JP2016131279A - Vibrator, oscillator, electronic apparatus and mobile object - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibrator capable of reducing stress generated in a vibration piece.SOLUTION: A vibrator 100 includes: a pair of supports 20a and 20b; a substrate 40 for supporting the pair of supports 20a and 20b; and vibration piece 10 mounted to the pair of supports 20a and 20b. Extension directions of the supports 20a and 20b, include: a component in a first direction and a component in a direction on an opposite side to the first direction; a component in a second direction having an orthogonal relation with respect to the first direction and a component in a direction on an opposite side to the second direction; and a component in a third direction having an orthogonal relation with respect to the first direction and the second direction.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a vibrator, an oscillator, an electronic device, and a moving object.

  Conventionally, a resonator element using quartz is known. Such a resonator element is widely used as a reference frequency source, an oscillation source, and the like for various electronic devices because of excellent frequency temperature characteristics. The resonator element is accommodated in a package made of ceramics or the like.

  In such a resonator element, stress may be generated due to a difference in thermal expansion coefficient between the package and the resonator element due to external temperature change or heat applied by reflow during mounting. Further, for example, when an impact is applied to the package, stress may be generated in the resonator element. Since the frequency fluctuates when stress is generated in the resonator element, a support structure that can reduce the stress generated in the resonator element is required.

  For example, Patent Document 1 discloses a technique for reducing stress generated in a crystal resonator by providing a support member in the same plane as the center of the crystal and incorporating an annular buffer structure in the support member.

  Further, for example, in Patent Document 2, a supporter that supports a crystal vibrating piece holds a stress sensitivity zero axis that minimizes a frequency change with respect to the stress of the crystal vibrating piece. A technique for minimizing the change in the above is disclosed.

JP 2005-528829 A JP 2009-188718A

  However, in the conventional support structure described above, the stress generated in the vibrating piece may not be sufficiently reduced, and a support structure that can further reduce the stress generated in the vibrating piece is desired.

  One of the objects according to some aspects of the present invention is to provide a vibrator that can reduce stress generated in a resonator element. Another object of some embodiments of the present invention is to provide an oscillator, an electronic device, and a moving body including the vibrator described above.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following aspects or application examples.

[Application Example 1]
The vibrator according to this application example is
A pair of support parts;
A substrate for supporting the pair of support portions;
A vibrating piece attached to a pair of the support parts;
With
The extending direction of the support part is
A component in a first direction and a component in a direction opposite to the first direction;
A component in a second direction orthogonal to the first direction and a component in a direction opposite to the second direction;
A component in a third direction orthogonal to the first direction and the second direction;
including.

  In such a vibrator, the extending direction of the support portion has a component in the first direction and its opposite direction, a component in the second direction and its opposite direction, and a component in the third direction. The part can have a degree of freedom in these directions. That is, the support portion can be deformed in the first direction and its opposite direction, the second direction and its opposite direction, and the third direction and its opposite direction. Therefore, in such a vibrator, the stress generated in the vibration piece can be relaxed by the deformation of the support portion. Therefore, in such a vibrator, it is possible to reduce the stress generated in the vibrator element.

[Application Example 2]
In the vibrator according to this application example,
The support part is
A first beam portion having one end side supported by the substrate and extending to have a component along the first direction;
A second beam portion extending from the other end side of the first beam portion to have a component along the second direction;
A third beam portion extending from the tip side of the second beam portion so as to have a component along a direction opposite to the first direction so as to be aligned with the first beam portion;
A fourth beam portion extending from the tip side of the third beam portion so as to have a component along a direction opposite to the second direction so as to be aligned with the second beam portion;
A fifth beam portion connected to the distal end side of the fourth beam portion and extending to have a component along the third direction;
May be included.

  In such a vibrator, since the support portion includes the first to fifth beam portions, the first direction and its opposite direction, the second direction and its opposite direction, and the third direction and its opposite direction. Can be deformed in the direction.

[Application Example 3]
In the vibrator according to this application example,
The support part is
Extending from the distal end side of the fourth beam portion so as to have a component along the direction opposite to the first direction so as to be aligned with the first beam portion, the distal end side being connected to the fifth beam portion A sixth beam part,
A seventh beam portion extending from a distal end side of the fifth beam portion along a plane including the first direction and the second direction;
Including
The vibrating piece may be supported by the seventh beam portion.

  In such a vibrator, since the support portion further includes the sixth beam portion and the seventh beam portion, the structure is more easily deformed, and the stress generated in the resonator element can be further reduced.

[Application Example 4]
In the vibrator according to this application example,
The pair of support portions may be in a rotationally symmetric positional relationship in plan view.

  In such a vibrator, the pair of support portions have a rotationally symmetric positional relationship, so that the resonator element can be supported with a good balance.

[Application Example 5]
In the vibrator according to this application example,
The pair of support parts are connected to a frame part,
A pair of said support parts may be arrange | positioned inside the said frame part.

  In such a vibrator, the stress generated in the vibrator element can be reduced.

[Application Example 6]
In the vibrator according to this application example,
At least a part of the frame is attached to the substrate,
The pair of support portions may be supported by the substrate via the frame portion.

  In such a vibrator, for example, the pair of support portions can be more reliably supported by the substrate as compared with the case where the resonator element is directly attached to the substrate.

[Application Example 7]
In the vibrator according to this application example,
The pair of support portions may be configured by forming a conductive layer on a resin layer.

  In such a vibrator, for example, a conductive layer can be used as the wiring.

[Application Example 8]
The oscillator according to this application example is
The vibrator according to any one of the application examples;
A circuit element electrically connected to the vibrator;
It has.

  Such an oscillator can include a vibrator that can reduce stress generated in the resonator element.

[Application Example 9]
In the oscillator according to this application example,
A heating element may be provided.

  Since such an oscillator includes a heating element, for example, it is possible to reduce frequency fluctuation due to a temperature change in a use environment, and to increase frequency stability.

[Application Example 10]
In the oscillator according to this application example,
The heating element may be a transistor.

  In such an oscillator, the resonator element can be heated by the heat generated in the transistor.

[Application Example 11]
The electronic device according to this application example is
The vibrator according to any one of the application examples is provided.

  Such an electronic device can include a vibrator that can reduce stress generated in the resonator element.

[Application Example 12]
The mobile object according to this application example is
The vibrator according to any one of the application examples is provided.

  Such a moving body can include a vibrator that can reduce stress generated in the resonator element.

FIG. 3 is an exploded perspective view schematically showing the vibrator according to the first embodiment. FIG. 3 is a plan view schematically showing the vibrator according to the first embodiment. FIG. 3 is a cross-sectional view schematically showing the vibrator according to the first embodiment. The figure which shows a SC cut quartz substrate typically. The perspective view which shows typically the support part and frame part of the vibrator | oscillator which concern on 1st Embodiment. 6A is a cross-sectional view schematically showing the model M1, and FIG. 6B is a cross-sectional view schematically showing the model M2. FIG. 7A is a stress distribution diagram of the model M1 obtained by simulation, and FIG. 7B is a stress distribution diagram of the model M2 obtained by simulation. FIG. 6 is an exploded perspective view schematically showing a vibrator according to a first modification of the first embodiment. FIG. 6 is a plan view schematically showing a vibrator according to a first modification of the first embodiment. The perspective view which shows typically the support part of the vibrator | oscillator which concerns on the 1st modification of 1st Embodiment. The disassembled perspective view which shows typically the vibrator | oscillator which concerns on the 2nd modification of 1st Embodiment. The disassembled perspective view which shows typically the vibrator | oscillator concerning 2nd Embodiment. The perspective view which shows typically the support part and frame part of the vibrator | oscillator which concern on 2nd Embodiment. The top view which shows typically the vibrator | oscillator concerning 3rd Embodiment. Sectional drawing which shows typically the vibrator | oscillator concerning 3rd Embodiment. The top view which shows typically the vibrator | oscillator which concerns on the modification of 3rd Embodiment. FIG. 17A is a cross-sectional view schematically showing an oscillator according to the fourth embodiment, and FIG. 17B is a view taken along line BB in FIG. 17A. Sectional drawing which shows typically the oscillator which concerns on the modification of 4th Embodiment. FIG. 19A is a cross-sectional view schematically showing an oscillator according to the fifth embodiment, and FIG. 19B is a plan view schematically showing the oscillator according to the fifth embodiment. Sectional drawing which shows typically the oscillator which concerns on the modification of 5th Embodiment. The top view which shows typically the electronic device which concerns on 6th Embodiment. The perspective view which shows typically the electronic device which concerns on 6th Embodiment. The perspective view which shows typically the electronic device which concerns on 6th Embodiment. The perspective view which shows typically the electronic device which concerns on 6th Embodiment. The perspective view which shows typically the moving body which concerns on 7th Embodiment.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

1. 1. First embodiment 1.1. First, the vibrator according to the first embodiment will be described with reference to the drawings. FIG. 1 is an exploded perspective view schematically showing the vibrator 100 according to the first embodiment. FIG. 2 is a plan view schematically showing the vibrator 100 according to the first embodiment. 3 is a cross-sectional view schematically showing the vibrator 100 according to the first embodiment, and is a cross-sectional view taken along the line III-III in FIG.

  1 to 3, the vibrator 100 includes the resonator element 10, a pair of support portions 20 a and 20 b, a frame portion 30, a package (substrate) 40, and a lid (lid body) 50. Including. In FIG. 1, the lid 50 is not shown for convenience. In FIG. 2, the package 40 and the lid 50 are not shown for convenience.

  As the resonator element 10, an SC cut quartz substrate (piezoelectric substrate) formed of quartz is used. FIG. 4 is a diagram schematically showing the SC cut quartz crystal substrate 101.

Piezoelectric materials such as quartz are generally trigonal and have crystal axes (X, Y, Z) as shown in FIG. The X axis is an electrical axis, the Y axis is a mechanical axis, and the Z axis is an optical axis. The SC-cut quartz substrate 101 rotates a main surface orthogonal to the Y axis by an angle θ ₁ from the X axis in the Y axis direction around the Z axis, and a new Y ′ from the Z axis around the rotated new X ′ axis. axis (not shown) along a plane obtained by rotating theta ₂ in the direction, a flat plate cut from a piezoelectric material (e.g., synthetic quartz). Here, θ ₁ = 34 ° and θ ₂ = 22 °. Thus, the SC cut crystal substrate 101 is a so-called double rotation cut crystal substrate and has crystal axes (X ′, Y ″, Z ′). The SC cut quartz substrate 101 has a Z′X ′ plane (a plane including the Z ′ axis and the X ′ axis) orthogonal to the Y ″ axis as a main surface (excitation surface), and vibrates with thickness shear vibration as the main vibration. Can do. The SC piece quartz substrate 101 can be processed to obtain the resonator element 10. The shape of the resonator element 10 is, for example, a disk shape as shown in FIGS.

  The crystal piece according to the present invention is not limited to the SC cut crystal substrate, and can be widely applied to other piezoelectric substrates such as an AT cut crystal substrate and a BT cut crystal substrate which excite thickness shear vibration. The AT-cut quartz substrate is a flat plate cut from a piezoelectric material (for example, artificial quartz) along a plane obtained by rotating the XZ plane around the X axis by an angle θ. Here, θ = 35 ° 15 ′.

  As shown in FIG. 3, the resonator element 10 includes a first excitation electrode 12a, a second excitation electrode 12b, a first extraction electrode 14a, a second extraction electrode 14b, a first connection electrode 16a, and a second connection electrode. A connection electrode 16b.

  The first excitation electrode 12 a is provided at the center of the main surface on the front side of the resonator element 10. The planar shape of the first excitation electrode 12a is a circle. The first excitation electrode 12a is connected to the first connection electrode 16a via the first extraction electrode 14a.

  The second excitation electrode 12 b is provided at the center of the main surface on the back side of the resonator element 10. The second excitation electrode 12b is provided so as to face the first excitation electrode 12a with the vibrating piece 10 interposed therebetween. That is, the first excitation electrode 12 a and the second excitation electrode 12 b are provided so as to overlap the center portion of the resonator element 10 on the front and back sides. The second excitation electrode 12b is connected to the second connection electrode 16b through the second extraction electrode 14b.

The first connection electrode 16 a is provided on the main surface on the back side of the resonator element 10. The first connection electrode 16 a is provided on the outer periphery of the vibrating piece 10 (near the outer edge of the vibrating piece 10). The first connection electrode 16a is bonded to the first support portion 20a via the bonding material 2. The bonding material 2 is, for example, a conductive adhesive, and the first connection electrode 16 a and the first support portion 20 a are electrically and mechanically connected by the bonding material 2. The bonding material 2 includes the first connection electrode 16a and the first support portion 20a.
Can be electrically and mechanically connected to each other, and the conductive adhesive is not limited. For example, bumps using gold (Au) or solder may be used.

  The second connection electrode 16 b is provided on the main surface on the back side of the resonator element 10. The second connection electrode 16 b is provided on the outer periphery of the resonator element 10. The first connection electrode 16a and the second connection electrode 16b are disposed symmetrically with respect to the center of the resonator element 10 in plan view. The second connection electrode 16b is bonded to the second support portion 20b through the bonding material 2. The bonding material 2 is, for example, a conductive adhesive, and the second connection electrode 16b and the second support portion 20b are electrically and mechanically connected by the bonding material 2. Note that the bonding material 2 is not limited to a conductive adhesive as long as it can electrically and mechanically connect the second connection electrode 16b and the second support portion 20b. For example, gold (Au) or solder is used. It may be a bump.

  As the excitation electrodes 12a and 12b, the extraction electrodes 14a and 14b, and the connection electrodes 16a and 16b, for example, those obtained by laminating chromium and gold in this order from the vibrating piece 10 side are used.

  The resonator element 10 is attached to a pair of support portions 20a and 20b, and is supported at two points by the pair of support portions 20a and 20b. An imaginary straight line L connecting the two points of the vibrating piece 10 supported by the pair of support portions 20 a and 20 b is parallel to the X ′ axis, which is one of the crystal axes of the vibrating piece 10. In other words, the angle formed by the virtual straight line L and the X ′ axis is 0 °.

  In the illustrated example, the support portions 20 a and 20 b are bonded to the outer peripheral portion of the vibrating piece 10 with the bonding material 2 and support the vibrating piece 10 at the two locations. The virtual straight line L is, for example, in plan view, the center of the bonding surface between the first connection electrode 16a and the bonding material 2 (the region where the first connection electrode 16a and the bonding material 2 are in contact) and the second connection electrode. This is a straight line connecting 16b and the center of the joining surface of the joining material 2. Here, the X ′ axis is an axis that minimizes a change in vibration frequency with respect to stress. Therefore, since the imaginary straight line L is parallel to the X ′ axis, the change in the vibration frequency can be reduced even if stress is generated in the resonator element 10.

  The angle (acute angle) formed by the virtual straight line L and the X ′ axis may be 10 ° or less. Even in such a case, for example, compared with a case where the angle formed by the virtual straight line L and the X ′ axis is larger than 10 °, the change in the vibration frequency can be reduced even if stress is generated in the vibration piece 10. .

  The pair of support portions 20 a and 20 b are connected to the frame portion 30 and are supported by the package 40 via the frame portion 30. The pair of support portions 20 a and 20 b are disposed inside the frame portion 30.

  FIG. 5 is a perspective view schematically showing the support portions 20 a and 20 b and the frame portion 30. FIG. 5 illustrates the x axis, the y axis, and the z axis as three axes orthogonal to each other. In the illustrated example, the X ′ axis that is the crystal axis of the resonator element 10 is parallel to the y axis, the Y ″ axis is parallel to the z axis, and the Z ′ axis is parallel to the x axis. Note that the relationship between the crystal axes (X ′, Y ″, Z ′) of the resonator element 10 and the x, y, and z axes shown in FIG. 5 is not limited to the above example.

  The first support portion 20a has a plurality of beam portions (first beam portion 21a to seventh beam portion 27a). The extending direction of the first support portion 20a includes a component in the + x axis direction (first direction), a component in the −x axis direction opposite to the + x axis direction, a component in the + y axis direction (second direction), and -Y axis direction component and + z axis direction component (third direction) are included. A component in the extending direction of each beam portion 21a to 27a constituting the first support portion 20a is a component in the extending direction of the first support portion 20a.

The first beam portion 21a is supported by the package 40 at one end side (base side) via the frame portion 30, and extends so as to have a component along the + x-axis direction. That is, the extending direction of the first beam portion 21a has a component in the + x-axis direction. As for the 1st beam part 21a, the base side is connected to the frame part 30, and the front end side is connected to the 2nd beam part 22a.

  The second beam portion 22a extends from the other end side (front end side) of the first beam portion 21a so as to have a component along the + y-axis direction. That is, the extending direction of the second beam portion 22a has a component in the + y-axis direction. As for the 2nd beam part 22a, the base side is connected to the 1st beam part 21a, and the front end side is connected to the 3rd beam part 23a.

  The third beam portion 23a extends from the distal end side of the second beam portion 22a so as to have a component along the −x-axis direction opposite to the + x-axis direction so as to be aligned with the first beam portion 21a. That is, the extending direction of the third beam portion 23a has a component in the −x-axis direction. The third beam portion 23a and the first beam portion 21a are, for example, parallel. As for the 3rd beam part 23a, the base side is connected to the 2nd beam part 22a, and the front end side is connected to the 4th beam part 24a.

  The fourth beam portion 24a extends from the distal end side of the third beam portion 23a so as to have a component along the −y axis direction opposite to the + y axis direction so as to be aligned with the second beam portion 22a. That is, the extending direction of the fourth beam portion 24a has a component in the −y axis direction. The fourth beam portion 24a and the second beam portion 22a are, for example, parallel. As for the 4th beam part 24a, the base side is connected to the 3rd beam part 23a, and the front end side is connected to the 6th beam part 26a.

  The fifth beam portion 25a is connected to the distal end side of the fourth beam portion 24a via the sixth beam portion 26a, and extends so as to have a component along the + z-axis direction. That is, the extending direction of the fifth beam portion 25a has a component in the + z-axis direction. The fifth beam portion 25a further extends so as to have a component along the + y-axis direction. The fifth beam portion 25a has a base side connected to the sixth beam portion 26a and a distal end side connected to the seventh beam portion 27a.

  The sixth beam portion 26a extends from the distal end side of the fourth beam portion 24a so as to have a component along the −x-axis direction opposite to the + x-axis direction so as to be aligned with the first beam portion 21a. That is, the extending direction of the sixth beam portion 26a has a component in the −x-axis direction. The sixth beam portion 26a and the first beam portion 21a are, for example, parallel. The sixth beam portion 26a has a base side connected to the fourth beam portion 24a and a distal end side connected to the fifth beam portion 25a.

  The seventh beam portion 27a extends from the distal end side of the fifth beam portion 25a along a plane including the + x axis direction and the + y axis direction. In the first support portion 20a, the first to fourth beam portions 21a to 24a and the sixth beam portion 26a are located in the same plane (in the xy plane), and the seventh beam portion 27a is different from the xy plane. , Located in a (parallel) plane along the xy plane. In the illustrated example, the seventh beam portion 27a extends so as to have a component along the + y-axis direction in a plane along (parallel) the xy plane. That is, the extending direction of the seventh beam portion 27a has a component in the + y-axis direction.

  A wide portion 270a that is wider than the other portions is provided on the distal end side of the seventh beam portion 27a. The wide portion 270a is connected to the first connection electrode 16a through the bonding material 2. In the first support portion 20a, the wide portion 270a of the seventh beam portion 27a directly supports the vibrating piece 10.

  The first beam portion 21a to the seventh beam portion 27a are each provided in a straight line in plan view. In addition, each of the first beam portion 21a to the seventh beam portion 27a has a length in the extending direction that is longer than a length in the width direction (a direction orthogonal to the extending direction). The first beam portion 21a to the seventh beam portion 27a may have the same size in the width direction (a direction orthogonal to the extending direction), or may have different sizes in the width direction.

  The second support portion 20b has a plurality of beam portions (first beam portion 21b to seventh beam portion 27b). The extending direction of the second support portion 20b includes a + x-axis direction component, a -x-axis direction component opposite to the + x-axis direction, a + y-axis direction component, a -y-axis direction component, and a + z-axis direction. And a direction component.

The first support portion 20a and the second supporting portion 20b, relative to the center _{O 30} of the frame portion 30 in a plan view, a positional relationship of rotational symmetry. In the illustrated example, the first support portion 20a and the second support portion 20b are in a two-fold symmetrical positional relationship in plan view. In other words, when the first support portion 20a is rotated by 180 ° ((360 / n) °, n = 2) around O ₃₀ in plan view, the first support portion 20a overlaps the second support portion 20b. In other words, the first support portion 20a and the second support portion 20b have a point-symmetric positional relationship with the center O ₃₀ as the symmetry point in plan view.

  Therefore, the extending directions of the first beam portion 21b to the seventh beam portion 27b of the second support portion 20b are opposite to those of the first beam portion 21a to the seventh beam portion 27b of the first support portion 20a, respectively. Except for this point, the first beam portion 21b to the seventh beam portion 27b of the second support portion 20b have the same configuration as the first beam portion 21a to the seventh beam portion 27b of the first support portion 20a. .

Note that the first support portion 20 a and the second support portion 20 b may be in a rotationally symmetric positional relationship with respect to any point other than the center O ₃₀ of the frame portion 30. For example, the first support portion 20 and the second support portion 20b may be in a rotationally symmetric positional relationship with respect to the center of the vibrating piece 10 in plan view, or may be in the center of rigidity of the vibrating piece 10 in plan view. It may be in a rotationally symmetric positional relationship.

  The support portions 20a and 20b are provided so as to at least partially overlap the vibration piece 10 in plan view. In the illustrated example, a part of the first beam portion 21a of the first support portion 20a and the second beam portion 22a to the seventh beam portion 27a overlap the vibrating piece 10 in plan view. Further, a part of the first beam portion 21b of the second support portion 20b and the second beam portion 22b to the seventh beam portion 27b overlap the vibrating piece 10 in plan view. As described above, by providing the support portions 20a and 20b so as to overlap the vibrating piece 10 in a plan view, the size of the apparatus can be reduced as compared with the case where the support portions 20a and 20b do not overlap the vibrating piece 10 in a plan view. Can be planned.

  The support portions 20a and 20b are made of, for example, a TAB (Tape Automated Bonding) substrate. The support parts 20a and 20b are composed of, for example, a resin layer 4 made of an insulating resin made of polyimide or the like, and a conductive layer 6 formed on the resin layer 4 and made of a metal such as copper (Cu). Has been.

  The frame part 30 is formed in a frame shape. A pair of support portions 20 a and 20 b are disposed inside the frame portion 30. The frame part 30 and the support parts 20a and 20b are integrally formed, for example. The frame part 30 is composed of the resin layer 4 and the conductive layer 6 in the same manner as the support parts 20a and 20b.

  The frame portion 30 is bonded to the inner bottom surface 41 of the package 40 via the bonding material 8. The frame part 30 and the package 40 are joined at, for example, four locations. In the illustrated example, the planar shape of the frame portion 30 is a quadrangle, and is joined to the inner bottom surface 41 of the package 40 via the joining material 8 at the center of each side of the quadrangle. The frame portion 30 is separated from the inner bottom surface 41 of the package 40 by the thickness of the bonding material 8.

The conductive layer 6 of the first support portion 20a and the conductive layer 6 of the frame portion 30 constitute a wiring that is electrically connected to the bonding material 8a in the vicinity of the first support portion 20a. The conductive layer 6 of the frame portion 30 is electrically connected to the bonding material 8a through a through hole (not shown) provided in the resin layer 4. The wiring is electrically connected to a pad (not shown) provided on the inner bottom surface 41 of the package 40 via the bonding material 8a.

  Similarly, the conductive layer 6 of the second support portion 20b and the conductive layer 6 of the frame portion 30 constitute a wiring that is electrically connected to the bonding material 8b in the vicinity of the second support portion 20b. The conductive layer 6 of the frame portion 30 is electrically connected to the bonding material 8b through a through hole (not shown) provided in the resin layer 4. The wiring is electrically connected to a pad (not shown) provided on the inner bottom surface 41 of the package 40 via the bonding material 8b.

  The bonding materials 8a and 8b are, for example, conductive adhesive, bumps using gold (Au), solder, or the like. The bonding material 8 other than the bonding materials 8a and 8b may be the same conductive adhesive as the bonding materials 8a and 8b, a bump, or an insulating adhesive made of polyimide or the like. Good.

  Here, an example in which two support portions 20a and 20b are connected to one frame portion 30 and joined to the package 40 via the frame portion 30 has been described. 20a and 20b may be connected to separate members, respectively, and may be joined to the package 40 via the separate members.

  The package 40 accommodates the resonator element 10. The package 40 includes a bottom plate 42 and side walls 44 provided on the peripheral edge of the upper surface of the bottom plate 42.

  The package 40 has a recess 43. The recess 43 is a space surrounded by the plate-like bottom plate 42 and the frame-like side wall 44. The opening of the recess 43 is blocked by the lid 50. Thereby, a space for accommodating the resonator element 10 is formed. The space may be filled with an inert gas such as nitrogen gas, or may be in a reduced pressure state (vacuum) filled with a gas having a pressure lower than atmospheric pressure.

  On the side wall 44 of the package 40, for example, a seam ring 46 formed of an alloy such as Kovar is provided. The seam ring 46 functions as a bonding material for bonding the lid 50 and the side wall 44. The material of the package 40 is, for example, ceramics. The package 40 is formed, for example, by laminating and sintering green sheets molded into a predetermined shape.

  Two pads (not shown) are provided on the inner bottom surface 41 of the package 40. One of the two pads is electrically connected to the wiring composed of the first support portion 20 a and the conductive layer 6 of the frame portion 30 through the bonding material 8. The other of the two pads is electrically connected to the wiring composed of the second support portion 20 b and the conductive layer 6 of the frame portion 30 through the bonding material 8. The two pads are electrically connected to external connection terminals (not shown) formed on the outer bottom of the package 40, respectively.

  The lid 50 is a plate-like member and closes the opening of the recess 43 of the package 40. The lid 50 is, for example, a Kovar plate material. By using a Kovar plate material for the lid 50, the seam ring formed of Kovar and the lid 50 can be melted in the same state at the time of sealing. And it can be done reliably. As the lid 50, a metal material such as 42 alloy or stainless steel, or the same material as the side wall 44 of the package 40 may be used.

  For example, the vibrator 100 has the following characteristics.

In the vibrator 100, the extending direction of the first support portion 20a includes a component in the + x axis direction, a component in the −x axis direction opposite to the + x axis direction, and a component in the + y axis direction that is orthogonal to the + x axis direction. And a component in the −y axis direction opposite to the + y axis direction and a component in the + z axis direction orthogonal to the + x axis direction and the + y axis direction. Therefore, the 1st support part 20a can have a freedom degree with respect to these directions. That is, the first support portion 20a can be deformed in the ± x-axis direction, the ± y-axis direction, and the ± z-axis direction. Similarly, the second support portion 20b can be deformed in the ± x-axis direction, the ± y-axis direction, and the ± z-axis direction. Therefore, in the vibrator 100, the stress generated in the vibrating piece 10 can be relaxed by the deformation of the support portions 20a and 20b. Therefore, in the vibrator 100, it is possible to reduce the stress generated in the resonator element 10.

  Therefore, in the vibrator 100, for example, the stress generated in the resonator element 10 due to a difference in thermal expansion coefficient between the package 40 and the resonator element 10 due to a change in external temperature or heat applied by reflow during mounting is reduced. Can do. In the vibrator 100, for example, when an impact is applied to the package 40, the impact can be absorbed by the support portions 20a and 20b, and the stress generated in the support portions 20a and 20b can be reduced. Therefore, in the vibrator 100, it is possible to reduce the fluctuation of the frequency due to the stress generated in the resonator element 10.

  In the vibrator 100, the first support portion 20a is supported by the package 40 at one end side and extends so as to have a component along the + x axis direction, and the other end of the first beam portion 21a. A second beam portion 22a extending from the side so as to have a component along the + y-axis direction, and − on the opposite side to the + x-axis direction so as to be aligned with the first beam portion 21a from the distal end side of the second beam portion 22a. A third beam portion 23a extending so as to have a component along the x-axis direction, and a -y axis opposite to the + y-axis direction so as to be aligned with the second beam portion 22a from the distal end side of the third beam portion 23a A fourth beam portion 24a extending so as to have a component along the direction, and a fifth beam connected to the tip side of the fourth beam portion 24a and extending so as to have a component along the + z-axis direction Part 25a. As described above, in the vibrator 100, since the support portions 20a and 20b include the first to fifth beam portions 21a to 25a and 21b to 25b, the ± x axis direction, the ± y axis direction, and the ± z axis direction. Can be transformed into

  In the vibrator 100, the first support portion 20a further has a component along the −x-axis direction opposite to the + x-axis direction so as to be aligned with the first beam portion 21a from the distal end side of the fourth beam portion 24a. A sixth beam portion 26a whose tip side is connected to the fifth beam portion 25a, and a sixth beam portion 26a extending from the tip side of the fifth beam portion 25a along a plane including the + x-axis direction and the + y-axis direction. The vibrating piece 10 is supported by the seventh beam portion 27a. Therefore, the first support portion 20a has a structure that is more easily deformed, and the stress generated in the resonator element 10 can be further reduced. The same applies to the second support portion 20b.

  In the vibrator 100, the pair of support portions 20a and 20b have a rotationally symmetric positional relationship in plan view, and thus can support the resonator element 10 in a balanced manner.

  In the vibrator 100, the pair of support portions 20 a and 20 b are connected to the frame portion 30, and the pair of support portions 20 a and 20 b are disposed inside the frame portion 30. Further, at least a part of the frame portion 30 is attached to the package 40, and the pair of support portions 20 a and 20 b are supported by the package 40 via the frame portion 30. Therefore, for example, the pair of support portions 20 a and 20 b can be more reliably supported by the package 40 than when the vibrating piece 10 is directly attached to the package 40. In the vibrator 100, for example, workability can be improved in the manufacturing process as compared with the case where the first support portion 20a and the second support portion 20b are separately fixed to the inner bottom surface 41 of the package 40.

1.2. Examples Hereinafter, the present embodiment will be described with reference to examples, but the present invention is not limited thereto.

  In the present example, the model M1 and the model M2 were used to compare the thermal stress of the resonator element generated when the bonding material was cured.

  FIG. 6A is a cross-sectional view schematically showing the model M1. FIG. 6B is a cross-sectional view schematically showing the model M2.

  In the model M1, as shown in FIG. 6A, the ceramic substrate 1 and the resonator element 10 are connected via the frame portion 30 and the pair of support portions 20a and 20b (see FIG. 5). The frame part 30 and the ceramic substrate 1 are joined by the joining material 8. Further, the support portions 20 a and 20 b and the vibrating piece 10 are joined by the joining material 2. The bonding material 8 and the bonding material 2 are adhesives.

  In the model M2, as shown in FIG. 6B, the ceramic substrate 1 and the vibrating piece 10 are directly bonded by the bonding material 8. Both the model M1 and the model M2 are supported at two points on the outer peripheral portion of the resonator element 10.

  A simulation was performed on the thermal stress of the resonator element 10 generated when the bonding materials 2 and 8 were cured with respect to the models M1 and M2. FIG. 7A is a stress distribution diagram of the model M1 obtained by simulation. FIG. 7B is a stress distribution diagram of the model M2 obtained by simulation.

  From the two stress distribution diagrams shown in FIG. 7, it can be seen that the stress generated in the resonator element 10 is reduced in the model M1 compared to the model M2. Here, an SC cut quartz substrate is used as the vibrating piece 10, but the present invention can be similarly applied to other quartz substrates (for example, an AT cut quartz substrate, a BT cut quartz substrate).

1.3. Modification (1) First Modification First, a first modification of the vibrator according to the first embodiment will be described with reference to the drawings. FIG. 8 is an exploded perspective view schematically showing the vibrator 200 according to the first modification of the first embodiment. FIG. 9 is a plan view schematically showing the vibrator 200 according to the first modification of the first embodiment. FIG. 10 is a perspective view schematically showing the support portions 20a, 20b, 20c, 20d and the frame portion 30 of the vibrator 200 according to the first modification of the first embodiment. In FIG. 8, the lid 50 is not shown for convenience. In FIG. 9, the package 40 and the lid 50 are not shown for convenience.

  Hereinafter, in the vibrator 200 according to the first modification of the first embodiment, members having the same functions as those of the constituent members of the vibrator 100 according to the first embodiment described above are denoted by the same reference numerals, and details thereof are described. The detailed explanation is omitted.

  In the vibrator 100 described above, the resonator element 10 is supported at two points by two support portions 20a and 20b as shown in FIG.

  On the other hand, in the vibrator 200, as shown in FIGS. 8 and 9, the resonator element 10 is supported at four points by four support portions 20a, 20b, 20c, and 20d.

As shown in FIG. 10, the vibrator 200 includes a first support portion 20a, a second support portion 20b, a third support portion 20c, and a fourth support portion 20d. Support portions 20a, 20b, 20c
, 20d are bonded to the four locations of the outer periphery of the resonator element 10 by the bonding material 2, and support the resonator element 10 at the four locations. The bonding material 2 for bonding the third support portion 20c and the vibrating piece 10 and the bonding material 2 for bonding the fourth support portion 20d and the vibrating piece 10 may be an insulating adhesive.

  An imaginary straight line L connecting the two points of the resonator element 10 supported by the first support part 20a and the second support part 20b is, for example, parallel to the X ′ axis that is one of the crystal axes of the resonator element 10. . In addition, an imaginary straight line M connecting the two points supported by the third support portion 20c and the fourth support portion 20d of the resonator element 10 is parallel to, for example, the Z ′ axis that is one of the crystal axes of the resonator element 10. It is. The angle formed by the virtual straight line L and the virtual straight line M is, for example, 90 °.

  Here, as described above, the X ′ axis is an axis that minimizes a change in vibration frequency with respect to stress. Therefore, since the imaginary straight line L is parallel to the X ′ axis, the change in the vibration frequency can be reduced even if stress is generated in the resonator element 10. The Z ′ axis is an axis with a small change in vibration frequency with respect to stress. Therefore, since the imaginary straight line M is parallel to the Z ′ axis, the change in the vibration frequency can be reduced even if stress is generated in the resonator element 10.

  The angle (acute angle) formed by the virtual straight line M and the Z ′ axis may be 10 degrees or less. Even in such a case, for example, compared with a case where the angle formed by the virtual straight line M and the X ′ axis is larger than 10 °, a change in the vibration frequency can be reduced even if stress is generated in the vibration piece 10. . Further, as described above, the angle (acute angle) formed by the virtual straight line L and the Z ′ axis may be 10 degrees or less.

  The first support portion 20a has a plurality of beam portions (first beam portion 21a to eighth beam portion 28a).

  The eighth beam portion 28a is supported by the package 40 at one end side (base side) via the frame portion 30 and extends so as to have a component along the −y axis direction. That is, the extending direction of the eighth beam portion 28a has a component in the −y axis direction. As for the 8th beam part 28a, the base side is connected to the frame part 30, and the front end side is connected to the 1st beam part 21a.

  The first beam portion 21a extends from the distal end side of the eighth beam portion 28a so as to have a component along the + x-axis direction. As for the 1st beam part 21a, the base side is connected to the 8th beam part 28a, and the front end side is connected to the 2nd beam part 22a.

  The second beam portion 22a to the seventh beam portion 27a are the same as the example of the vibrator 100 described above, and the description thereof is omitted.

The first support portion 20a, the second support portion 20b, a third supporting portion 20c, a fourth supporting portion 20d with respect the center _{O 30} of the frame portion 30 in a plan view, a positional relationship of rotational symmetry. In the illustrated example, the first support portion 20a, the second support portion 20b, the third support portion 20c, and the fourth support portion 20d have a four-fold symmetrical positional relationship in plan view. In other words, in plan view, when the first support portion 20a is rotated 90 ° ((360 / n) °, n = 4) around O ₃₀ , the first support portion 20a overlaps with the third support portion 20c. If it overlaps with the support part 20b and further rotates by 90 °, it overlaps with the fourth support part 20d. The planar shape of the structure including the first support portion 20a, the second support portion 20b, the third support portion 20c, and the fourth support portion 20d is four-fold symmetric.

The second support part 20b has a plurality of beam parts 21b to 28b. The second supporting portion 20b in a plan view, the first support portion 20a, overlaps by causing 180 ° rotation about the center _{O 30} of the frame 30. Therefore, the extending directions of the first beam portion 21b to the eighth beam portion 28b of the second support portion 20b are opposite to those of the first beam portion 21a to the eighth beam portion 28b of the first support portion 20a, respectively. Except for this point, the first beam portion 21b to the eighth beam portion 28b of the second support portion 20b have the same configuration as the first beam portion 21a to the eighth beam portion 28a of the first support portion 20a. .

The third support portion 20c has a plurality of beam portions 21c to 28c. The third support portion 20c overlaps when the first support portion 20a is rotated 90 ° clockwise with respect to the center O ₃₀ in plan view. Therefore, the extending direction of the first beam portion 21c to the eighth beam portion 28c of the third support portion 20c is clockwise with respect to the extending direction of the first beam portion 21a to the eighth beam portion 28a of the first support portion 20a, respectively. The direction is rotated 90 °. That is, for example, the extension direction of the first beam portion 21a of the first support portion 20a is the + x axis direction, whereas the extension direction of the first beam portion 21c of the third support portion 20c is -y. Axial direction. Except for this point, the first beam portion 21c to the eighth beam portion 28c of the third support portion 20c have the same configuration as the first beam portion 21a to the eighth beam portion 28a of the first support portion 20a. .

The fourth support portion 20d has a plurality of beam portions 21d to 28d. The fourth support portion 20d overlaps when the first support portion 20a is rotated 90 ° counterclockwise with respect to the center O ₃₀ in plan view. Therefore, the extending directions of the first beam portion 21d to the eighth beam portion 28d of the fourth support portion 20d are opposite to the extending directions of the first beam portion 21a to the eighth beam portion 28a of the first support portion 20a, respectively. The direction is 90 ° clockwise. That is, for example, the extension direction of the first beam portion 21a of the first support portion 20a is the + x axis direction, whereas the extension direction of the first beam portion 21c of the fourth support portion 20d is the + y axis. Direction. Except for this point, the first beam portion 21d to the eighth beam portion 28d of the fourth support portion 20d have the same configuration as the first beam portion 21a to the eighth beam portion 28a of the first support portion 20a. .

  For example, the vibrator 200 has the following characteristics.

  The vibrator 200 can achieve the same effects as the vibrator 100 described above.

  Furthermore, the vibrator 200 includes first to fourth support portions 20a, 20b, 20c, and 20d, and the resonator element 10 is supported at four points. Therefore, in the vibrator 200, for example, the G sensitivity (gravity sensitivity) can be reduced as compared with the case where the resonator element 10 is supported at two points. Thereby, for example, the influence of gravity due to the posture of the vibrator 200 can be reduced.

(2) Second Modification Next, a second modification of the vibrator according to the first embodiment will be described with reference to the drawings. FIG. 11 is an exploded perspective view schematically showing a vibrator 300 according to a second modification of the first embodiment. In addition, in FIG. 11, illustration of the lid 50 is abbreviate | omitted for convenience. Hereinafter, in the vibrator 300 according to the second modification of the first embodiment, members having the same functions as those of the constituent members of the vibrator 100 according to the first embodiment described above are denoted by the same reference numerals, and details thereof are described. The detailed explanation is omitted.

  In the vibrator 100 described above, as illustrated in FIG. 1, the resonator element 10 has a disk shape.

  On the other hand, in the vibrator 200, as shown in FIG. 11, the resonator element 10 is a rectangular parallelepiped.

  Since the rectangular parallelepiped vibrating piece 10 can be formed by, for example, photolithography, the processing is easier than in the case where the vibrating piece 10 has a disk shape.

As shown in FIG. 11, the resonator element 10 is supported at two points by a pair of support portions 20a and 20b. In the illustrated example, the first support portion 20 a supports the vicinity of the center of one short side of the resonator element 10, and the second support portion 20 b supports the vicinity of the center of the other short side of the resonator element 10. . An imaginary straight line connecting the portions supported by the first support portion 20 a and the second support portion 20 b of the vibrating piece 10 is parallel to, for example, the X ′ axis that is one of the crystal axes of the vibrating piece 10. Thereby, even if stress arises in the vibration piece 10, the change of a vibration frequency can be made small.

  The vibrator 300 can achieve the same effects as the vibrator 100 described above.

  Although not shown, the resonator element 10 may be supported at four points by four support portions in the same manner as the vibrator 200 shown in FIG.

2. Second Embodiment Next, a vibrator 400 according to a second embodiment will be described with reference to the drawings. FIG. 12 is an exploded perspective view schematically showing the vibrator 400 according to the second embodiment. FIG. 13 is a perspective view schematically showing the support portions 20a and 20b and the frame portion 30 of the vibrator 400 according to the second embodiment. Hereinafter, in the vibrator 400 according to the second embodiment, members having the same functions as those of the constituent members of the vibrator 100 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the vibrator 100 described above, the support portions 20a and 20b are configured with linear beam portions 21a to 27a and 21b to 27b as shown in FIGS.

  On the other hand, in the vibrator 400, the support portions 20a and 20b are configured to include beam portions 422a and 422b that are curved in plan view, as shown in FIGS.

  As shown in FIG. 13, the first support portion 20a includes a first beam portion 421a to a fourth beam portion 424a.

  The first beam portion 421a is supported by the package 40 at one end side (base side) via the frame portion 30 and extends so as to have a component along the + x-axis direction. As for the 1st beam part 421a, the base side is connected to the frame part 30, and the front end side is connected to the 2nd beam part 422a.

  The second beam portion 422a is formed in a curved shape in plan view. The second beam portion 422a extends in a curved shape so as to have components along the + x axis direction, the + y axis direction, the -x axis direction, and the -y axis direction from the other end side (tip end side) of the first beam portion 421a. I'm out. That is, the extending direction of the second beam portion 422a includes a component in the ± x axis direction and a component in the ± y axis direction. As for the 2nd beam part 422a, the base side is connected to the 1st beam part 421a, and the front end side is connected to the 3rd beam part 423a.

  The third beam portion 423a is connected to the distal end side of the second beam portion 422a and extends so as to have a component along the + z-axis direction. That is, the extending direction of the third beam portion 423a includes a component in the + z-axis direction. As for the 3rd beam part 423a, the base side is connected to the 2nd beam part 422a, and the front end side is connected to the 4th beam part 424a.

  The fourth beam portion 424a extends along a plane including the + x axis direction and the + y axis direction from the distal end side of the third beam portion 423a. In the first support portion 20a, the first to third beam portions 421a to 423a are located in the same plane (in the xy plane), and the fourth beam portion 424a is different from the xy plane, along the xy plane. It is located in a plane (parallel). In the illustrated example, the fourth beam portion 424a extends so as to have a component along the + y-axis direction in a plane (parallel) along the xy plane.

A wide portion 425a that is wider than the other portions is provided on the distal end side of the fourth beam portion 424a. The wide portion 425a is connected to the first connection electrode 16a through the bonding material 2. In the first support portion 20a, the fourth beam portion 424a directly supports the vibrating piece 10.

  The second support portion 20b has a first beam portion 421b to a fourth beam portion 424b. The first support part 20a and the second support part 20b are in a two-fold symmetrical positional relationship in plan view. Therefore, the extending directions of the first beam portion 421b to the fourth beam portion 424b of the second support portion 20b are opposite to those of the first beam portion 421a to the fourth beam portion 424a of the first support portion 20a, respectively. Except for this point, the first beam portion 421b to the fourth beam portion 424b of the second support portion 20b have the same configuration as the first beam portion 421a to the fourth beam portion 424a of the first support portion 20a. .

  In the vibrator 400, the extending direction of the first support portion 20a includes a component in the + x axis direction, a component in the −x axis direction opposite to the + x axis direction, and a component in the + y axis direction that is orthogonal to the + x axis direction. And a component in the −y axis direction opposite to the + y axis direction and a component in the + z axis direction orthogonal to the + x axis direction and the + y axis direction. Therefore, the 1st support part 20a can have a freedom degree with respect to these directions. That is, the first support portion 20a can be deformed in the ± x-axis direction, the ± y-axis direction, and the ± z-axis direction. Similarly, the second support portion 20b can be deformed in the ± x-axis direction, the ± y-axis direction, and the ± z-axis direction. Therefore, in the vibrator 400, similarly to the vibrator 100, the stress generated in the vibrating piece 10 can be reduced by the deformation of the support portions 20a and 20b. Therefore, in the vibrator 400, the stress generated in the vibrating piece 10 can be reduced.

  In the vibrator 400, although not illustrated, the vibrating piece 10 may be a rectangular parallelepiped as in the vibrator 300 illustrated in FIG.

3. Third Embodiment 3.1. Next, a vibrator 500 according to the third embodiment will be described with reference to the drawings. FIG. 14 is a plan view schematically showing a vibrator 500 according to the third embodiment. FIG. 15 is a cross-sectional view schematically showing a vibrator 500 according to the third embodiment, and is a cross-sectional view taken along line XV-XV in FIG. In FIG. 14, for the sake of convenience, the resonator element 10 is shown through. In FIG. 14, the package 40 and the lid 50 are not shown for convenience.

  Hereinafter, in the vibrator 500 according to the third embodiment, members having the same functions as those of the constituent members of the vibrator 100 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the vibrator 500, as shown in FIGS. 14 and 15, the first support portion 20 a includes a first wide portion 210 a joined to the package 40, a second wide portion 212 a joined to the resonator element 10, It has two connection parts 214a and 216a that connect the first wide part 210a and the second wide part 212a.

  The first wide portion 210 a is bonded to the package 40 via the bonding material 8. The second wide portion 212 a is joined to the resonator element 10 via the joining material 2. The wide portions 210a and 212a are portions that are wider than the other portions (the beam portions 21a-1 to 27a-1 and 21a-2 to 27a-2) of the first support portion 20a.

  As shown in FIG. 14, the first connecting portion 214 a includes a first beam portion 21 a-1 to a seventh beam portion 27 a-1.

The first beam portion 21a-1 is connected to the first wide portion 210a, and + z from the first wide portion 210a.
It extends so as to have an axial component. The first beam portion 21a-1 further extends from the first wide portion 210a so as to have a component along the + y-axis direction. As for the 1st beam part 21a-1, the base side is connected to the 1st wide part 210a, and the front end side is connected to the 2nd beam part 22a-1.

  The second beam portion 22a-1 extends from the tip side of the first beam portion 21a-1 so as to have a component along the + x-axis direction. As for the 2nd beam part 22a-1, the base side is connected to the 1st beam part 21a-1, and the front end side is connected to the 3rd beam part 23a-1.

  The third beam portion 23a-1 extends so as to have a component along the + y-axis direction from the distal end side of the second beam portion 22a-1. As for the 3rd beam part 23a-1, the base side is connected to the 2nd beam part 22a-1, and the front end side is connected to the 4th beam part 24a-1.

  The fourth beam portion 24a-1 extends from the tip side of the third beam portion 23a-1 so as to have a component along the −x-axis direction so as to be aligned with the second beam portion 22a-1. As for the 4th beam part 24a-1, the base side is connected to the 3rd beam part 23a-1, and the front end side is connected to the 5th beam part 25a-1.

  The fifth beam portion 25a-1 extends from the tip side of the fourth beam portion 24a-1 so as to have a component along the −y-axis direction so as to be aligned with the third beam portion 23a-1. As for the 5th beam part 25a-1, the base side is connected to the 4th beam part 24a-1, and the front end side is connected to the 6th beam part 26a-1.

  The sixth beam portion 26a-1 extends from the distal end side of the fifth beam portion 25a-1 so as to have a component along the −x-axis direction so as to be aligned with the second beam portion 22a-1. The sixth beam portion 26a-1 has a base side connected to the fifth beam portion 25a-1 and a distal end side connected to the seventh beam portion 27a-1.

  The seventh beam portion 27a-1 extends from the distal end side of the sixth beam portion 26a-1 so as to have a component along the + y-axis direction so as to be aligned with the third beam portion 23a-1. The seventh beam portion 27a-1 has a base side connected to the sixth beam portion 26a-1 and a distal end side connected to the second wide portion 212a.

  The 2nd connection part 216a has the 1st beam part 21a-2-the 7th beam part 27a-2. The first connecting portion 214a and the second connecting portion 216a are line symmetric with respect to the virtual straight line L, for example, in plan view.

  Therefore, the extending directions of the beam portions 22a-2, 24a-2, and 26a-2 of the second connection portion 216a are the same as the beam portions 22a-1, 24a-1, and 26a-1 of the corresponding first connection portion 214a. The direction is opposite to the extending direction. Further, the extending directions of the other beam portions 21a-2, 23a-2, 25a-2, and 27a-2 of the second connecting portion 216a are respectively the beam portions 21a-1 and 23a- of the corresponding first connecting portion 214a. The direction is the same as 1, 25a-1, 27a-1.

  The second support part 20b connects the first wide part 210b joined to the package 40, the second wide part 212b joined to the resonator element 10, and the first wide part 210b and the second wide part 212b. Two connecting portions 214b and 216b.

The first support part 20a and the second support part 20b are in a two-fold symmetrical positional relationship in plan view. In other words, in a plan view, 180 ° about the center _{O 10} of the resonator element 10 of the first supporting portion 20a ((360 / n) ° , n = 2) is rotated, overlapping the second supporting portion 20b.

Therefore, the first beam portion 21b-1 to the seventh beam portion 27b-1 of the first connection portion 214b of the second support portion 20b are respectively the first beam portion 21a- of the first connection portion 214a of the first support portion 20a. The first to seventh beam portions 27a-1 and the extending direction are opposite to each other. Similarly, the second of the second support portion 20b
The first beam portion 21b-2 to the seventh beam portion 27b-2 of the connecting portion 216b are respectively the first beam portion 21a-2 to the seventh beam portion 27a-2 of the second connecting portion 216a of the first support portion 20a. The extending directions are opposite to each other.

Note that the first support portion 20 a and the second support portion 20 b may be in a rotationally symmetric positional relationship with respect to an arbitrary point other than the center O ₁₀ of the resonator element ₁₀ .

  The 1st support part 20a and the 2nd support part 20b may be comprised by the resin layer 4 and the conductive layer 6 (refer FIG. 3), or are comprised only by the conductive layer 6 comprised by the leaf | plate spring shape. May be.

  In the vibrator 500, the extending direction of the first support portion 20a includes a component in the + x axis direction, a component in the −x axis direction opposite to the + x axis direction, and a component in the + y axis direction that is orthogonal to the + x axis direction. And a component in the −y axis direction opposite to the + y axis direction and a component in the + z axis direction orthogonal to the + x axis direction and the + y axis direction. Therefore, the 1st support part 20a can have a freedom degree with respect to these directions. That is, the first support portion 20a can be deformed in the ± x-axis direction, the ± y-axis direction, and the ± z-axis direction. Similarly, the second support portion 20b can be deformed in the ± x-axis direction, the ± y-axis direction, and the ± z-axis direction. Therefore, in the vibrator 500, similarly to the vibrator 100, the stress generated in the vibrating piece 10 can be relaxed by the deformation of the support portions 20a and 20b. Therefore, in the vibrator 500, the stress generated in the vibrating piece 10 can be reduced.

Further, the vibrator 500, the planar shape of the planar shape and the second supporting portion 20b of the first supporting portion 20a, respectively, in a plan view, with respect to parallel virtual line as y-axis center _{O 10} (imaginary straight line L) It is line symmetric. The first support portion 20a and the second supporting portion 20b in a plan view, a line symmetrical with respect to parallel imaginary line centered O ₁₀ as x-axis. Therefore, in the vibrator 500, for example, the direction of displacement of the resonator element 10 due to gravitational acceleration can be made parallel to the x-axis direction, the y-axis direction, or the z-axis direction.

  Although not shown in the vibrator 500, the resonator element 10 may be a rectangular parallelepiped as in the vibrator 300 shown in FIG.

3.2. Modified Example Next, a modified example of the vibrator according to the third embodiment will be described with reference to the drawings. FIG. 16 is a plan view schematically showing a vibrator 600 according to this modification. In FIG. 16, for the sake of convenience, the resonator element 10 is shown through. In FIG. 16, the package 40 and the lid 50 are not shown for convenience.

  Hereinafter, in the vibrator 600 according to the modification of the third embodiment, members having the same functions as those of the constituent members of the vibrator 500 according to the third embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. To do.

  In the vibrator 500 described above, the resonator element 10 is supported at two points by the two support portions 20a and 20b as shown in FIG.

  On the other hand, in the vibrator 600, the resonator element 10 is supported at four points by four support portions 20a, 20b, 20c, and 20d as shown in FIG.

As shown in FIG. 16, the vibrator 600 includes a first support portion 20a, a second support portion 20b, a third support portion 20c, and a fourth support portion 20d. The support portions 20a, 20b, 20c, and 20d are joined to the four locations on the outer peripheral portion of the resonator element 10 with the joining material 2, respectively.
The vibrating piece 10 is supported at the place. The bonding material 2 for bonding the third support portion 20c and the vibrating piece 10 and the bonding material 2 for bonding the fourth support portion 20d and the vibrating piece 10 may be an insulating adhesive.

  An imaginary straight line L connecting the two points of the resonator element 10 supported by the first support part 20a and the second support part 20b is, for example, parallel to the X ′ axis that is one of the crystal axes of the resonator element 10. . In addition, an imaginary straight line M connecting the two points supported by the third support portion 20c and the fourth support portion 20d of the resonator element 10 is parallel to, for example, the Z ′ axis that is one of the crystal axes of the resonator element 10. It is.

  Here, as described above, since the X ′ axis and the Z ′ axis are axes whose frequency change is small with respect to the stress, the virtual straight line L is parallel to the X ′ axis, and the virtual straight line M is the Z ′ axis. Since the vibration piece 10 is stressed, the change in vibration frequency can be reduced.

  The third support part 20c connects the first wide part 210c joined to the package 40, the second wide part 212c joined to the resonator element 10, and the first wide part 210c and the second wide part 212c. Two connecting portions 214c and 216c.

  The fourth support portion 20d connects the first wide portion 210d joined to the package 40, the second wide portion 212d joined to the resonator element 10, and the first wide portion 210d and the second wide portion 212d. Two connecting portions 214d and 216d.

  The first support part 20a, the second support part 20b, the third support part 20c, and the fourth support part 20d have a four-fold symmetrical positional relationship in plan view.

  For example, the vibrator 600 has the following characteristics.

  The vibrator 600 can achieve the same effects as the vibrator 500 described above.

  Furthermore, the vibrator 600 includes first to fourth support portions 20a, 20b, 20c, and 20d, and the resonator element 10 is supported at four points. Therefore, in the vibrator 600, for example, the G sensitivity (gravity sensitivity) can be reduced as compared with the case where the resonator element 10 is supported at two points. Thereby, for example, the influence of gravity due to the posture of the vibrator 600 can be reduced.

Further, the vibrator 600, the planar shape of the planar shape and the second supporting portion 20b of the first supporting portion 20a, respectively, in a plan view, with respect to parallel virtual line as y-axis center _{O 10} (imaginary straight line L) It is line symmetric. The planar shape of the planar shape and the fourth supporting portion 20d of the third supporting part 20c, respectively, in a plan view, a line-symmetric with respect to the center O ₁₀ parallel virtual line as the x-axis (virtual straight line M). Furthermore, the first support portion 20a and the second support portion 20b are line symmetric with respect to the virtual straight line M in plan view. The third support portion 20c and the fourth support portion 20d are line symmetric with respect to the virtual straight line L in plan view. Therefore, in the vibrator 600, for example, the direction of displacement of the resonator element 10 due to gravitational acceleration can be made parallel to the x-axis direction, the y-axis direction, or the z-axis direction.

4). Fourth embodiment 4.1. Oscillator Next, an oscillator according to a fourth embodiment will be described with reference to the drawings. FIG. 17A is a cross-sectional view schematically showing an oscillator 700 according to the fourth embodiment. FIG. 17B is a view as seen from the line BB in FIG.

The oscillator 700 includes the vibrator according to the present invention. Hereinafter, an oscillator 700 including the vibrator 100 will be described as the vibrator according to the present invention. Hereinafter, in the oscillator 700, members having the same functions as the constituent members of the vibrator 100 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 17, the oscillator 700 includes a vibrator 100, a package 710, a lid 720, a connection plate 730, a mount 740, a heating element 750, and a circuit element 760.

  The vibrator 100 is fixed to the gantry 740 by four connection plates 730. The connection plate 730 also has a function as an electrical connection means with the excitation electrodes 12a and 12b of the vibrator 100.

  On the outer surface (back surface) of the bottom plate 42 of the package 40 of the vibrator 100 (hereinafter also referred to as “first package”), a terminal for making an electrical connection between the heat conduction layer 752 that is a metal layer and the heating element 750. An electrode 754 is provided. The heat conductive layer 752 and the terminal electrode 754 can be formed, for example, by plating nickel, gold, silver, or the like on a baked silver / palladium layer.

  The heat conductive layer 752 is provided to efficiently conduct the heat energy generated in the heating element 750 to the vibrator 100. Therefore, as shown in FIG. 17B, it is desirable that the outer edge of the heat conductive layer 752 be provided so that the outer edge of the heating element 750 is included therein. In other words, the outer edge of the heat conductive layer 752 is provided larger than the outer edge of the heating element 750 in plan view. By providing the heat conductive layer 752 in this manner, the heat energy generated by the heating element 750 can be diffused over a wide area by the heat conductive layer 752, and the bottom plate 42 of the first package 40 can be heated over a wide area. it can. Accordingly, the first package 40 can be heated at a uniform temperature, and the vibrating piece 10 can be stably heated.

  The package 710 (hereinafter also referred to as “second package”) includes a bottom plate 712 and a frame-like side wall 714 provided on the peripheral edge of the upper surface of the bottom plate 712. The second package 710 houses the vibrator 100, the heating element 750, the circuit element 760, and the like.

  The second package 710 has a recess 716. The recess 716 is a space surrounded by a plate-like bottom plate 712 and a frame-like side wall 714. The opening of the recess 716 is closed by the lid 720. Thereby, a space in which the resonator element 10, the heating element 750, the circuit element 760, and the like are accommodated is formed. The space may be filled with an inert gas such as nitrogen gas, or may be in a reduced pressure state (vacuum) filled with a gas having a pressure lower than atmospheric pressure.

  On the side wall 714 of the second package 710, for example, a seam ring (not shown) made of an alloy such as Kovar is provided. The seam ring functions as a bonding material for bonding the lid 720 and the side wall 714. The material of the second package 710 is, for example, ceramics. The second package 710 is formed, for example, by laminating and sintering green sheets molded into a predetermined shape.

  An electrode 762 is provided on the inner bottom surface 718 of the second package 710. The electrode 762 is formed by, for example, using a conductive paste such as silver / palladium or tungsten metallization, firing after forming a required shape, and then plating nickel, gold, silver, or the like. The electrode 762 is connected to the circuit element 760 by a metal wiring (bonding wire) 764. A plurality of electrodes 762 are provided, and those that are electrically connected to an external electrode (not shown) provided on the back surface of the bottom plate 712 are included.

  The heating element 750 is fixed to the heat conductive layer 752 with a resin adhesive or the like. The heating element 750 has a function of generating heat when energized. The heating element 750 is, for example, a transistor (power transistor). A pad (not shown) is provided on the main surface of the heating element 750, and the pad and the terminal electrode 754 are electrically connected by a metal wiring (bonding wire) 756.

  The circuit element 760 is disposed between the gantry 740 and the bottom plate 42 of the package 40, and is fixed to the bottom plate 42 with a conductive adhesive or the like. The circuit element 760 includes, for example, an oscillation circuit for causing the resonator element 10 of the vibrator 100 to oscillate, or a control circuit for controlling the temperature of the heating element 750. A pad electrode (not shown) is provided on the active surface of the circuit element 760, and the pad electrode and the electrode 762 are electrically connected by a metal wiring (bonding wire) 764. Note that the electrode 762 is electrically connected to each component such as the heating element 750 and the vibrator 100.

  The lid 720 is a plate-like member and closes the opening of the recess 716 of the package 710. The lid 720 is, for example, a Kovar plate material. By using a Kovar plate material for the lid 720, the seam ring formed of Kovar and the lid 720 can be melted in the same state at the time of sealing. And it can be done reliably. The lid 720 may be made of a metal material such as 42 alloy or stainless steel, or the same material as the side wall 714 of the package 710.

  In the oscillator 700, the vibrator 100 can be heated by the heating element 750. Thereby, the fluctuation | variation of the vibration frequency by the temperature change of use environment can be reduced, and frequency stability can be raised.

  Since the oscillator 700 includes the vibrator 100, the stress generated in the resonator element 10 can be reduced. Therefore, in the oscillator 700, it is possible to reduce the fluctuation of the frequency due to, for example, an external temperature change, heat applied by reflow during mounting, an impact applied to the package 40, and the like.

  In the example of the oscillator 700 illustrated in FIG. 17, the example in which the vibrator 100, the heating element 750, the circuit element 760, and the like are accommodated in the recess 716 of the second package 710 has been described, but the circuit element 760 is excluded. It is also possible. In this case, the structure which does not provide the mount frame 740 may be sufficient. In this configuration, the connection plate 730 is fixed to the inner bottom surface 718 of the second package 710. Even an oscillator having such a configuration can achieve the same effects as the oscillator 700.

4.2. Modified Example Next, a modified example of the oscillator according to the fourth embodiment will be described with reference to the drawings. FIG. 18 is a cross-sectional view schematically showing an oscillator 701 according to a modification of the fourth embodiment. Hereinafter, in the oscillator 701, members having the same functions as those of the components of the oscillator 700 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the oscillator 700 described above, the second package 710 and the lid 720 form a space (recess 716) in which the vibrator 100 and the like are accommodated.

  On the other hand, in the oscillator 701, as shown in FIG. 18, a space 782 for accommodating the vibrator 100 and the like is formed by the printed circuit board 770 and the cap 780.

  The oscillator 701 includes the vibrator 100, a connection plate 730, a mount 740, a heating element 750, a circuit element 760, a printed board 770, and a cap 780.

  The oscillator 701 has a space 782 formed by a metal or resin cap 780 placed on the printed circuit board 770. Cap 780 is fixed on printed circuit board 770 using solder 784 or the like.

  The space 782 may be non-airtight, that is, may be open to the atmosphere, or may be an airtight space. In the space 782, the vibrator 100 connected to the printed circuit board 770 via the connection plate 730, the heating element 750 connected to the heat conductive layer 752 provided on the back surface side of the vibrator 100, and the print The circuit element 760 provided on the substrate 770 is accommodated.

  The vibrator 100 is arranged so that the back surface to which the heating element 750 is connected faces the printed circuit board 770. The vibrator 100 is fixed to the printed circuit board 770 via a connection plate 730. Note that the connection plate 730 also has a function of electrically connecting the vibrator 100 and the printed circuit board 770.

  The circuit element 760 has at least a function of controlling the vibrator 100 and the heating element 750. In addition to the heating element 750, another circuit component 790 may be provided on the back surface of the vibrator 100. In addition to the circuit element 760, another circuit component 792 may be provided on the printed board 770. Although not shown, the external connection terminal 794 is electrically connected to the circuit element 760, other circuit components 792, and the like.

  The oscillator 701 can achieve the same effects as the oscillator 700 described above.

5. Fifth embodiment 5.1. Oscillator Next, an oscillator according to a fifth embodiment will be described with reference to the drawings. FIG. 19A is a cross-sectional view schematically showing an oscillator 800 according to the fifth embodiment. FIG. 19B is a plan view schematically showing an oscillator 800 according to the fifth embodiment. FIG. 19A is a cross-sectional view taken along line AA in FIG. In FIG. 19B, the lid 720 is not shown for convenience. Hereinafter, in the oscillator 800, members having the same functions as the components of the oscillator 700 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 19, the oscillator 800 is different from the above-described oscillator 700 shown in FIG. 17 in that the vertical direction of the vibrator 100 is reversed. The oscillator 800 includes a vibrator 100, a second package 710, a lid 720, a connection plate 730, a mount 740, a heating element 750, and a circuit element 760.

  The vibrator 100 is fixed to an electrode 732 provided on the inner bottom surface 718 of the second package 710 by four connection plates 730. The vibrator 100 is fixed so that the lid 50 faces the inner bottom surface 718 of the second package 710 and the bottom plate 42 of the first package 40 is disposed on the opening side of the recess 716 of the second package 710. That is, the heating element 750 is provided on the lid 720 side. The connection plate 730 also has a function as an electrical connection means with the excitation electrodes 12a and 12b of the vibrator 100.

  A heat conductive layer 752 and a terminal electrode 754 are provided on the outer surface (back surface) of the bottom plate 42 of the first package 40 of the vibrator 100.

  The outer edge of the heat conductive layer 752 is desirably provided so that the outer edge of the heating element 750 is included therein. By providing the heat conductive layer 252 in this manner, the heat energy generated by the heating element 250 can be diffused over a wide area by the heat conductive layer 252 and the bottom plate 42 of the first package 40 can be heated over a wide area. it can. Accordingly, the first package 40 can be heated at a uniform temperature, and the vibrating piece 10 can be stably heated.

  The heating element 750 is connected to the heat conductive layer 752 by a resin adhesive or the like. A pad (not shown) provided in the heating element 750 and the terminal electrode 754 are electrically connected by a metal wiring 756.

  The circuit element 760 is disposed between the vibrator 100 and the bottom plate 712 of the second package 710, and is fixed to the bottom plate 712 with a conductive adhesive or the like. A pad electrode (not shown) is provided on the active surface of the circuit element 760, and the pad electrode and the electrode 762 are electrically connected by a metal wiring 764.

  In addition to the effects of the oscillator 700 described above, the oscillator 800 has the following effects. In the oscillator 800, since the vibrator 100 is directly connected to the bottom plate 712 of the second package 710 by the connection plate 730, for example, compared with the oscillator 700, the number of components can be reduced, and the size and cost can be reduced. Can be realized. In addition, since the oscillator 800 includes the heating element 750, it is possible to reduce frequency fluctuations due to temperature changes in the usage environment, and it is possible to increase frequency stability. In other words, the oscillator 800 can reduce characteristic fluctuations due to temperature changes in the usage environment, and can be reduced in size and cost.

  In the example of the oscillator 800 illustrated in FIG. 19, the example in which the vibrator 100, the heating element 750, the circuit element 760, and the like are accommodated in the recess 716 of the second package 710 is described, but the circuit element 760 is excluded. It is also possible. Even with the oscillator configured as described above, the same effects as the oscillator 800 can be obtained.

5.2. Modified Example Next, a modified example of the oscillator according to the fifth embodiment will be described with reference to the drawings. FIG. 20 is a cross-sectional view schematically showing an oscillator 801 according to a modification of the fifth embodiment. Hereinafter, in the oscillator 801, members having the same functions as the components of the oscillator 800 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the above-described oscillator 800, the second package 710 and the lid 720 form a space (recess 716) in which the vibrator 100 and the like are accommodated.

  On the other hand, in the oscillator 801, as shown in FIG. 20, the printed circuit board 770 and the cap 780 form a space 782 for accommodating the vibrator 100 and the like.

  The oscillator 801 includes the vibrator 100, a connection plate 730, a mount 740, a heating element 750, a circuit element 760, a printed board 770, and a cap 780.

  The oscillator 701 has a space 782 formed by a metal or resin cap 780 placed on the printed circuit board 770. Cap 780 is fixed on printed circuit board 770 using solder 784 or the like.

The space 782 may be non-airtight, that is, may be open to the atmosphere, or may be an airtight space. In the space 782, the vibrator 100 connected to the printed circuit board 770 via the connection plate 730, the heating element 750 connected to the heat conductive layer 752 provided on the back surface side of the vibrator 100, and the print The circuit element 760 provided on the substrate 770 is accommodated.

  The vibrator 100 is arranged so that the back surface to which the heating element 750 is connected faces the upper surface 786 of the cap 780 (the inner bottom surface of the concave portion of the cap). The vibrator 100 is fixed to the printed circuit board 770 via a connection plate 730. Note that the connection plate 730 has a function of electrically connecting the vibrator 100 and the printed circuit board 770.

  The circuit element 760 has at least a function of controlling the vibrator 100 and the heating element 750. In addition to the heating element 750, another circuit component 790 may be provided on the back surface of the vibrator 100. In addition to the circuit element 760, another circuit component 792 may be provided on the printed board 770. Although not shown, the external connection terminal 794 is electrically connected to the circuit element 760, other circuit components 792, and the like.

  The oscillator 801 can achieve the same effects as the oscillator 800 described above.

6). Sixth Embodiment Next, an electronic apparatus according to a sixth embodiment will be described with reference to the drawings. An electronic apparatus according to the sixth embodiment includes the vibrator according to the invention. Hereinafter, an electronic device including the vibrator 100 will be described as the vibrator according to the present invention.

  FIG. 21 is a plan view schematically showing a smartphone 1000 as an electronic apparatus according to the sixth embodiment. The smartphone 1000 includes an oscillator 700 having a vibrator 100 as shown in FIG.

  The smartphone 1000 uses the oscillator 700 as a timing device such as a reference clock oscillation source, for example. The smartphone 1000 can further include a display unit (such as a liquid crystal display or an organic EL display) 1010, an operation unit 1020, and a sound output unit 1030 (such as a microphone). The smartphone 1000 may also use the display unit 1010 as an operation unit by providing a contact detection mechanism for the display unit 1010.

  FIG. 22 is a perspective view schematically showing a mobile (or notebook) personal computer 1100 as the electronic apparatus according to the sixth embodiment. As shown in FIG. 22, the personal computer 1100 includes a main body portion 1104 having a keyboard 1102 and a display unit 1106 having a display portion 1108, and the display unit 1106 is a hinge structure portion with respect to the main body portion 1104. It is supported so that rotation is possible. Such a personal computer 1100 includes a vibrator 100 that functions as a filter, a resonator, a reference clock, and the like.

  FIG. 23 is a perspective view schematically showing a mobile phone (including PHS) 1200 as an electronic apparatus according to the sixth embodiment. A cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display portion 1208 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates the vibrator 100 that functions as a filter, a resonator, or the like.

FIG. 24 is a perspective view schematically showing a digital still camera 1300 as an electronic apparatus according to the sixth embodiment. In FIG. 24, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 captures a light image of a subject with a CCD (Charge Cou).
An image pickup signal (image signal) is generated through photoelectric conversion by an image pickup device such as a pleded device.

  A display unit 1310 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD. The display unit 1310 displays an object as an electronic image. Functions as a viewfinder. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 incorporates the vibrator 100 that functions as a filter, a resonator, and the like.

  The electronic devices 1000, 1100, 1200, and 1300 according to the sixth embodiment can include the vibrator 100 that can reduce the stress generated in the resonator element.

  The electronic device including the vibrator of the present invention is not limited to the above example, and for example, an ink jet discharge device (for example, an ink jet printer), a laptop personal computer, a television, a video camera, a video tape recorder, and a car navigation system. Devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, videophones, security TV monitors, electronic binoculars, POS terminals, medical devices (eg electronic thermometers, blood pressure) Applied to blood glucose meters, blood glucose meters, electrocardiogram measuring devices, ultrasonic diagnostic devices, electronic endoscopes), fish detectors, various measuring instruments, instruments (eg, vehicles, aircraft, ship instruments), flight simulators, etc. Can do.

  By using the oscillators 700 and 800 including the heating element 750 described above, the vibrator according to the present invention can be used as a base station (large cell or small cell) for mobile communication (LTE, Long Term Evolution, etc.), a high-end router. It can be applied to electronic devices such as an oscillator for optical communication, an exchange, a measuring instrument, an ultra-high-quality audio device, a synthesizer, a broadcasting device, and a high-end wireless device.

7). 7th Embodiment Next, the mobile body which concerns on 7th Embodiment is demonstrated, referring drawings. The moving body according to the seventh embodiment includes the vibrator according to the present invention. Hereinafter, a moving body including the vibrator 100 will be described as the vibrator according to the present invention.

FIG. 25 is a perspective view schematically showing an automobile 1500 as a moving body according to the seventh embodiment. For example, as shown in FIG. 25, an automobile 1500 has an electronic control unit 1504 that incorporates the vibrator 100 and controls tires and the like mounted on a vehicle body 1502. In addition, the vibrator 100 includes a keyless entry, an immobilizer, a car navigation system, a car air conditioner, an antilock brake system (ABS), an air bag, a tire pressure monitoring system (TPMS), an engine. The present invention can be widely applied to electronic control units (ECUs) such as controls, battery monitors for hybrid vehicles and electric vehicles, and vehicle attitude control systems.

  The moving body 1500 according to the seventh embodiment can include the vibrator 100 that can reduce the stress generated in the resonator element.

  The above-described embodiments and modifications are merely examples, and the present invention is not limited to these. For example, it is possible to appropriately combine each embodiment and each modification.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

DESCRIPTION OF SYMBOLS 1 ... Ceramic substrate, 2 ... Bonding material, 4 ... Resin layer, 6 ... Conductive layer, 8 ... Bonding material, 10 ... Vibrating piece, 12a ... 1st excitation electrode, 12b ... 2nd excitation electrode, 14a ... 1st extraction electrode , 14b ... second extraction electrode, 16a ... first connection electrode, 16b ... second connection electrode, 20a ... first support part, 20b ... second support part, 20c ... third support part, 20d ... fourth support part, 21a, 21b, 21c, 21d ... 1st beam part, 22a, 22b, 22c, 22d ... 2nd beam part, 23a, 23b, 23c, 23d ... 3rd beam part, 24a, 24b, 24c, 24d ... 4th beam , 25a, 25b, 25c, 25d ... fifth beam, 26a, 26b, 26c, 26d ... sixth beam, 27a, 27b, 27c, 27d ... seventh beam, 28a, 28b, 28c, 28d ... 8 beams, 30 ... frame, 40 ... package, 41 Inner bottom surface, 42 ... bottom plate, 43 ... recess, 44 ... side wall, 46 ... seam ring, 50 ... lid, 100 ... vibrator, 101 ... SC-cut quartz substrate, 200 ... vibrator, 210a, 210b, 210c, 210d ... first 1 wide part, 212a, 212b, 212c, 212d ... 2nd wide part, 214a, 214b, 214c, 214d ... 1st connection part, 216a, 216b, 216c, 216d ... 2nd connection part, 250 ... heating element, 252 ... Thermal conduction layer, 270a ... wide portion, 300,400 ... vibrator, 421a, 421b ... first beam portion, 422a, 422b ... second beam portion, 423a, 423b ... third beam portion, 424a, 424b ... fourth beam Part, 425a ... wide part, 500, 600 ... vibrator, 700, 701 ... oscillator, 710 ... package, 712 ... bottom plate, 714 ... side wall, 716 Recessed portion, 718 ... inner bottom surface, 720 ... lid, 730 ... connection plate, 732 ... electrode, 740 ... mount, 750 ... heating element, 752 ... heat conduction layer, 754 ... terminal electrode, 756 ... metal wiring, 760 ... circuit element, 762 ... Electrode, 764 ... Metal wiring, 770 ... Printed circuit board, 780 ... Cap, 782 ... Space, 784 ... Solder, 790, 792 ... Circuit components, 794 ... External connection terminal, 800, 801 ... Oscillator

Claims (12)

A pair of support parts;
A substrate for supporting the pair of support portions;
A vibrating piece attached to a pair of the support parts;
With
The extending direction of the support part is
A component in a first direction and a component in a direction opposite to the first direction;
A component in a second direction orthogonal to the first direction and a component in a direction opposite to the second direction;
A component in a third direction orthogonal to the first direction and the second direction;
Including a vibrator. In claim 1,
The support part is
A first beam portion having one end side supported by the substrate and extending to have a component along the first direction;
A second beam portion extending from the other end side of the first beam portion to have a component along the second direction;
A third beam portion extending from the tip side of the second beam portion so as to have a component along a direction opposite to the first direction so as to be aligned with the first beam portion;
A fourth beam portion extending from the tip side of the third beam portion so as to have a component along a direction opposite to the second direction so as to be aligned with the second beam portion;
A fifth beam portion connected to the distal end side of the fourth beam portion and extending to have a component along the third direction;
Including a vibrator. In claim 2,
The support part is
Extending from the distal end side of the fourth beam portion so as to have a component along the direction opposite to the first direction so as to be aligned with the first beam portion, the distal end side being connected to the fifth beam portion A sixth beam part,
A seventh beam portion extending from a distal end side of the fifth beam portion along a plane including the first direction and the second direction;
Including
The vibrator is a vibrator supported by the seventh beam portion. In any one of Claims 1 thru | or 3,
The pair of support portions are vibrators having a rotationally symmetric positional relationship in plan view. In any one of Claims 1 thru | or 4,
The pair of support parts are connected to a frame part,
A vibrator in which a pair of the support portions are disposed inside the frame portion. In claim 5,
At least a part of the frame is attached to the substrate,
The pair of support portions are vibrators supported by the substrate via the frame portion. In any one of Claims 1 thru | or 6,
The pair of support portions is a vibrator configured by forming a conductive layer on a resin layer. The vibrator according to any one of claims 1 to 7,
A circuit element electrically connected to the vibrator;
Equipped with an oscillator. In claim 8,
An oscillator provided with a heating element. In claim 9,
The heating element is an oscillator, which is a transistor.   An electronic apparatus comprising the vibrator according to claim 1.   A moving body comprising the vibrator according to claim 1.