JPS59178719A - 電子ビームアニール方法 - Google Patents
電子ビームアニール方法Info
- Publication number
- JPS59178719A JPS59178719A JP5242683A JP5242683A JPS59178719A JP S59178719 A JPS59178719 A JP S59178719A JP 5242683 A JP5242683 A JP 5242683A JP 5242683 A JP5242683 A JP 5242683A JP S59178719 A JPS59178719 A JP S59178719A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- sample
- film
- electron
- polycrystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02689—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using particle beams
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Recrystallisation Techniques (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5242683A JPS59178719A (ja) | 1983-03-30 | 1983-03-30 | 電子ビームアニール方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5242683A JPS59178719A (ja) | 1983-03-30 | 1983-03-30 | 電子ビームアニール方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59178719A true JPS59178719A (ja) | 1984-10-11 |
JPH0136970B2 JPH0136970B2 (es) | 1989-08-03 |
Family
ID=12914446
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5242683A Granted JPS59178719A (ja) | 1983-03-30 | 1983-03-30 | 電子ビームアニール方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59178719A (es) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61212012A (ja) * | 1985-03-16 | 1986-09-20 | Agency Of Ind Science & Technol | Soi構造形成方法 |
JPS62208620A (ja) * | 1986-03-10 | 1987-09-12 | Agency Of Ind Science & Technol | 半導体装置の製造方法 |
JPS62250631A (ja) * | 1986-04-24 | 1987-10-31 | Agency Of Ind Science & Technol | 半導体薄膜結晶層の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57133626A (en) * | 1981-02-13 | 1982-08-18 | Toshiba Corp | Manufacture of semiconductor thin film |
JPS58112323A (ja) * | 1981-12-26 | 1983-07-04 | Fujitsu Ltd | 電子ビ−ムアニ−ル方法 |
-
1983
- 1983-03-30 JP JP5242683A patent/JPS59178719A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57133626A (en) * | 1981-02-13 | 1982-08-18 | Toshiba Corp | Manufacture of semiconductor thin film |
JPS58112323A (ja) * | 1981-12-26 | 1983-07-04 | Fujitsu Ltd | 電子ビ−ムアニ−ル方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61212012A (ja) * | 1985-03-16 | 1986-09-20 | Agency Of Ind Science & Technol | Soi構造形成方法 |
JPS62208620A (ja) * | 1986-03-10 | 1987-09-12 | Agency Of Ind Science & Technol | 半導体装置の製造方法 |
JPS62250631A (ja) * | 1986-04-24 | 1987-10-31 | Agency Of Ind Science & Technol | 半導体薄膜結晶層の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0136970B2 (es) | 1989-08-03 |
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