JPS6348933Y2 - - Google Patents
Info
- Publication number
- JPS6348933Y2 JPS6348933Y2 JP7318283U JP7318283U JPS6348933Y2 JP S6348933 Y2 JPS6348933 Y2 JP S6348933Y2 JP 7318283 U JP7318283 U JP 7318283U JP 7318283 U JP7318283 U JP 7318283U JP S6348933 Y2 JPS6348933 Y2 JP S6348933Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion
- supply component
- ion beam
- particles
- generation chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 50
- 239000002245 particle Substances 0.000 claims description 34
- 239000007789 gas Substances 0.000 claims description 28
- 239000000498 cooling water Substances 0.000 claims description 21
- 238000000605 extraction Methods 0.000 claims description 20
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 5
- 239000004809 Teflon Substances 0.000 claims description 4
- 229920006362 Teflon® Polymers 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 description 69
- 239000010409 thin film Substances 0.000 description 8
- 230000002159 abnormal effect Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7318283U JPS59178858U (ja) | 1983-05-16 | 1983-05-16 | イオンビ−ム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7318283U JPS59178858U (ja) | 1983-05-16 | 1983-05-16 | イオンビ−ム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59178858U JPS59178858U (ja) | 1984-11-29 |
| JPS6348933Y2 true JPS6348933Y2 (enrdf_load_stackoverflow) | 1988-12-15 |
Family
ID=30203309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7318283U Granted JPS59178858U (ja) | 1983-05-16 | 1983-05-16 | イオンビ−ム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59178858U (enrdf_load_stackoverflow) |
-
1983
- 1983-05-16 JP JP7318283U patent/JPS59178858U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59178858U (ja) | 1984-11-29 |
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