||
JPH02180417A (en) * | 1988-12-30 | 1990-07-13 | Tdk Corp | Piezoelectric component |
JPH033839U (en) * | 1989-06-02 | 1991-01-16 | ||
JPH033842U (en) * | 1989-06-02 | 1991-01-16 | ||
JPH03113908A (en) * | 1990-03-30 | 1991-05-15 | Tdk Corp | Piezoelectric component |
JP2007174661A (en) * | 2005-12-23 | 2007-07-05 | S-Cera Co Ltd | Surface-mounted resonator having cap means using insulated ceramic base boards, and its formation method |
WO2016076361A1 (en) * | 2014-11-14 | 2016-05-19 | 日本碍子株式会社 | Piezoelectric device |
JP2017059918A (en) * | 2015-09-15 | 2017-03-23 | リバーエレテック株式会社 | Crystal resonator and manufacturing method therefor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5534575A (en) * | 1978-09-01 | 1980-03-11 | Matsushima Kogyo Co Ltd | Piezo-vibrator |
JPS5610723A (en) * | 1979-07-05 | 1981-02-03 | Suisse Horlogerie | Electronic element and method of manufacturing same |
-
1982
- 1982-04-02 JP JP5592082A patent/JPS58172008A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5534575A (en) * | 1978-09-01 | 1980-03-11 | Matsushima Kogyo Co Ltd | Piezo-vibrator |
JPS5610723A (en) * | 1979-07-05 | 1981-02-03 | Suisse Horlogerie | Electronic element and method of manufacturing same |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6082831U (en) * | 1983-11-10 | 1985-06-08 | 松下電器産業株式会社 | piezoelectric vibrator |
JPS613515A (en) * | 1984-06-18 | 1986-01-09 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
JPS613514A (en) * | 1984-06-18 | 1986-01-09 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
JPS61212908A (en) * | 1985-03-18 | 1986-09-20 | Matsushita Electric Ind Co Ltd | Manufacture of piezoelectric ceramic vibrator |
JPS62133424U (en) * | 1986-02-12 | 1987-08-22 | ||
JPS6378425U (en) * | 1986-11-07 | 1988-05-24 | ||
JPH025929U (en) * | 1988-06-24 | 1990-01-16 | ||
JPH0257621U (en) * | 1988-10-20 | 1990-04-25 | ||
JPH02180417A (en) * | 1988-12-30 | 1990-07-13 | Tdk Corp | Piezoelectric component |
JPH033839U (en) * | 1989-06-02 | 1991-01-16 | ||
JPH033842U (en) * | 1989-06-02 | 1991-01-16 | ||
JPH03113908A (en) * | 1990-03-30 | 1991-05-15 | Tdk Corp | Piezoelectric component |
JP2007174661A (en) * | 2005-12-23 | 2007-07-05 | S-Cera Co Ltd | Surface-mounted resonator having cap means using insulated ceramic base boards, and its formation method |
WO2016076361A1 (en) * | 2014-11-14 | 2016-05-19 | 日本碍子株式会社 | Piezoelectric device |
JP2017059918A (en) * | 2015-09-15 | 2017-03-23 | リバーエレテック株式会社 | Crystal resonator and manufacturing method therefor |
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