JPS59178858U - イオンビ−ム装置 - Google Patents

イオンビ−ム装置

Info

Publication number
JPS59178858U
JPS59178858U JP7318283U JP7318283U JPS59178858U JP S59178858 U JPS59178858 U JP S59178858U JP 7318283 U JP7318283 U JP 7318283U JP 7318283 U JP7318283 U JP 7318283U JP S59178858 U JPS59178858 U JP S59178858U
Authority
JP
Japan
Prior art keywords
ion
supply component
generation chamber
beam device
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7318283U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6348933Y2 (enrdf_load_stackoverflow
Inventor
陽一 大西
池田　種次郎
宏 佐伯
浜根　徳久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7318283U priority Critical patent/JPS59178858U/ja
Publication of JPS59178858U publication Critical patent/JPS59178858U/ja
Application granted granted Critical
Publication of JPS6348933Y2 publication Critical patent/JPS6348933Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP7318283U 1983-05-16 1983-05-16 イオンビ−ム装置 Granted JPS59178858U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7318283U JPS59178858U (ja) 1983-05-16 1983-05-16 イオンビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7318283U JPS59178858U (ja) 1983-05-16 1983-05-16 イオンビ−ム装置

Publications (2)

Publication Number Publication Date
JPS59178858U true JPS59178858U (ja) 1984-11-29
JPS6348933Y2 JPS6348933Y2 (enrdf_load_stackoverflow) 1988-12-15

Family

ID=30203309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7318283U Granted JPS59178858U (ja) 1983-05-16 1983-05-16 イオンビ−ム装置

Country Status (1)

Country Link
JP (1) JPS59178858U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6348933Y2 (enrdf_load_stackoverflow) 1988-12-15

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