JPS59181073A - ジヨセフソン集積回路装置の製造方法 - Google Patents

ジヨセフソン集積回路装置の製造方法

Info

Publication number
JPS59181073A
JPS59181073A JP58053481A JP5348183A JPS59181073A JP S59181073 A JPS59181073 A JP S59181073A JP 58053481 A JP58053481 A JP 58053481A JP 5348183 A JP5348183 A JP 5348183A JP S59181073 A JPS59181073 A JP S59181073A
Authority
JP
Japan
Prior art keywords
layer
base electrode
forming
insulating film
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58053481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6258678B2 (enrdf_load_stackoverflow
Inventor
Shinichi Morohashi
信一 諸橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58053481A priority Critical patent/JPS59181073A/ja
Publication of JPS59181073A publication Critical patent/JPS59181073A/ja
Publication of JPS6258678B2 publication Critical patent/JPS6258678B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP58053481A 1983-03-31 1983-03-31 ジヨセフソン集積回路装置の製造方法 Granted JPS59181073A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58053481A JPS59181073A (ja) 1983-03-31 1983-03-31 ジヨセフソン集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58053481A JPS59181073A (ja) 1983-03-31 1983-03-31 ジヨセフソン集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59181073A true JPS59181073A (ja) 1984-10-15
JPS6258678B2 JPS6258678B2 (enrdf_load_stackoverflow) 1987-12-07

Family

ID=12944031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58053481A Granted JPS59181073A (ja) 1983-03-31 1983-03-31 ジヨセフソン集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59181073A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6290102B1 (en) 2000-03-31 2001-09-18 Robert Michael Jennings Liquid measuring and dispensing container

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6290102B1 (en) 2000-03-31 2001-09-18 Robert Michael Jennings Liquid measuring and dispensing container

Also Published As

Publication number Publication date
JPS6258678B2 (enrdf_load_stackoverflow) 1987-12-07

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