JPS6150413A - Manufacture of piezoelectric vibrator - Google Patents

Manufacture of piezoelectric vibrator

Info

Publication number
JPS6150413A
JPS6150413A JP17303984A JP17303984A JPS6150413A JP S6150413 A JPS6150413 A JP S6150413A JP 17303984 A JP17303984 A JP 17303984A JP 17303984 A JP17303984 A JP 17303984A JP S6150413 A JPS6150413 A JP S6150413A
Authority
JP
Japan
Prior art keywords
frame
container
covers
crystal
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17303984A
Other languages
Japanese (ja)
Inventor
Hozumi Nakada
穂積 中田
Tsutomu Yamakawa
務 山川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP17303984A priority Critical patent/JPS6150413A/en
Publication of JPS6150413A publication Critical patent/JPS6150413A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To manufacture a piezoelectric vibrator with a small height and high quality by holding a piezoelectric chip connected at leat with a couple of leads in a space between a set of covers applied with molten glass on a frame upper face, bonding incorporatedly frame upper faces to form a package and leading the lead from the side face of the package externally to mount directly the main body without requiring any terminal hole to the circuit board. CONSTITUTION:A peripheral of both ends of a crystal chip 11 is faced to a holding arm 18 of a lead frame 15, they are connected electrically mechanically by a conductive adhesives to form a crystal chip 21 with frame. All convers 7a, 7b or a sintered glass applied to the upper face of a frame 8 are heated by a heater to transform one set of covers 7a, 7b into molten glass, said crystal chip 21 with a frame is fixed in a space by holding both short sides of the frame 14 by a holder, each outer surface of one set of covers 7a, 7b is applied with a weight in the plate face direction of the crystal chip 11 shown in the arrow (p) of one set of the covers 7a, 7b to bond the frame upper face of the covers 7a, 7b and to seal them thereby forming a package 24.

Description

【発明の詳細な説明】 (産業上の利用分野) 不発・明は、一組の蓋体からなる容器内に圧電片を封入
した圧電振動子の製造方法をこ係るもので、特に通信機
器等の電子機器の自動生産化に適し、回路基板に直接装
着(サーフェスマウントと称される。)でき、高さ寸法
が小さな圧電振動子の製造方法に関する。
[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a method for manufacturing a piezoelectric vibrator in which a piezoelectric piece is enclosed in a container consisting of a set of lids, and is particularly applicable to communication equipment, etc. The present invention relates to a method for manufacturing a piezoelectric vibrator that is suitable for automated production of electronic devices, can be directly mounted on a circuit board (referred to as surface mount), and has a small height dimension.

(従来技術) 一般に、単結晶体からなる圧電振動子特に水晶振動子は
、共振特性を概略決定するQ値が極めて高いことから、
旧来より通信機器の発振子、共振子として、重用されて
きた。第2図は、この種の水晶振動子の構成を示し、気
密を保つための金属カバーを除去した従来例の一断面図
である。図中1は両主面の中央部から両端に延出する電
極2が形成された円板形状ATカット水晶片で、3は一
対のリード端子4がガラス5により絶縁されて主面を貫
通した金属ベース、6は前記リード端子4の一端にスポ
ット溶接等をこより接続され、コイル状に巻回された先
端部にて前記水晶片2を挟持するクリップ材である。
(Prior art) In general, piezoelectric resonators made of single crystals, especially crystal resonators, have an extremely high Q value that roughly determines their resonance characteristics.
It has traditionally been used as an oscillator or resonator in communication equipment. FIG. 2 shows the structure of this type of crystal resonator, and is a sectional view of a conventional example in which a metal cover for maintaining airtightness is removed. In the figure, 1 is a disk-shaped AT-cut crystal piece on which electrodes 2 are formed extending from the center of both main surfaces to both ends, and 3 is a pair of lead terminals 4 insulated by glass 5 that penetrate through the main surfaces. A metal base 6 is a clip member that is connected to one end of the lead terminal 4 by spot welding or the like, and holds the crystal piece 2 at its tip wound into a coil.

(従来技術の問題点及び背景) ところで、近年、水晶振動子は上述した通信機器のみな
らず、例えば時計など、基準時間源を必要とする民生用
の各種電子機器に多用されるに至っている。そして、こ
れらの各種電子機器は、小型化指向に加え、−機種に他
機能を持たせるべく自動部品挿入機等により各部品を高
密化配設し、自動生産化、による生産コスト低減化及び
高品質を計っている。このため、各部品は高品質である
ことは勿論、例えば抵抗コンデンサ、■C等のチップ状
部品が自動生産化、小型化に適したものとして望まれる
ことになる。しかし、水晶振動子は、機器の心臓部とも
いえ、決してその性能を損なってはならず、旧態依然と
して、前述したように金属ベース3と金属カバーとなる
容器内に水晶片守を封入して気密を保ち、その特性を維
持する構成のものが主流をなしている。従って、この水
晶振動子は図示しない回路基板に装着する際、端子孔を
必要とするので、リード線の長さ分その高さ寸法は大き
く、又回路基板の有効な利用ができず、各種電気機器の
部品としては不適切なものとなっている。このため、例
えば、水晶片令を絶縁体からなる平板状の容器内に封入
し、容器の側面からリード線を導出したり、あるいは容
器の表面にメタライズ電極を形成したりして、回路基板
に容器1   本体を直接装着でき自動化に適した平板
状の圧電振動子が開発研究されている。しかし、これら
のものは絶縁体の容器を形成する際、例えば封止部に焼
結ガラスを施しこれを加熱し密封封止する場合、容器内
(こ封入された水晶片がこの熱の影響を受け、例えばキ
ューリ温度573℃以上の熱が加わった時(こは結晶転
移のため水晶片の圧電作用が損・なわれ、その品質の低
下を期たしてしまう問題があった。
(Problems and Background of the Prior Art) In recent years, crystal oscillators have been widely used not only in the above-mentioned communication devices, but also in various consumer electronic devices such as watches, which require a reference time source. In addition to the trend toward miniaturization, these various electronic devices are also becoming more compact, with each component placed in a higher density using automatic component inserters, etc., in order to provide other functions to the model, and automated production, which reduces production costs and increases efficiency. Measuring quality. For this reason, it is desired that not only each component be of high quality, but also chip-shaped components such as resistor capacitors and Cs that are suitable for automatic production and miniaturization. However, the crystal oscillator can be said to be the heart of the device, and its performance must never be compromised, and the old-fashioned method is still used, as mentioned above, by enclosing a crystal holder inside the container that serves as the metal base 3 and metal cover to ensure an airtight seal. The mainstream is one with a configuration that maintains this characteristic. Therefore, when this crystal resonator is mounted on a circuit board (not shown), terminal holes are required, so the height dimension is large due to the length of the lead wire, and the circuit board cannot be used effectively. It is unsuitable as a component of equipment. For this reason, for example, a crystal piece may be sealed in a flat container made of an insulator, and lead wires may be led out from the side of the container, or metallized electrodes may be formed on the surface of the container to attach the crystal to the circuit board. Container 1 A flat piezoelectric vibrator that can be attached directly to the main body and is suitable for automation is being developed and researched. However, when forming an insulating container, for example, when applying sintered glass to the sealing part and heating it to seal it, the inside of the container (the enclosed crystal piece is not affected by this heat). For example, when heat above the Curie temperature of 573° C. is applied, the piezoelectric effect of the crystal piece is impaired due to crystal transition, leading to a decline in its quality.

(発明の目的) そこで、本発明は、回路基板に端子孔を必要とせず本体
を直接装着でき高さ寸法が小さく且つ高品質な圧電振動
子を製造できる圧電振動子の製造方法を提供するもので
ある。
(Object of the Invention) Therefore, the present invention provides a method for manufacturing a piezoelectric vibrator, which allows the main body to be directly attached to a circuit board without requiring terminal holes, and which can manufacture a piezoelectric vibrator with a small height dimension and high quality. It is.

(発明の解決手段の特徴) 本発明は、少なくとも一対のリード線が接続された圧電
片を、板面の周辺に形成された枠上面に溶融ガラスが施
され対向する一組の蓋体間に中空状に保持し、前記一組
の蓋体の枠上面同士を一体的をこ接合して容器を形成す
ると同時に、前記容器内に前記圧電片を封入し、且つ前
記容器の側面がら前記リード線を外部に導出したことを
特徴とするものである。
(Characteristics of the Solution Means of the Invention) The present invention provides a piezoelectric piece to which at least one pair of lead wires are connected, and a piezoelectric piece connected to at least one pair of lead wires, which is coated with molten glass on the upper surface of a frame formed around a plate surface, and which is placed between a pair of opposing lid bodies. A container is formed by integrally joining the top surfaces of the frames of the pair of lids in a hollow shape, and at the same time, the piezoelectric piece is enclosed in the container, and the lead wire is inserted from the side surface of the container. is characterized in that it is derived to the outside.

(発明の詳細な説明) 第1図は、本発明の圧電振動子の製造方法に係る実施例
の概要を示す図で、板面の周辺に枠8を有し対向する一
組の蓋体7a、7bの間に、リードフレーム付水晶片2
1を中空状に保持し、水晶片11の画板面側から加熱し
た前記枠8の上面同士を接近させて接合し、一体的に圧
電振動子を形成する製造方法を示すものである。
(Detailed Description of the Invention) FIG. 1 is a diagram showing an outline of an embodiment of the piezoelectric vibrator manufacturing method of the present invention, in which a pair of lid bodies 7a having a frame 8 around a plate surface and facing each other are shown. , 7b, the crystal piece 2 with lead frame
1 is held in a hollow shape, and the upper surfaces of the frame 8 heated from the screen surface side of the crystal piece 11 are brought close to each other and joined to form a piezoelectric vibrator integrally.

(発明の実施例) 以下、本発明の一実施例を第3図以降の図を参照して詳
細に説明する。尚、前述した第1図と第4図(c)とは
同一図面で、説明の便宜上重複して図示しである。
(Embodiment of the Invention) Hereinafter, an embodiment of the present invention will be described in detail with reference to FIG. 3 and subsequent figures. Note that FIG. 1 and FIG. 4(c) described above are the same drawing, and are shown redundantly for convenience of explanation.

先ず、第3図により本発明の構成部品について説明する
。第3図(a)は後述する方法により形成される容器2
4を構成する一組の蓋体7a 、7bを示し、この蓋体
7 a + 7 bは、例えばセラミック等の絶縁体か
らなり、板面の周辺に枠8が形成され、一つの対向する
枠上面にはそれぞれ一対づつの切り溝9が施されている
ものである。図中、黒点印は枠8の上面に施された焼結
ガラス10で、容器Uを形成する際の封止材となるため
のものである。
First, the components of the present invention will be explained with reference to FIG. FIG. 3(a) shows a container 2 formed by the method described later.
This lid body 7a + 7b is made of an insulator such as ceramic, and has a frame 8 formed around the plate surface, and one opposing frame. Each of the upper surfaces is provided with a pair of grooves 9. In the figure, the black dots indicate the sintered glass 10 applied to the upper surface of the frame 8, which serves as a sealing material when forming the container U.

第3図缶)は容器Uに封入されるATカットの円板形状
の水晶片11の図で、両主面の中央から延出して両端部
に折り返し電極12が形成されたものである。第3図(
C)は、水晶片11を保持して容器の側面から外部に導
出される一対のリード線13a、13bをフレーム14
の短辺間に配したリードフレーム】5を示し、このリー
ドフレーム15は例えばプレス加工等により形成される
。そして、リード線13a。
FIG. 3 (can) is a diagram of an AT-cut disc-shaped crystal piece 11 enclosed in a container U, in which folded electrodes 12 are formed at both ends extending from the center of both main surfaces. Figure 3 (
C) holds the crystal piece 11 and connects the pair of lead wires 13a and 13b led out from the side of the container to the frame 14.
A lead frame 15 is shown disposed between the short sides of the lead frame 15, and this lead frame 15 is formed by, for example, press working. And the lead wire 13a.

13bは、フレーム14内にて、それぞれ対向するコ字
形内部リード線16の中央から突起部17を介して、前
記水晶片11の両端外周を電気的・機械的に接続する保
持アーム18が形成され、コ字形の連結部両端には熱及
び機械的な衝撃を考慮した屈曲部19が形成され、コ字
形の両端からは工学状連結した外部端子加が形成されて
いる。
13b, a holding arm 18 is formed in the frame 14 to electrically and mechanically connect the outer periphery of both ends of the crystal piece 11 from the center of the opposing U-shaped internal lead wires 16 via a protrusion 17. Bent parts 19 are formed at both ends of the U-shaped connection part in consideration of thermal and mechanical shock, and external terminals connected in an engineering manner are formed from both ends of the U-shape.

以下、上述した構成部品を使用した圧電振動子の製造方
法を記載する。先ず、第4図(a)に示したように、水
晶片11の両端外周をリードフレーム15の保持用アー
ム18に対面させ図示しない導電性接着剤により、電気
的・機械的に接続してフレーム付水晶片21を形成する
。尚、このとき、保持用アームの両端に設けた拡がり領
域nに導電性接着剤を施し、水晶片11の対向面のみな
らず側面及び主面にも導電性接着剤が施されるようにす
る。次に第4図(b)に示したように、例えば図示しな
い真空吸着機等により、それぞれの外表面を吸着して溝
9の位置が対応する枠上面同士を対向させて互いに離間
させる。そして、例えば図示しない加熱器により、蓋体
7a 、7bの全体あるいは直接、枠8の上面に施され
た焼結ガラス10に熱を加え溶融ガラス23とする。次
に、第4図(c)に示したように互いに離間して対向し
た一組の蓋体7a、7bとの間に、前記フレーム付水晶
片21をフレーム14の両短辺を図示しない保持器によ
り中空状に保持して固定する。尚、このとき、フレーム
付水晶片21の保持用アーム18に水晶片11を接続し
た互いに逆となるコ字形の内部リード線16はその外周
が蓋体7a 、7bの内周壁と接しない程度に接近して
位置し、外部端子20の工学状結合部が各溝9に嵌入す
るように配置されているものである。次に、第4図(d
)に示したように、水晶片11の画板面側に、位置した
一組の蓋体7a 、7bのそれぞれ外表面を矢印pで示
す水晶片11の板面方向に加重し一組の蓋体7a 、7
bの枠上面を接合して封止し容器24を形成する。そし
て、同時に、前記容器U内をこは水晶片11が封入され
るとともに、一つの対向する側面から容器外周を周回す
るフレーム14と接続したままの外部端子20が導出さ
れる。尚、容器24を形成する際、枠上面の溶融ガラス
23が容器内外に流出し、外形寸法に誤差を生じたり、
又、水晶片11に付着し振動特性に悪影響を及ぼしたり
するのを防止するため、例えば第5図に示したようをこ
、一組の蓋体7a、7bの枠8の内壁及び外壁に周回す
る段差面26を形成してもよい。そして、最後に、第4
図(e)の側面図に示したように、容器24を  1周
回するフレーム14のみを外部端子20から切断分離し
、例えば、外部端子2oの先端側に形成した切り欠き2
5により、両側面から一方の主面側に折曲して平板状の
水晶振動子を完成させる。
A method of manufacturing a piezoelectric vibrator using the above-mentioned components will be described below. First, as shown in FIG. 4(a), the outer circumferences of both ends of the crystal piece 11 are made to face the holding arms 18 of the lead frame 15, and are connected electrically and mechanically with a conductive adhesive (not shown) to form a frame. The attached crystal piece 21 is formed. At this time, a conductive adhesive is applied to the expanding areas n provided at both ends of the holding arm, so that the conductive adhesive is applied not only to the opposing surface of the crystal piece 11 but also to the side and main surfaces. . Next, as shown in FIG. 4(b), the respective outer surfaces are suctioned using, for example, a vacuum suction machine (not shown), and the upper surfaces of the frames corresponding to the positions of the grooves 9 are made to face each other and separated from each other. Then, using, for example, a heater (not shown), heat is applied to the sintered glass 10 applied to the entire lids 7a, 7b or directly to the upper surface of the frame 8 to form molten glass 23. Next, as shown in FIG. 4(c), the frame-equipped crystal piece 21 is held at both short sides (not shown) of the frame 14 between a pair of lids 7a and 7b facing each other and separated from each other. Hold it in a hollow shape with a container and fix it. At this time, the opposite U-shaped internal lead wires 16 connecting the crystal piece 11 to the holding arm 18 of the frame-attached crystal piece 21 are connected to such an extent that their outer peripheries do not touch the inner peripheral walls of the lids 7a and 7b. The external terminals 20 are located close to each other and are arranged so that the engineered coupling portions of the external terminals 20 fit into the respective grooves 9. Next, Figure 4 (d
), the outer surfaces of the pair of lids 7a and 7b positioned on the screen side of the crystal blank 11 are loaded in the direction of the plate surface of the crystal blank 11 as indicated by the arrow p, and a pair of lids 7a, 7
The upper surface of the frame b is joined and sealed to form the container 24. At the same time, the crystal piece 11 is sealed inside the container U, and the external terminal 20 is led out from one opposing side surface while being connected to the frame 14 that goes around the outer periphery of the container. In addition, when forming the container 24, the molten glass 23 on the top surface of the frame may flow into and out of the container, causing errors in the external dimensions,
In addition, in order to prevent it from adhering to the crystal piece 11 and adversely affecting the vibration characteristics, for example, as shown in FIG. Alternatively, a stepped surface 26 may be formed. And finally, the fourth
As shown in the side view of Figure (e), only the frame 14 that goes around the container 24 once is cut and separated from the external terminal 20, and, for example, a notch 2 is formed on the tip side of the external terminal 2o.
Step 5, the crystal resonator is bent from both sides to one main surface to complete a flat crystal resonator.

(実施例の作用、効果) 従って、この実施例においては、容器内に水晶片11を
封入した後、容器を密封封止したのではなく、枠上面に
溶融ガラス23が施され対向する蓋体間に独立して形成
されたフレーム付水晶片を中空状に保持して、一体的に
圧電振動子を形成したので、枠」−面に施した焼結ガラ
スを溶融する際の熱エネルギーが水晶片11に伝達する
ことを防止できる。又、枠上面同士を接合させて容器2
4を一体的に形成する際、水晶片IIには外部端子2o
を介してフレーム14が容器外に導出されているので、
溶融ガラス23の熱エイ・ルキ゛−は、このフレーム1
4ニより外部に放熱され易い。更に、容器内にては内部
リード1s16に屈曲部]9を形成し熱伝導路を長くし
であるので、水晶片11番こ伝達される熱エネルギーが
減衰される。尚、容器24が一体的に形成される際、フ
レーム14を冷却する装置を設けておけば更によいこと
は言うまでもない。(但し、急激な冷却は却って溶融ガ
ラスによる枠上面同士の接着を悪化させ密封度を損なわ
せさせるので、充分な注意を必要とする。)従って、水
晶片】1を容器内(こ封入し、容器を封止する際の熱エ
ネルギーをこより水晶片11が悪影響を受けることがな
く、例えばキューり温度573℃以上となりその結晶構
造に変化をきたし水晶片11の圧電作用が損なわれるこ
とがない。
(Operations and Effects of Embodiment) Therefore, in this embodiment, the molten glass 23 is applied to the upper surface of the frame, and the lid body facing Since the piezoelectric vibrator is integrally formed by holding a hollow crystal piece with a frame formed independently between them, the thermal energy when melting the sintered glass applied to the frame surface is absorbed by the crystal piece. It can be prevented from being transmitted to the piece 11. Also, the top surfaces of the frames are joined together to form a container 2.
4, the external terminal 2o is attached to the crystal blank II.
Since the frame 14 is led out of the container via
The heat beam of the molten glass 23 is
Heat is dissipated to the outside more easily than 4D. Further, in the container, the internal lead 1s16 is formed with a bent portion 9 to lengthen the heat conduction path, so that the thermal energy transmitted to the crystal blank 11 is attenuated. It goes without saying that it would be better if a device for cooling the frame 14 is provided when the container 24 is integrally formed. (However, rapid cooling will actually worsen the adhesion of the molten glass between the top surfaces of the frames and impair the sealing, so sufficient care must be taken.) Therefore, the crystal piece] 1 is placed in a container (sealed in The crystal blank 11 is not adversely affected by the thermal energy when sealing the container, and the piezoelectric action of the crystal blank 11 is not impaired due to a change in crystal structure due to a cue temperature of 573° C. or higher, for example.

(発明の効果) 以上の構成(こより、本発明は、回路基盤に端子孔を必
要とせず、本体を直接装着でき、高さ寸法が小さく且つ
高品質の圧電振動子を製造できる。
(Effects of the Invention) Based on the above configuration, the present invention does not require terminal holes on the circuit board, allows the main body to be directly mounted, and makes it possible to manufacture a piezoelectric vibrator with a small height and high quality.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の主要部を示す圧電振動子の製造工程
を示す図である。第2図は圧電振動子の従来例を示す一
断面図である。第3図は本発明の圧電振動子の製造方法
に係る構成部品図、第4図は本発明の製造方法を示すた
めの各工程を示す図である。第5図は一組の蓋体の他の
変形例を示す図である。 7a、7b・・・蓋体、8・・・枠、9・・・溝、10
・・・焼結ガラス、1J・・・水晶片、12・・・折り
返し電極、13a、13b・・・リード線、14・・・
フレーム、15・・・リードフレーム、16・・・内部
リード線、17・・・突起部、18・・・保持用アーム
、19・・・折曲部、20・・・外部端子、21・・・
フレーム付水晶片、22・・・拡がり領域、23・・・
溶融ガラス、24・・・容器、25・・・切り欠き、2
6・・・段差面。 第1図 第3隣((1)      第2111*41a) 第4図(b) 第4図(C) 第4図(e) jlrs図
FIG. 1 is a diagram showing the manufacturing process of a piezoelectric vibrator showing the main part of the present invention. FIG. 2 is a sectional view showing a conventional example of a piezoelectric vibrator. FIG. 3 is a diagram of components related to the method of manufacturing a piezoelectric vibrator of the present invention, and FIG. 4 is a diagram showing each step of the method of manufacturing a piezoelectric vibrator of the present invention. FIG. 5 is a diagram showing another modification of the set of lids. 7a, 7b... Lid body, 8... Frame, 9... Groove, 10
...Sintered glass, 1J...Crystal piece, 12...Folded electrode, 13a, 13b...Lead wire, 14...
Frame, 15...Lead frame, 16...Internal lead wire, 17...Protrusion, 18...Holding arm, 19...Bending portion, 20...External terminal, 21...・
Crystal piece with frame, 22... Expansion area, 23...
Molten glass, 24... Container, 25... Notch, 2
6...Step surface. Figure 1 3rd neighbor ((1) 2111*41a) Figure 4 (b) Figure 4 (C) Figure 4 (e) jlrs diagram

Claims (1)

【特許請求の範囲】[Claims] 少なくとも一対のリード線が接続された圧電片を、板面
の周辺に形成された枠上面に溶融ガラスが施され対向す
る一組の蓋体間に中空状態に保持し、前記一組の蓋体の
枠上面を接合して容器を形成すると同時に、前記容器内
に前記水晶片を封入し且つ前記容器の側面から前記リー
ド線を導出して一体的に形成したことを特徴とする圧電
振動子の製造方法。
A piezoelectric piece to which at least one pair of lead wires is connected is held in a hollow state between a pair of opposing lid bodies, each of which has a molten glass applied to the upper surface of a frame formed around the plate surface. A piezoelectric vibrator characterized in that a container is formed by joining the upper surfaces of the frames of the piezoelectric vibrator, and at the same time, the crystal piece is enclosed in the container, and the lead wire is led out from the side surface of the container. Production method.
JP17303984A 1984-08-20 1984-08-20 Manufacture of piezoelectric vibrator Pending JPS6150413A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17303984A JPS6150413A (en) 1984-08-20 1984-08-20 Manufacture of piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17303984A JPS6150413A (en) 1984-08-20 1984-08-20 Manufacture of piezoelectric vibrator

Publications (1)

Publication Number Publication Date
JPS6150413A true JPS6150413A (en) 1986-03-12

Family

ID=15953068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17303984A Pending JPS6150413A (en) 1984-08-20 1984-08-20 Manufacture of piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPS6150413A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0256359U (en) * 1988-10-19 1990-04-24
JPH11195687A (en) * 1997-12-27 1999-07-21 Nippon Seiko Kk Substrate transportation device
WO2007023685A1 (en) * 2005-08-22 2007-03-01 Seiko Epson Corporation Piezoelectric device
JP2007150336A (en) * 2007-01-09 2007-06-14 Nsk Ltd Substrate transporting apparatus
US8476811B2 (en) 2010-08-07 2013-07-02 Nihon Dempa Kogyo Co., Ltd. Piezoelectric device with tuning-fork type piezoelectric vibrating piece
JP2016131279A (en) * 2015-01-13 2016-07-21 セイコーエプソン株式会社 Vibrator, oscillator, electronic apparatus and mobile object

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850816A (en) * 1981-09-21 1983-03-25 Tokyo Denpa Kk Crystal oscillator
JPS5850813A (en) * 1981-09-21 1983-03-25 Tokyo Denpa Kk Manufacture of crystal oscillator
JPS59126653A (en) * 1983-01-07 1984-07-21 Murata Mfg Co Ltd Method and structure for sealing electronic component

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850816A (en) * 1981-09-21 1983-03-25 Tokyo Denpa Kk Crystal oscillator
JPS5850813A (en) * 1981-09-21 1983-03-25 Tokyo Denpa Kk Manufacture of crystal oscillator
JPS59126653A (en) * 1983-01-07 1984-07-21 Murata Mfg Co Ltd Method and structure for sealing electronic component

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0256359U (en) * 1988-10-19 1990-04-24
JPH11195687A (en) * 1997-12-27 1999-07-21 Nippon Seiko Kk Substrate transportation device
WO2007023685A1 (en) * 2005-08-22 2007-03-01 Seiko Epson Corporation Piezoelectric device
US7745979B2 (en) 2005-08-22 2010-06-29 Seiko Epson Corporation Piezoelectric device
JP2007150336A (en) * 2007-01-09 2007-06-14 Nsk Ltd Substrate transporting apparatus
US8476811B2 (en) 2010-08-07 2013-07-02 Nihon Dempa Kogyo Co., Ltd. Piezoelectric device with tuning-fork type piezoelectric vibrating piece
JP2016131279A (en) * 2015-01-13 2016-07-21 セイコーエプソン株式会社 Vibrator, oscillator, electronic apparatus and mobile object

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